RAYLASE AXIALSCAN Manual page 64

Data Sheet
AXIALSCAN-30-C [200HP]
General Specifications
Voltage
Current
Power Supply
Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long term Drift with water tempering
1,2,3)
[W] [W2]
Mirrors
Tunings
Acceleration Time (10-90%) (ms)
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
01/2013
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx 16.5 kg
200 x 200 mm² 300 x 300 mm²
112mm 88 mm
199.2 mm 322.9 mm
173.7 µm 255.4 µm
< 7 µm < 10 µm
≤ 2.5 ms ≤ 2.5 ms
SUPERSCAN-IIE-30
4)
35.38 /35.82 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
< 150 µrad
< 100 µrad
QU SI
0.90 0.84
CO
2
10.600 nm
AR Coating
2
700 W/cm
Analog
Interface
Signals
Digital
Input Aperture (fbd)
Field Size
Lens Position
400 x 400 mm²
76 mm
446.7 mm
337.1 µm
< 14 µm
≤ 2.5 ms
2
= 1,0
SC BE QU
LN RA
0.52 0.50 0.90 0.77
±5 V, ±10 V
XY2-100 Protocol
20 mm
200x200 bis 600x600 mm²
beam optimized
500 x 500 mm² 600 x 600 mm²
68 mm 63 mm
570.4 mm 694.2 mm
418.8 µm 500.5 µm
< 17 µm < 20 µm
≤ 2.5 ms ≤ 2.5 ms
SUPERSCAN-III-30
4)
35.4 /36.0 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
3)
< 60 µrad
SI SC
LN RA LN RA LN
0.85 0.76 0.60 0.52 0.56
BE
RA
0.49