Typical Test; Overview; Heater Tube Preparation; Heater Tube Installation - FALEX 430 ETR Operation Manual

Ellipsometric tube rater
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2: Typical Test

2.1 Overview

Note: The following is a general outline to be used along with the ASTM D3241 test method. Some
steps may not pertain to the conducted test.
The following is a general description of a typical test process to be used. More detail on each step
can be found in the steps that follow.
1. Prepare the heater tube for installation into the Falex 430 ETR (refer to section 2.2).
2. Install the heater tube into the heater tube assembly (refer to section 2.3).
3. Using the user interface, configure and start a test (refer to section 2.4).
Caution: Use of controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.

2.2 Heater Tube Preparation

Note: Handle the heater tube by the ends only. Do not touch the center section of the heater tube
where the deposit is located. Doing so will contaminate the deposit.
1. Visually inspect the heater tube that is to be tested for any foreign substance (
If a foreign substance is noticed, gently blow off with clean dry air.
Note: Do not clean the center section of the heater tube with any cleaner or wipe it with a cloth.
Doing so will contaminate or damage the deposit. [Refer to ASTM D3241 for proper
cleaning procedure of the heater tube after testing per 11.8 'Disassembly' 11.8.2.2]. No
additional cleaning of the tube is required before testing with the Falex 430 ETR.

2.3 Heater Tube Installation

Note: Falex 430 ETR must be powered on, the touchscreen application visible and the self-check
must be finished. The self-check takes approximately 2 minutes.
1. On the user interface, select the 'Insert' icon
2. A message will appear, alerting the operator to wait while internal devices are positioning.
3. The tube inlet shutter door will open.
4. A pop-up window will appear (figure 2-1), alerting the operator to 'Insert the tube'.
located in the display header.
16
such as dust or lint
).

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