RAYLASE AXIALSCAN Manual page 66

Data Sheet
AXIALSCAN-30-C [600HP]
General Specifications
Voltage ±15 to ±18 V
Current
7.5 A, RMS, max. 10 A
Power
Supply
Ripple/Noise Max. 200 mVpp,
@20MHz bandwidth
Ambient Temperature +15 to +35 °C
Storage Temperature -10 to +60 °C
≤ 80 % non-
Humidity
condensing
Weight approx 16.5 kg
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long term Drift with water tempering
1,2,3)
[W] [W2]
Mirrors
Tunings
Acceleration Time (10-90%) (ms)
2) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power 1/e², cw
03/2013
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
Analog
Interface
Signals
Digital
Input Aperture (fbd)
Field Size
Lens Position
600 x 600 mm² 800 x 800 mm²
162 mm 143 mm
694 mm 941 mm
492 µm 653 µm
< 20 µm < 27 µm
≤ 2.5 ms ≤ 2.5 ms
2
SUPERSCAN-IIE-30
4)
35.38 /35.82 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
< 150 µrad
< 100 µrad
QU SI SC
0.90 0.84 0.52
CO
2
10,600 nm
AR Coating
2
700 W/cm
±5 V, ±10 V
XY2-100 Protocol
20 mm
600x600 to 1200x1200 mm²
beam optimized
1000 x 1000 mm²
131 mm
1189 mm
813 µm
< 34 µm
≤ 2.5 ms
= 1,0
BE QU
LN RA
0.50 0.90 0.77
1200 x 1200 mm²
123 mm
1436 mm
974 µm
< 40 µm
≤ 2.5 ms
SUPERSCAN-III-30
4)
35.4 /36.0 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
3)
< 60 µrad
SI SC
LN RA LN RA LN
0.85 0.76 0.60 0.52 0.56
BE
RA
0.49