1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long-term Drift with water tempering
1,2)
[W] [W2]
Mirrors
Acceleration Time (10-90%) (ms)
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for QU fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
03/2013
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx. 12.0 kg
500 x 500
250 x 250 mm²
mm²
54.77 mm
98.25 mm
275 mm
584.7 mm
281.0 µm
548.79 µm
< 8 µm
< 16 µm
≤ 3 ms
≤ 3 ms
-------
67.0 mm
SUPERSCAN-20
26.0 mm
±0.393 rad
3 µrad
< 50 ppm/K
< 30 µrad/K
< 300 µrad
≤ 0.6
CO
2
10,600 nm
AR Coating
2
700 W/cm
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN