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Data Sheet
AXIALSCAN-30-C [100BO]
General Specifications
Voltage
Current
Power Supply
Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
Focus Range in Z Direction
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long term Drift with water
tempering
1,2,3)
[W] [W2]
Mirrors
Tunings
Acceleration Time (10-90%) (ms)
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
03/2013
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx. 13.5 kg
100 x 100 mm²
200 x 200 mm²
177.9 mm
132.0 mm
77.0 mm
201.0 mm
96 µm
173 µm
< 4 µm
< 7 µm
≤ 3 ms
≤ 3 ms
-----
34 mm
TURBOSCAN-30
SUPERSCAN-IIE-30
35.7mm
35.38
±0.393 rad
2 µrad
70 ppm/K
35 µrad/K
< 400 µrad
QU
0.90
0.90
0.84
CO
2
10,600 nm
AR Coating
2
700 W/cm
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
Analog
Interface
Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
300 x 300 mm²
114.8 mm
325.0 mm
250 µm
< 10 µm
≤ 3 ms
111 mm
2
= 1,0
4)
/35.82 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
< 150 µrad
< 100 µrad
SI
SC
BE
QU
LN
0.52
0.50
0.90
±5 V, ±10 V
XY2-100 Protocol
15 mm
100x100 to 500x500 mm²
beam optimized
400 x 400 mm²
500 x 500 mm²
105.5 mm
99.7 mm
449.0 mm
572.0 mm
327 µm
403 µm
< 13 µm
< 16 µm
≤ 3 ms
≤ 3 ms
248 mm
473 mm
SUPERSCAN-III-30
4)
35.4
/36.0 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
3)
< 60 µrad
SI
SC
RA
LA
RN
LA
RN
0.77
0.85
0.76
0.60
0.52
BE
LA
RN
0.56
0.49
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