User Manuals: MKS Mass-Flo 558C Mass Flow Controller

Manuals and User Guides for MKS Mass-Flo 558C Mass Flow Controller. We have 1 MKS Mass-Flo 558C Mass Flow Controller manual available for free PDF download: Instruction Manual

MKS Mass-Flo 558C Instruction Manual

MKS Mass-Flo 558C Instruction Manual (52 pages)

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
5
Safety Procedures and Precautions
9
Chapter One: General Information
13
- Introduction
  13
- How this Manual Is Organized
  14
- Customer Support
  15
Chapter Two: Installation
17
- How to Unpack the 1500 Series Unit
  17
- Environmental Requirements
  17
- Setup
  18
- Figure 1: 1500 Series Flow Controller Dimensions
  19
- Figure 2: 1500 Series Flow Controller Mounting Holes
  19
- Gas Line Connections
  20
  - Standard Fittings
    20
  - Figure 3: Standard Compression Fittings
    20
  - Optional Fittings
    21
  - Standard Materials
    21
  - Optional Seals
    21
Chapter Three: Overview
23
- 1500 Series Mass-Flo Meter/Controllers
  23
  - Control Valve
    23
- Electrical Connections
  24
  - Table 1: Type D Connector Pinout
    24
  - Optional Input
    25
  - Valve Drive/Test Point
    25
- Interface Cables
  25
Chapter Four: Operation
27
- Warm up and Start up
  27
- Set Point Command
  29
  - Adjusting Speed to Set Point
    29
- Valve Override
  29
Chapter Five: Theory of Operation
31
- Flow Path
  31
- Measurement Technique
  31
- Control Circuitry
  32
- The Gas Correction Factor (GCF)
  33
Chapter Six: Maintenance
35
- Valve Adjustment
  35
- Repair
  39
Chapter Seven: Troubleshooting
41
- Troubleshooting Chart
  41
Appendix A: Product Specifications
43
- General Specifications
  43
- Electrical Specifications
  44
- Mechanical Specifications
  44
Appendix B: Type 558 Dimensions
45
- Dimensions
  45
- Figure 5: Type 558 Dimensions
  45
- Figure 6: Type 558 Mounting Holes
  45
Appendix C: Gas Correction Factors
47
- Gas Correction Factor Table
  47
Index
51

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