RAYLASE AXIALSCAN Manual page 57

Data Sheet
AXIALSCAN-20-DY [200]
General Specifications
Voltage
Current
Power Supply
Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
Focus Range in Z Direction
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long-term Drift with water tempering
1,2,3)
[W] [W2]
Mirrors
Acceleration Time (10-90%) (ms)
1) From bearing surface of lens ring, incl. 1 mm safety clearance, 2) Drift per axis, 3) after warming-up, variations of ambient temperature < 1K, variations of
cooling water < 1K 4) Specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
Max. Laser Power, 100ns Pulse
Width
03/2013
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx. 12.0 kg
200 x 200 mm² 500 x 500 mm²
183.45 mm 127.11 mm
239.9 mm 491.7 mm
15.76 µm 35.19 µm
< 7 µm < 17 µm
≤ 3 ms ≤ 3 ms
------ 119 mm
SUPERSCAN-20
26.0 mm
±0.393 rad
3 µrad
< 50 ppm/K
< 30 µrad/K
< 300 µrad
≤ 0.6
Nd:YAG doubled
532 nm
AR Coating
2
500 W/cm
2
250 MW/cm
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
Analog
Interface
Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
800 x 800 mm²
110.1 mm
862.9 mm
56.06 µm
< 26 µm
≤ 3 ms
520 mm
2
= 1,0
≤ 0.58
±5 V, ±10 V
XY2-100 Protocol
15 mm
200x200 to 1.200x1.200 mm²
1,000 x 1,000 mm² 1,200 x 1,200 mm²
104.4 mm 100.59 mm
1110.4 mm 1357.9 mm
69.96 µm 83.84 µm
< 35 µm < 42 µm
≤ 3 ms ≤ 3 ms
1041 mm 1918 mm
SUPERSCAN-IIE-20L
4)
25.63 /26.28 mm
±0.393 rad
2 µrad
< 15 ppm/K
< 10 µrad/°K
< 300 µrad
< 100 µrad
QU SI
≤ 0.61
BE
≤ 0.40