Cnist Traceable Validation Tube Care & Cleaning - FALEX 430 ETR Operation Manual

Ellipsometric tube rater
Table of Contents

Advertisement

6: Addendums
Addendum C: NIST Traceable Reference Validation Tube
Note: Handle the heater tube by the ends only. Do not touch the center section of the heater tube
where the deposit is located. Doing so will contaminate the deposit.
Visually inspect the heater tube that is to be tested for any foreign substance (
If a foreign substance is noticed, gently try to blow off with clean dry air.
Note: Do not clean the center section of the heater tube with any cleaner or wipe it with a cloth.
No additional cleaning of the tube is required before testing with the Falex 430 ETR. Doing
so will contaminate or damage the deposit. [Refer to ASTM D3241 for proper cleaning
procedure]
If Cleaning is required for the 'NIST Traceable Reference Tube', please refer to the above warnings
and follow the below directions:
Care and Cleaning of the Silicon Wafers
Method 1:
Apply one drop of Isopropanol, then quickly blow off the Isopropanol with the pure air (
the silicon wafer needs more cleaning, apply one drop of Isopropanol, wipe silicon wafer gently
with laboratory grade Q-tip, then quickly blow off the Isopropanol with pure air (
Method 2:
First rinse with alcohol (
a few drops of detergent
wafers with the hot detergent solution, rinse with distilled water to remove all detergent residue,
finally dry with clean/dry nitrogen.
Note: Humidity can have an effect on test results, they may change an Angstrom the day after
cleaning. Allow the wafers to 'fully' dry before inserting back into the stainless steel
container
Care & Cleaning
isopropanol or methanol
(NIST recommends JOY brand)
50
), then use a solution of hot DI (
, use a natural cotton ball to gently wipe the
such as dust or lint
).
). If
duster
duster
).
) water with
deionized

Hide quick links:

Advertisement

Table of Contents
loading

Related Products for FALEX 430 ETR

Table of Contents