Table of Contents
Advertisement
Data Sheet
AXIALSCAN-30-C [300BO]
General Specifications
Voltage
Current
Power Supply
Ripple/Noise
Ambient Temperature
Storage Temperature
Humidity
Weight
Specifications for Linear Translator Modules
Field size
Mechanical Data:
1)
Distance D
2)
Working Distance
Dynamic Data:
3)
Spot Diameter 1/e
Resolution
Acceleration Time
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
Specifications for associated Deflection Units
Mechanical Data:
Beam Displacement
Dynamic Data:
Typical Deflection
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1,2)
Long-term Drift
Long term Drift with water
tempering
1,2;3)
[W] [W2]
Mirrors
Tunings
Acceleration Time (10-90%) (ms)
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
Wavelength
Coating
Max. Laser Power, cw
03/2013
±15 to ±18 V
7.5 A, RMS, max. 10 A
Max. 200 mVpp, @20MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
approx. 13.5 kg
300 x 300 mm²
400 x 400 mm²
206.0 mm
187.0 mm
325.0 mm
448.0 mm
200.0 µm
265.0 µm
< 10 µm
< 13 µm
≤ 3 ms
≤ 3 ms
TURBOSCAN-30
SUPERSCAN-IIE-30
35.7mm
35.38
±0.393 rad
2 µrad
70 ppm/K
35 µrad/K
< 400 µrad
QU
SI
0.90
0.90
0.84
CO
2
10,600 nm
AR Coating
2
700 W/cm
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
Analog
Interface
Signals
Digital
Max. Input Aperture
Field Size
Lens Positions
500 x 500 mm²
175.0 mm
572.0 mm
330.0 µm
< 16 µm
≤ 3 ms
2
= 1,0
4)
/35.82 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
< 150 µrad
< 100 µrad
SC
BE
QU
LN
0.52
0.50
0.90
±5 V, ±10 V
XY2-100 Protocol
15 mm
300x300 to 750x750 mm²
beam optimized
600 x 600 mm²
750 x 750 mm²
167.0 mm
159.0 mm
696.0 mm
882.0 mm
390.0 µm
490.0 µm
< 19 µm
< 23 µm
≤ 3 ms
≤ 3 ms
SUPERSCAN-III-30
4)
35.4
/36.0 mm
±0.393 rad
2 µrad
15 ppm/K
10 µrad/K
3)
< 60 µrad
SI
SC
RA
LN
RA
LN
RA
0.77
0.85
0.76
0.60
0.52
BE
LN
RA
0.56
0.49
Advertisement
Table of Contents
