MKS 252E Instruction Manual
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MKS 252E Instruction Manual

MKS 252E Instruction Manual

Exhaust valve controller
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MKS 252E Instruction Manual

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  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 120553-P1 Rev A, 2/97 Instruction Manual MKS Type 252E Exhaust Valve Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
  • Page 4 120553-P1 Rev A, 2/97 MKS Type 252E Exhaust Valve Controller Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 6: Table Of Contents

    Table of Contents Table of Contents Safety Information........................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Chapter One: General Information..................5 Introduction ....................... 5 How This Manual is Organized.................. 7 Customer Support ......................
  • Page 7 Table of Contents General Information ....................21 Stepping Drive Motor....................22 Power Supply......................22 Front Panel Controls ....................23 Rear Panel Controls....................25 Labels ........................26 Serial Number Label ..................26 Chapter Four: Operation ......................27 How To Setup the Controller..................27 How To Tune-Up the Controller.................28 How To Use the Normal/Reverse Switch..............29 How To Use External Control ..................29 Advisory......................30 How To Use the Valve Position Option..............31...
  • Page 8 Table of Contents Model Code....................... 47 Index............................49 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 9 Table of Contents Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 10 List of Figures and Tables List of Figures and Tables Figures Figure 1: Preferred Method To Connect a Shielded Cable............12 Figure 2: Alternate Method To Connect a Shielded Cable ............. 12 Figure 3: Standard Pressure Control Setup................16 Figure 4: 253 Valve Connected in Parallel with an Isolation Valve........16 Figure 5: Front Panel Controls ....................
  • Page 11 List of Figures and Tables viii Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 12: Safety Information

    Safety Information Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 13: Symbols Found On The Unit

    Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5008 IEC 417, No.5017 IEC 417, No.5007 Frame or chassis...

  • Page 14: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 15 Safety Information USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual. USE THE PROPER FUSE Use only a fuse of the correct type, voltage rating, and current rating, as specified for your product.

  • Page 16: Chapter One: General Information

    The MKS Type 252E Exhaust Valve Controller controls a stepper motor powered exhaust valve (MKS Type 253) to maintain a constant pressure in a vacuum system by varying the pumping speed. The 252 controller can provide a ±15 VDC output and will accept pressure inputs from a variety of transducers.
  • Page 17 Introduction Chapter One: General Information The 252 controller takes the DC pressure transducer signal, compares it to the set point, and positions the valve so that it will drive the actual pressure to the set pressure. The 252 controller contains the three modes of control action found in most current industrial controllers: proportional, derivative, and integral.

  • Page 18: How This Manual Is Organized

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.
  • Page 19 Customer Support Chapter One: General Information This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 20: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 252 Unit MKS has carefully packed the Type 252 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 21: Interface Cables

    System Interface Cables The system interface cables include cables to connect the 252 controller to a transducer or to the 253B valve, as well as the adapter cable necessary to replace a 252A-C unit with a 252E unit. System Interface Cables To Connect the 252 Unit To...

  • Page 22: Generic Shielded Cable Description

    Table 2: System Interface Cables Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 23: Figure 1: Preferred Method To Connect A Shielded Cable

    Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary)

  • Page 24: Product Location And Requirements

    Chapter Two: Installation Product Location and Requirements Product Location and Requirements The Type 252 unit meets the following criteria: • POLLUTION DEGREE 2 in accordance with IEC 664 • Transient overvoltages according to INSTALLATION CATEGORY II Operating Environmental Requirements • Ambient Operating Temperature: 0°...

  • Page 25: Setup

    Setup Chapter Two: Installation Setup System Design The standard one inch 253 valve has a maximum conductance of 150 liters/sec. and a minimum controllable conductance of about 0.15 liters/sec. Within this range of about 1000 to 1, the 252 controller can provide excellent control if the other system parameters allow. Plumbing should be as short in length and as large in diameter as possible.

  • Page 26: Mounting Instructions

    No special precautions are needed to protect the unit from ordinary mechanical shock and vibration. A rack mounting kit (RM-6) is available from MKS for single or dual unit rack mounting.

  • Page 27: Figure 3: Standard Pressure Control Setup

    Setup Chapter Two: Installation Figure 3: Standard Pressure Control Setup Figure 4: 253 Valve Connected in Parallel with an Isolation Valve Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 28: Electrical Information

    Chapter Two: Installation Electrical Information Electrical Information Fuses The line fuses protect the internal circuitry; both sides of the line are fused. The fuse values are listed in Table 3. Fuse Information Voltage Fuse Type 115 VAC 0.80 A (T) / 250 V / 5 x 20 mm 230 VAC 0.40 A (T) / 250 V / 5 x 20 mm Table 3: Fuse Information...

  • Page 29: Valve Connector

    CB252-16-10. If you are installing the 252 controller into an existing system that uses the old (hex) connector cables, an adapter cable is required. Use cable CB252-17-1 or CB252S-17-1 to replace a Type 252A-C controller with the Type 252E controller. Note Overall metal braided shielded cables, properly grounded at both ends, are required during use to meet CE Mark specifications.

  • Page 30: Input Connector

    Chapter Two: Installation Electrical Information Input Connector This 14-pin Amphenol connector allows you to connect the 252 controller to a transducer. It provides ±15V power and accepts the input pressure signal from the transducer. Input Connector Pinout Assignment + Pressure Input Reserved Reserved Reserved...

  • Page 31: Interface Connector

    Electrical Information Chapter Two: Installation Interface Connector This 14-pin Amphenol connector provides access to the miscellaneous outputs, ±15V power, and external inputs to the 252 controller. Since there are a limited number of spare pins on the Interface connector, the exact pinout depends on which options are installed. •...

  • Page 32: Chapter Three: Overview

    Chapter Three: Overview General Information Chapter Three: Overview General Information The Type 252 controller and 253 valve comprise a high performance exhaust control system. With the use of a suitable pressure transducer, pressure can be repeatedly held to less than 0.1% of full scale.

  • Page 33: Stepping Drive Motor

    Stepping Drive Motor Chapter Three: Overview Stepping Drive Motor The direction of the stepping motor is determined by whichever pair of drivers change state, as shown in Table 7. Stepping Drive Motor Four-Step Sequence Step ↓ ↑ For CW rotation follow steps 1, 2, 3, 4, etc. For CCW rotation follow steps 4, 3, 2, 1 etc.

  • Page 34: Front Panel Controls

    Chapter Three: Overview Front Panel Controls Front Panel Controls Set Point Control Error Meter Open/Close Lights On/Power Valve Mode Switch Int/Ext Span Z (Zero) Gain 10V/1V/0.1V Phase Lead Open/Close Switch Figure 5: Front Panel Controls ON/POWER - Controls the AC power to the 252 controller. The LED indicator below it indicates when the power is on, that is, the plug is in and the fuse is alive.
  • Page 35 Front Panel Controls Chapter Three: Overview GAIN - The GAIN setting determines the overall gain of the controller and should be as high as possible without making the system unstable. The higher the gain, the smaller the dead band. If some overshoot is tolerable, better control (less dead band) can be achieved.

  • Page 36: Rear Panel Controls

    (hex) connector cables, an adapter cable is required. Use adapter cable CB252-17-1 or CB252S-17-1 to replace a Type 252A-C controller with the Type 252E controller. Refer to Table 4, page 18, for the Valve connector pinout. INTERFACE - This 14-pin Amphenol connector provides access to the miscellaneous outputs, ±15V power, and external inputs to the controller.

  • Page 37: Labels

    252E-1-VPO MKS In stru ment s, Inc. Made in t he USA Figure 7: Serial Number Label The instrument model code is identified as “252E - X - Y”, where: 252E = Type Number Number of set point controls Options Refer to Appendix B: Model Code Explanation, page 47, for more information.

  • Page 38: Chapter Four: Operation

    Chapter Four: Operation How To Setup the Controller Chapter Four: Operation How To Setup the Controller Before plugging in the AC line cord, turn the power switch OFF and perform the following steps: 1. Ensure that the voltage selector on the rear panel is in the proper position and that the fuse has the proper rating.

  • Page 39: How To Tune-Up The Controller

    How To Tune-Up the Controller Chapter Four: Operation How To Tune-Up the Controller Turning the Valve Mode Switch (VMS) to S.S. (Soft Start), AUTO, or EXT puts the 252 controller into the Automatic control mode. The exhaust valve will be driven to maintain pressure at the set point value.

  • Page 40: How To Use The Normal/Reverse Switch

    Chapter Four: Operation How To Use the Normal/Reverse Switch How To Use the Normal/Reverse Switch Most applications will require that when the pressure is greater than the set point, the valve should be driven OPEN to return the pressure to the proper value. This is “normal” operation and assumes that the output of the pressure transducer increases positively for increasing pressure.

  • Page 41: Advisory

    How To Use External Control Chapter Four: Operation How To Use Set Point Control The set point voltage may be taken from the front panel control(s) or an external voltage. The standard 252 controller has a single front panel set point control. When the INT/EXT switch (refer to Figure 5, page 23) is in the INT position, the 252 controller will control to a pressure equal to the percentage of the front panel set point times the pressure transducer range.

  • Page 42: How To Use The Valve Position Option

    Chapter Four: Operation How To Use the Valve Position Option How To Use the Valve Position Option The Valve Position Option (VPO) provides a front panel meter readout of the valve position (0 to 100%) and an analog (0 to 10 Volts) signal on the rear panel. These outputs provide you and the controller with an up-to-date readout of the valve position.

  • Page 43: Table 8: Valve Position Option Pinout

    How To Use the Valve Position Option Chapter Four: Operation Valve Position Option Pinout Interface Connector Standard Unit Multiple Set Point MSO, VPO, and VPO and PLO with VPO Option (MSO) Process Limit and VPO Option (PLO) (+) Ext. Set Point VPO (+10 V) VPO (+10 V) (+) Ext.

  • Page 44: How To Use The Multiple Set Point Option

    Chapter Four: Operation How To Use the Multiple Set Point Option How To Use the Multiple Set Point Option The Multiple Set Point Option (MSO) provides up to four front panel set point pots which can be selected either from the front panel, or remotely. When selected, each set point pot provides a precision reference for the controller which maintains the control pressure (or flow) at the preset level.

  • Page 45: Interconnections

    How To Use the Multiple Set Point Option Chapter Four: Operation Interconnections The remote set point select lines are brought out on the Interface connector and are listed in Table 9. The digital ground should be connected to the circuit ground of the digital instrument that is selecting the set points.

  • Page 46: How To Use The Process Limit Option

    Chapter Four: Operation How To Use the Process Limit Option How To Use the Process Limit Option The Process Limit Option (PLO) provides a logic signal (+5V) and a relay closure when the controller error deviates from zero by more than the process limit. The process limit can be set by an internal control to any range from ±0.5 to ±100%.

  • Page 47: Interconnections

    How To Use the Process Limit Option Chapter Four: Operation Interconnections Since there are a limited number of spare pins on the Interface connector, the exact pinout will depend on which options are installed. Some examples are listed Table 10. Process Limit Option Pinout Interface Connector...

  • Page 48: How To Use The Reverse Limit Switch Option

    Chapter Four: Operation How To Use the Reverse Limit Switch Option How To Use the Reverse Limit Switch Option The Reverse Limit Switch Option (RLSO) is incorporated in the 252 controller to provide for valves that have limit switches which are closed when the valve is in the center of it’s operating range.
  • Page 49 How To Use the Reverse Limit Switch Option Chapter Four: Operation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 50: Chapter Five: Maintenance And Troubleshooting

    Instruments immediately. If it is necessary to return the unit to MKS, obtain an ERA number (Equipment Return Authorization Number) from a MKS Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. Maintenance Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.

  • Page 51: How To Perform The Controller Alignment Procedure

    Maintenance Chapter Five: Maintenance and Troubleshooting How To Perform the Controller Alignment Procedure The following alignment procedure should be followed to verify the zero and full scale alignment of the 252 controller. Allow the controller to warm up for at least 30 minutes, with the 253 attached, before starting the alignment.

  • Page 52: Table 11: Test Point Voltages

    Chapter Five: Maintenance and Troubleshooting Maintenance Test Point Voltages Condition Test Point Voltage Control (+) 15 V + 15.00 ±.05 R132 Supply Jumper (-) 15 V Supply - 15.00 ±.05 R129 Jumper Input = 0.000V TPB-8 0.000 Zero (R16) Set point = 000 TPB-7 0.000 S.P.

  • Page 53: Troubleshooting

    Troubleshooting Chapter Five: Maintenance and Troubleshooting Troubleshooting To locate the cause of trouble, follow steps 1, 2, and 3 in sequence. 1. Check for obvious problems such as power off, open fuse, defective line cord, input power failure, or loose connections. 2.

  • Page 54: Table 12: Troubleshooting Chart

    Chapter Five: Maintenance and Troubleshooting Troubleshooting Troubleshooting Chart Symptom Checks and Probable Causes Error Meter shows oscillation or noise a. Check that input flow is steady. b. Check that pressure transducer has a steady output (vibration isolation may be required). c.
  • Page 55 Troubleshooting Chapter Five: Maintenance and Troubleshooting This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 56: Appendix A: Product Specifications

    Appendix A: Product Specifications Troubleshooting Appendix A: Product Specifications CE Mark Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Low-Voltage Directive 73/23/EEC Low-Voltage Requirements II, according to EN 61010-1 Installation Category 2, according to IEC 664 Pollution Degree Product Safety Directive 92/59/EEC Product Safety and Liability External Input Commands CLOSE and OPEN - TTL compatible...
  • Page 57 Troubleshooting Appendix A: Product Specifications This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 58: Appendix B: Model Code Explanation

    Type Number (####) This designates the model number of the instrument. The controller is identified as the Type 252E. Number of Set Point Controls (X) Three types of set point control (multiple set point option) are available, designated by a single number code.

  • Page 59: Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-Source | Www.artisantg.com

    Model Code Appendix B: Model Code Explanation This page intentionally left blank. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 60: Index

    Index Index Cables, 10 Pollution Degree, 13 Connections interface, 20, 25 Returning the product, 7, 9 valve, 18 Customer support, 7 Serial number label, 26 Set point control, 30 Installation Category, 13 Setup interconnections, 15 Labels, 26 mounting, 15 system design, 14 transducers, 15 Manual organization, 7 valve installation, 15...
  • Page 61 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

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