RAYLASE AXIALSCAN Manual page 55

Data Sheet
AXIALSCAN-20-C [100]
General Specifications
Voltage
Current
Power Supply
Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
Focus Range in Z Direction
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long-term Drift with water tempering
1,2,)
[W] [W2]
Mirrors
Acceleration Time (10-90%) ms)
(
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
09/2014
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx. 12.0 kg
100 x 100 mm² 200 x 200 mm²
83.1 mm 129.93 mm
89.7 mm 213.4 mm
154.0 µm 278.1 µm
< 4 µm < 7 µm
≤ 3 ms ≤ 3 ms
------- 32.0 mm
SUPERSCAN-20
26.0 mm
±0.393 rad
3 µrad
< 50 ppm/K
< 30 µrad/K
< 300 µrad
≤ 0.6
CO
2
10,600 nm
AR Coating
2
700 W/cm
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
Analog
Interface
Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
300 x 300 mm²
147.84 mm
337.2 mm
402.0 µm
< 10 µm
≤ 3 ms
107.0 mm
2
= 1,0
≤ 0.58
±5 V, ±10 V
XY2-100 Protocol
15 mm
100x100 to 500x500 mm²
400 x 400 mm² 500 x 500 mm²
157.28 mm 163.11 mm
460.9 mm 584.7 mm
525.4 µm 648.3 µm
< 13 µm < 16 µm
≤ 3 ms ≤ 3 ms
242.0 mm 463.0 mm
SUPERSCAN-IIE-20L
3)
25.63 /26.28 mm
±0.393 rad
2 µrad
< 15 ppm/K
< 10 µrad/K
< 150 µrad
< 100 µrad
QU SI
≤ 0.61
BE
≤ 0.40