Edwards EXT255H/CF100 Turbomolecular Pump Manuals

Manuals and User Guides for Edwards EXT255H/CF100 Turbomolecular Pump. We have 1 Edwards EXT255H/CF100 Turbomolecular Pump manual available for free PDF download: Instruction Manual

Edwards EXT255H/CF100 Instruction Manual

Edwards EXT255H/CF100 Instruction Manual (44 pages)

Low Voltage EXT Compound Molecular Pumps

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
3
Introduction

7
Technical Data

11
Installation

21
Operation

31
- Start-Up
  31
- Shut-Down
  31
- Shut-Down Due to Pump under or Over-Speed
  32
- Bakeout
  32
Maintenance

33
- Introduction
  33
- Bearing Life
  33
- Rotor Life
  33
- Clean the Pump
  33
- Fault Finding
  34
Storage and Disposal

37
- Storage
  37
- Disposal
  37
Service, Spares and Accessories

39
- Introduction
  39
- Service
  39
- Spares
  39
- ISX Inlet-Screen
  39
- Inlet-Strainer (Ext255Hi 24V Pump Only)
  39
- WCX Water-Cooler
  40
- Inlet-Flange Seals
  40
- Accessories
  40
- Installation
  40
- EXDC Drive Modules
  40
- BX Bakeout Band
  40
- FL20K Foreline Trap
  41
- TAV Vent-Valve and Vent-Port Adaptor
  41
- ACX Air-Cooler
  41
- Vibration Isolators
  41
- PRX Purge-Restrictor
  41
- VRX Vent-Restrictor
  42
- EXT70H/ISO63 Interstage-Port Accessory Kit
  42
- Installation of Optional Accessories (and Spares): Ext255Hi Shown
  43

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