RAYLASE AXIALSCAN Manual page 68

Data Sheet
AXIALSCAN-30-Y [300HP]
General Specifications
Voltage
Current
Power Supply Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear-Translator-Modules
Field Size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long term Drift with water tempering
1,2,3)
[W] [W2]
Mirrors
Tunings
Acceleration Time (10-90%) (ms)
1)Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
2
Max. Laser Power, cw, W/cm
03/2013
±15 V to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 °C to +35 °C
-10 °C to +60 °C
≤ 80 % non condensing
approx. 16.5 kg
300 x 300 mm² 500 x 500 mm²
132 mm 104 mm
332 mm 579 mm
27µm 44µm
< 10 µm < 17 µm
SUPERSCAN-IIE-30
4)
35.38 /35.82 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
< 150 µrad
< 100 µrad
QU SI
0.90 0.84
Nd:YAG
1,064 nm
AR Coating
2
1000 W/cm
Analog
Interface Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
800 x 800 mm²
87 mm
950 mm
70 µm
< 27 µm
2
= 1.0
SC BE QU
LN
0.52 0.50 0.90
3-Axis Laser Beam Subsystems
±5 V, ±10 V
XY2-100 Protocol
20 mm
300x300 mm² to 1200x1200 mm²
Beam optimized
Moving
Lens
Beam
1000 x 1000 mm² 1200 x 1200 mm²
81 mm 77 mm
1198 mm 1446 mm
87 µm 104 µm
< 34 µm < 41 µm
SUPERSCAN-III-30
4)
35.4 /36.0 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
3)
< 60 µrad
SI SC
RA LN RA LN RA
0.77 0.85 0.76 0.60 0.52
Focusing
Lens
BE
LN RA
0.56 0.49