B Sample Measurement / Validation Data File - FALEX 430 ETR Operation Manual

6: Addendums
Addendum B: Sample Measurement / Validation Data File
Measurement Date File
Date
Type
Tube Name
Operator
Tube SN
Description
Sample Information
Other Information
Tube Material
Test Status
ni
ns
ks
nf
kf
DC Offset
Lab Name
City
State
Country
Ellipsometer SN
Total Volume
Max Ave Thickness
Normalization value
Normalization position
Indexing Path
Calibration Date
Non-Normalized Data
Slice/Position
5 mm - 54 mm
0 ° ...... 345 °
2x3 Normalized Data
Slice/Position
5 mm - 53 mm
0 ° ...... 345 °
3x2 Normalized Data
Slice/Position
5 mm - 52 mm
0 ° ...... 345
6x1 Normalized Data
Slice/Position
5 mm - 52 mm
0 ° ...... 345
Ellipsometric Angles (PSI,DELTA)
Slice/Position
5 mm - 54 mm
0 ° (psi, delta) ... 345 ° (psi, delta)
(Partial data files)
2/5/2018 08:26
Measurement
Test 1
A. Technician
12345678
Sample Test
Specific test details can be entered here
Any other useful information can be entered here
Aluminum
Complete - Pass
1
2.65
-9.4
1.45
0
0.00112
Falex
Sugar Grove
Illinois
USA
ETR_430-DXXXX
0.0142053
86.0872
9.51562
48
57.4294
Feb/02/2018 01:38:53 pm
Validation Date File
Date
Operator
Expected Thickness 1
Expected Thickness 2
Measured Thickness 1
Measured Thickness 2
Angle [deg] Power Wafer 1 Power Wafer 2
0 ° ...... 360 ° x.xxxxx
49
(NIST Traceable Reference Tube)
Feb/01/2018 04:13:13 pm
A. Technician
xxx.xx nm
xxx.xx nm
xxx.xx nm
xxx.xx nm
x.xxxxx