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FALEX 430 ETR Operation Manual

Ellipsometric tube rater
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FALEX 430 ETR
** Ellipsometric Tube Rater **
Operation Manual
Version: 2.1
Falex Corporation
1020 Airpark Drive
Sugar Grove, IL 60554
630.556.3669
www.falex.com

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Summary of Contents for FALEX 430 ETR

  • Page 1 FALEX 430 ETR ** Ellipsometric Tube Rater ** Operation Manual Version: 2.1 Falex Corporation 1020 Airpark Drive Sugar Grove, IL 60554 630.556.3669 www.falex.com...

  • Page 2: Table Of Contents

    Technical Specifications …………………………………………………………………………………………………… 6 Brief Description of Equipment………………………………………………………………………………………... 6 Packing List ..........................8 Initial Machine Setup ………………………………………………………………………………………………………. 8 Getting to know the Falex 430 ETR…….…………………..……………………………………………………….. 9 Laser Control Narrative ......................11 Laser Safety ..........................12 Section 2 Typical Test ........................16 Overview ..........................
  • Page 3 Maintenance / Service ....................44 Maintenance / Service Overview ................... 44 Warning Messages….……………………………………………………………………………………………………….. 45 Error Messages………………………………………………………………………………………………………………... 45 Specific for Validation with Falex NIST Traceable Reference Tube……………………………………. 46 Specific for FPGA Errors……………………………………………………………………………………………….…… 47 Section 6 Addendums ........................48 Parts Listing ..........................48 Sample Measurement / Validation Data File .................

  • Page 4: Forward Safety And Safety Labels Description

    Keep this manual with the machine. If you lose this manual or need an additional copy, please contact Falex Corporation. The information contained in this manual was based on machines in production at the time of publication. Falex Corporation reserves the right to change any portion of this information without notice.
  • Page 5 Forward CAUTION OR WARNING SYMBOL: This symbol indicates a general warning or caution. A caution is important for protecting the equipment and performance. A warning is important to protecting yourself, others, and the equipment. Used in manual to bring attention to an important note or comment. Caution: Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure.

  • Page 6: General Information

    25 kg 56 cm x 30 cm x 43 cm Recommended Working Space: The Falex 430 ETR requires bench space of 24” wide x 30” deep ( ) to comfortably operate the test machine. The table should be reasonably level ( cm x 76 cm 1/32 in.
  • Page 7 1: General Information Falex 430 ETR functionality consists of three (3) main areas (figure 1-1). User Interface Control Panel Protective Housing Figure 1-1 - Areas of Machine 1. User Interface – PC utilizing touchscreen functionality for configuration, control and monitoring of the test.

  • Page 8: Packing List

    Note: Only connect the external power supply delivered with the unit to the Falex 430 ETR. The use of any other external power supply may damage the Falex 430 ETR and void the warranty.

  • Page 9: Getting To Know The Falex 430 Etr

    ) is connected sold separately and has been configured. It is recommended that a printer be purchased through Falex Corporation. If the machine was shipped with a printer, the user interface is already configured for the printer. If the machine was not shipped with a printer then the printer has to be configured. It is recommended that the printer it to be connected to the back USB port (figure 1-4).
  • Page 10 Main Fuse Figure 1-4 – Cabinet (back) The Falex 430 ETR has the following features: User Interface: A touch screen computer is located on the top of the electronic cabinet and is used as the user interface for configuration, control, and monitoring of the test.

  • Page 11: Laser Control Narrative

    ( which switches the application software into the ). Finally, the ‘Start’ button, located on the Falex 430 ETR front control panel, measurement mode is to be pressed. Once pressed, a series of interlocks are verified.

  • Page 12: Laser Safety

    ‘stop’ button on the control panel. 1.7 Laser Safety The Falex 430 ETR incorporates a laser diode that is CE certified. This Laser Product is designated as Class 1 during all procedures of operation. This section will discuss safety details when operating the laser.
  • Page 13  Located on bottom of instrument  8 mm thick The Falex 430 ETR is a stationary instrument and once it is placed within the laboratory it should not be moved. The cabinet housing is not subject to any movable parts and is constructed with overlapping recessed edges, so when assembled, laser reflected emissions are prevented.
  • Page 14 ±5% of the known value. If it is not, contact your local Falex Corp representative. It may be determined that your Falex 430 ETR is due for a Calibration, this is performed by your Falex Corp representative or Compass Instruments service technician.
  • Page 15 1: General Information Identification / Certification Label Located on the lower right side panel of the housing...

  • Page 16: Typical Test

    The following is a general description of a typical test process to be used. More detail on each step can be found in the steps that follow. 1. Prepare the heater tube for installation into the Falex 430 ETR (refer to section 2.2). 2. Install the heater tube into the heater tube assembly (refer to section 2.3).

  • Page 17: Start Test

    6. The heater tube will automatically be pulled into the Falex 430 ETR and properly positioned. 7. The tube inlet shutter door will close.
  • Page 18 3D graph, the associated progress bar and the remaining time status. Figure 2-3 – Measurment display 8. The ‘Ready/Running’ indicator light on the Falex 430 ETR control panel will be blinking during the measurement process. 9. When the measurement process is complete, a ‘Measurement Result’ pass or fail pop-up window...
  • Page 19 14. The measurement process is now complete. Note: The measurement process can be interrupted at any time by pressing the ‘Stop’ button located on the Falex 430 ETR front control panel. This will disable the laser and stop the test (after operation confirmation on popup display).

  • Page 20: Detailed User Interface Features

    3: Detailed User Interface Features 3.1 Software Overview The Falex 430 ETR user interface makes testing easy to setup, repeat and control. It utilizes touchscreen functionality that allows items to be selected by simply touching the item with one’s finger, stylus, or mouse pointer ( if a USB mouse is connected ).
  • Page 21 About - When selected, a popup will appear showing the software revision level. • Exit – Allows the operator to properly exit out of the Falex 430 ETR user interface application before the machine is powered down. This will properly save and close any open files and/or tables before power is removed.

  • Page 22: Functionality

    3: Detailed User Interface Features Display Selection Buttons The display selection buttons allow the operator to open other displays by selecting the associated button. Not all buttons are available to the standard operator. 3.3 Functionality Buttons, icons and enterable fields can be selected by simply touching the item to be selected with one’s finger, stylus, or selecting it with a mouse ( if a USB mouse is connected Buttons and enterable fields that are grayed out are not enabled (figure 3-2).

  • Page 23: Password Levels

    3: Detailed User Interface Features Figure 3-4 – Operator Verification Pop-up 3.4 Password Levels The user interface incorporates two (2) levels of passwords, each level enabling additional functionality above and beyond what is allowed for the typical ‘Operator’ mode. Level 1 (Service Mode) The level 1 password is for factory technicians and authorized personnel use only.
  • Page 24 3: Detailed User Interface Features Figure 3-5 – Measurement Display Measurement Information Operator - Short alpha-numeric reference given to the Operator or Technician. Tube SN: - Tube Serial Number taken by internal camera, Serial Number will also (not the photo) be in Test Data File.
  • Page 25 3: Detailed User Interface Features Results of Measurement This area of the display is populated with important data results when the measurement test has completed. • Max 2.5mm Ave Thickness – Value represents the maximum average thickness of the deposit that was found on the heater tube in nm. If this value is >85 nm, the test result is determined to be a failure.
  • Page 26 3: Detailed User Interface Features Toggle 2D/3D – Selection of this button will switch the thickness graph between a 2D view and a 3D view. In the 3D view, every measured point is shown ( position 5 – 55mm, slice # 0 – 24 ).

  • Page 27: Validation Display & Test

    ±5% of the known value. If it is not, contact your local Falex representative. It may be determined that your Falex 430 ETR is due for a calibration, which is to be performed by your local Falex representative or Falex approved service technician.
  • Page 28 3: Detailed User Interface Features Note: Before performing a ‘Validation’ with the NIST Traceable Reference Tube, it is recommended that the Falex 430 ETR be first ‘Calibrated’ with the NIST Traceable Reference Tube, if not previously done so. To run a ‘Validation’ test, From the ‘Measurement’...
  • Page 29 3: Detailed User Interface Features On the ‘Settings’ screen in the lower right area, verify that the box for ‘Validation with synthetic tubes’ is unchecked and that ‘Indexing’ is checked. Note: If the ‘6x1 Norm On/Off is checked, leave it as found. Note: For ‘Validation with synthetic tubes’, the ‘Validation with synthetic tubes’...
  • Page 30 3: Detailed User Interface Features Note: The tube can only be inserted one direction, one end is larger than the other, also there is an ‘insert’ directional arrow on the end with the tube serial number, non-serial number end is inserted into the unit. Press the ‘Start’...
  • Page 31 3: Detailed User Interface Features Press ‘Start’ at the bottom of the pop-up to begin the validation of the ‘NIST Traceable Reference Tube’ test. Note: The test will take approximately 5 minutes to complete, this includes indexing, edge detection as well as acquiring 20 measurements for each wafer (60nm & 100nm). Once the validation test has completed, you will see the ‘Validation Result pop-up, ‘...
  • Page 32 Button from the Admin screen before the next calibration. This will help with possible errors that sometimes occurs during ‘back-to-back’ validations. Follow the above procedure to run another validation test for the ‘NIST Traceable Reference Tube’. If the validation fails on all three tests, please contact your Falex or Compass representative.

  • Page 33: File Browser Display

    ‘Internal Storage’ shows the directory structure and associated data files stored within the Falex 430 ETR. If an external USB flash drive is connected to the machine, the ‘External Storage’ shows the directory structure and associated files stored on that device.
  • Page 34 3: Detailed User Interface Features 8. Selecting this icon will open the selected file within the internal storage of the corresponding display, or double clicking the selected file ( Measurement or Validation 9. Selecting this icon will open the dialog window pop-up (figure 3-8) for creating a new folder at the selected place within the internal storage.

  • Page 35: Activate Service Mode Button

    3: Detailed User Interface Features Selection of this display button allows factory technicians and authorized personnel to enter a level 1 password, enabling the ‘Settings’ display. (Refer to Section 3.4 and 3.5.6) 3.5.5 Activate Admin Mode Display Selection of this display button allows factory technicians and authorized personnel to enter a level 2 password, enabling the ‘Admin Mode’...

  • Page 36: Settings Display

    In the Settings Display (figure 3-10) you can change parameters for use in the Measurement test as well as others parts of the Falex 430 ETR. Lab Information – Lab Name, City, State & Country can be modified. The Ellipsometer SN cannot be modified.
  • Page 37 Indexing – This is for the switching On/Off the indexing function. Log – This section displays the last 100 log entries. Most actions of the Falex 430 ETR are logged, two log files exist. If one file exceeds 1MB the logging switches to the other file. If the file is already filled it will be overwritten.
  • Page 38 3: Detailed User Interface Features Set Date & Time - opens a dialog where the system ‘Date’: [Year, Month, Day], ‘Time’: [Hour, Minute], ‘Time Format’: [12 or 24 Hr] and ‘Time Zone’ can be adjusted. Once modified, use the ‘Set’ button to store the modified settings. Use the ‘Cancel’ button to restore the settings.

  • Page 39: Admin Mode Display

    Note: This display is for factory technicians and authorized service personnel only. Figure 3-11 – Admin Mode Display Within the Admin Mode Display (figure 3-11) it is possible to control every part of the Falex 430 ETR manually. This display is separated in ten (10) different areas. The ‘Axis Enable’ area allows you to Enable or Disable five (5) areas.
  • Page 40 Tube Clamping – In this area you can switch on/off the Tube Clamping. When a tube is inside the Falex 430 ETR the ‘Tube Inserted’ light glows green. When the Tube Clamping is active, the ‘Clamping Active’ light glows orange.

  • Page 41: Data Files - Measurement / Validation

    4: Data Files – Measurement / Validation 4.1 Data File Overview – Measurement / Validation Data files are created and stored on the user interface for each measurement test. They contain the data that was collected during the test. The file naming format is as follows: Measurement Data File TTTTTT_MMM_DD_YYYY_hhmm [am/pm]_XXXXXXXX.txt Where,...
  • Page 42 4: Data Files – Measurement / Validation Measurement Data File Non-normalized Data Captured raw data that has not been normalized. The 3D graph is populated during a test with non-normalized data. 2x3 Normalized Data Each value is a 2.5mm average area value found of six (6) points ( 2 columns x 3 lines ).
  • Page 43 4: Data Files – Measurement / Validation The header portion contains information that was entered in the ‘Measurement/Validation Information’ portion of the display for the particular test, along with other useful information determined during the test. The header portion of the data file(s) consists of: Measurement Data File Validation Data File •...

  • Page 44: Maintenance / Service

    Please contact your Falex Representative or Compass Service for more information. This does not require the laser to be active. There are no maintenance procedures that require the laser to be on. There is no scheduled maintenance necessary to keep the Falex 430 ETR in compliance.

  • Page 45: Warning Messages

    5: Maintenance /Service Warning Messages [ This is not a complete list, these are commonly encountered Warning Messages, for any other Warning Messages please contact your Falex Representative or Compass Service ] Message Condition Effect Comments Device not calibrated. The file ‘CalibrationData.cal’...

  • Page 46: Specific For Validation With Falex Nist Traceable Reference Tube

    5: Maintenance /Service Specific for Validation with Falex NIST Traceable Reference Tube Message Condition Effect Comments Validation aborted The deviation of the averaged The Validation will fail, Inspect the Tube for dust/dirt because of deviation measurement curve to the single...

  • Page 47: Specific For Fpga Errors

    Can happen for very thick Measurement Values max value for one measurement will abort. Deposits. Power cycle the point is smaller than the value Unit or contact Falex Rep/ for edge detection Compass Service FPGA Error: Shutter is not closing during Test will continue Refer to Section 3.5.7...

  • Page 48: Addendums

    6: Addendums Addendum A: Parts Listing PART # DESCRIPTION 430-200-002 Ellipsometer NIST Reference Validation Tube 431-003-001 Cabinet housing, front 431-003-002 Cabinet housing, top 431-003-003 Cabinet housing, right side 431-003-004 Cabinet housing, left side 431-038-001 User interface (panel PC) 431-103-001 External power supply 431-200-001 Fuse, 10 amp 650-030-161...

  • Page 49: B Sample Measurement / Validation Data File

    Any other useful information can be entered here Tube Material Aluminum Test Status Complete - Pass 2.65 -9.4 1.45 DC Offset 0.00112 Lab Name Falex City Sugar Grove State Illinois Country Ellipsometer SN ETR_430-DXXXX Total Volume 0.0142053 Max Ave Thickness 86.0872...

  • Page 50: Cnist Traceable Validation Tube Care & Cleaning

    Note: Do not clean the center section of the heater tube with any cleaner or wipe it with a cloth. No additional cleaning of the tube is required before testing with the Falex 430 ETR. Doing so will contaminate or damage the deposit. [Refer to ASTM D3241 for proper cleaning procedure] If Cleaning is required for the ‘NIST Traceable Reference Tube’, please refer to the above warnings...
  • Page 51 6: Addendums Recommended cleaning products: Very Pure Isopropanol (degree of purity is VLSI) http://www.microchemicals.com/products/solvents/isopropyl_alcohol.html (pure duster) Thorlabs CA4-EU, but there is an US version CA4-US https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3317&pn=CA4-US Q-Tips / Cotton Ball (cleanroom grade) : http://www.iab-reinraumprodukte.de/en/swabs/polyurethane-swabs/swab-pu- 3921.html?&listtype=search&searchparam=PU%203921...

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