Mechanical Specifications; Stage Initialization; Static Load Characteristics And Stiffness - Newport DL225 User Manual

DL Stage Series
EDH0391En1031 — 03/18
3.2

Mechanical Specifications

Travel Range (mm)
Minimum Incremental Motion (nm)
Bi-directional Repeatability, Guaranteed
Accuracy, Guaranteed
Encoder Resolution (nm)
Origin Repeatability (µm)
Maximum Speed
Maximum Acceleration, No Load (mm/s
Pitch, Typical (Guaranteed)
Yaw, Typical (Guaranteed)
Load Capacity (N)
1) Shown are peak to peak, guaranteed specifications or ±half the value as sometimes shown. For the definition of
typical specifications which are about 2X better than the guaranteed values, visit www.newport.com for the
Motion Control Metrology Primer.
2) For a travel of 325 mm.
3) With DL controller.
4) To obtain arcsec units, divide µrad value by 4.8.
To reach the specifications stated, stages must be fixed on a plane
surface with a flatness of 5 µm with washer under each fixing screw
head (max. tightening torque for mounting screws: 3 Nm).
3.3

Stage Initialization

Before initializing the stage, be sure that the carriage is not positionned
close to the end of run.
3.4

Static Load Characteristics and Stiffness

Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
k α y
X
For Delay line applications, the DL stage load capacity (on carriage) is
limited to 20 N. It is recommended to keep the load centered on the
carriage.
High-Performance Delay Line Stages
(1) (µm)
(1) (2) (µm)
(3) (mm/s) [See chapters 3.3 to 3.6]
2
) [See chapters 3.3 to 3.6]
(1) (2) (4) (µrad)
(1) (2) (4) (µrad)
CAUTION
CAUTION
Z
x
k α
Y
k α z
C z
4
DL125 DL225
125 225
75
±0.15 ±0.15
±1.5
50
0.4 0.4
500 500
7500 7500
±60 (±100) ±60 (±100)
±30 (±60) ±40 (±90)
See chapter 3.4.3
Cz, Normal centered load capacity
Kax, Compliance in roll
Kay, Compliance in pitch
Kaz, Compliance in yaw
NOTE
DL325
325
75 75
±0.15
±2 ±2.5
50 50
0.4
500
7500
±90 (±150)
±50 (±120)
200 N (see note)
15 µrad/Nm
10 µrad/Nm
10 µrad/Nm