RAYLASE AXIALSCAN Manual page 70

Data Sheet
AXIALSCAN-30-Y [260]
General Specifications
Voltage
Current
Power Supply Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear-Translator-Modules
Field Size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M
Specifications Deflection Unit
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long-term Drift with water tempering
1,2,3)
[W] [W2]
Mirrors
Tunings
Acceleration Time (10-90%) (ms)
1) Drift per Axis, 2) After warming-up, variations of ambient temperature < 1K, variations of cooling water < 1K 3) with water tempering at 4.5 l/min and
22˚C water temperature after 0.5 h warm up 4) Specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
2
Max. Laser Power, cw, W/cm
03/2013
3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
±15 V to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 °C to +35 °C
-10 °C to +60 °C
≤ 80 % non condensing
approx. 16.5 kg
260 x 260 mm² 300 x 300 mm²
135 mm 128 mm
282 mm 332 mm
22.9 µm 26.15 µm
< 8 µm < 10 µm
TS-II-30
35.7 mm
35.7 mm
2 µrad
< 70 ppm/K
< 35 µrad/K
< 400 µrad
≤ 0.90
Nd:YAG
1,064 nm
AR Coating
2
1000 W/cm
Analog
Interface Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
400 x 400 mm²
116 mm
455 mm
34.27 µm
< 13 µm
2
= 1.0
QU SI
LN RA LN RA
≤ 0.90 ≤ 0.77 ≤ 0.85 ≤ 0.76
±5 V, ±10 V
XY2-100 Protocol
15 mm
260x260 mm² to 600x600 mm²
Beam optimized
Moving Focusing
Lens Lens
Beam
500 x 500 mm² 600 x 600 mm²
109 mm 104 mm
579 mm 703 mm
42.39 µm 50.5 µm
< 16 µm < 19 µm
SS-III-30
4)
35.4 /36.0
±0.393 rad
< 2 µrad
< 15 ppm/K
< 10 µrad/K
3)
< 60 µrad
SC
LN RA LN
≤ 0.60 ≤ 0.52 ≤ 0.56
FOCUSSHIFTER
BE
RA
≤ 0.49