Validation Display & Test - FALEX 430 ETR Operation Manual

3: Detailed User Interface Features
3.5.2 Validation Display & Test
The 'Validation' display (figure 3-6) is used to verify if the machine is measuring the tube
deposits with the same accuracy that it had been previously or if the accuracy of the tube
deposit readings is in question. Obtain a Falex NIST Traceable Reference Tube (p/n 430-200-
002) to verify accurate functionality. This reference tube is a specially designed NIST Traceable
Reference Tube that contains two silicon glass wafers. Each wafer is are NIST certified with one
in the thicknesses range of 60nm and the other 100nm. The NIST Traceable Reference Tube is
housed in a stainless steel tube especially designed to create a dust free environment for the
silicon wafers when the tube is not in use. The tube contains a sealed entry gasket and a
threaded cap to aid in assuring this environment is dust free. The tube comes with two NIST
certificates, one for each wafer that has the certified thickness in Angstroms, these certificates
are individually serial numbered, as well as the NIST Traceable Reference Tube. The stainless
steel tube also has a permanent sticker on the outside with this information. The determined
maximum average thickness should be within ±5% of the known value. If it is not, contact your
local Falex representative. It may be determined that your Falex 430 ETR is due for a
calibration, which is to be performed by your local Falex representative or Falex approved
service technician.
Note: It is important to minimize the exposure time of the silicon wafers to the outside
environment. If the silicon wafers encounter dust, finger prints, scratches, etc. of any
kind, it will degrade the NIST Traceable Reference Tube accuracy and functionality.
Only handle the tube from the ends. If the wafers encounter these types of conditions,
great care must be taken in the cleaning of the wafers. Refer to the included
recommended cleaning & care of the NIST Traceable Reference Tube.
Figure 3-6 – Vaildation Display
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