RAYLASE AXIALSCAN Manual page 59

Data Sheet
AXIALSCAN-20-Y [200]
General Specifications
Voltage
Current
Power Supply
Ripple/noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
Focus Range in Z Direction
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long-term Drift with water tempering
1,2,)
[W] [W2]
Mirrors
Acceleration Time (10-90%) (ms)
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for Qu fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
Max. Laser Power, 100ns Pulse
Width
03/2013
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx. 12.0 kg
200 x 200 mm² 300 x 300 mm²
122.3 mm 98.07 mm
221.1 mm 344.9 mm
29.9 µm 44 µm
< 7 µm < 10 µm
≤ 3 ms ≤ 3 ms
8.0 mm 56.0 mm
SUPERSCAN-20
26.0 mm
±0.393 rad
3 µrad
50 ppm/K
30 µrad/K
< 300 µrad
≤ 0.6
Nd:YAG
1,064 nm
AR Coating
2
1000 W/cm
2
500 MW/cm
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
Analog
Interface
Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
400 x 400 mm²
85.61 mm
468.6 mm
58.2 µm
< 13 µm
≤ 3 ms
143.0 mm
2
= 1,0
≤ 0.58
±5 V, ±10 V
XY2-100 Protocol
15 mm
200x200 to 600x600 mm²
500 x 500 mm² 600 x 600 mm²
78.04 mm 72.95 mm
592.4 mm 716.1 mm
72.3 µm 86.3 µm
< 16 µm < 19 µm
≤ 3 ms ≤ 3 ms
280.0 mm 486.0 mm
SUPERSCAN-IIE-20L
3)
25.63 /26.28 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
< 150 µrad
< 100 µrad
QU SI
≤ 0.61
BE
≤ 0.40