FALEX 430 ETR Operation Manual page 43

4: Data Files – Measurement / Validation
The header portion contains information that was entered in the 'Measurement/Validation
Information' portion of the display for the particular test, along with other useful information
determined during the test. The header portion of the data file(s) consists of:
Measurement Data File
• Date/Time
• Type (Measurement)
•
Tube Name
•
Operator
• Tube SN (Serial Number)
• Description
•
Sample Information
•
Other Information
•
Tube Material
•
Test Status
• ni (refractive index of the air)
ns (refractive index of the tube)
•
• ks (extinction coefficient of the tube)
• nf (refractive index of the deposit)
• kf (extinction coefficient of the deposit)
• DC Offset (offset of the photo diode in the dark)
• Lab Name
•
City
•
State
•
Country
• Ellipsometer SN (Serial Number)
•
Total Volume
•
Max Ave Thickness
• Normalization Value
•
Normalization Position
•
Indexing Path
•
Calibration Date
The data table portion of the measurement data file consists of thickness data for each slice and
position ( as defined in the test configuration
360⁰ (
increments of 15⁰
Refer to Addendum 'B' for a partial sample of a data file.
The data table portion of the validation data file consists of Power for Wafer 1 & 2 for Angles [deg]
from 0⁰ thru 360⁰.
Note: Slice 0⁰ and 360⁰ represent the same slice.
). For an ASTM D3241 test, the 24 slices will be from 0 -
) and the position (55 points) will be from 5 – 55 mm (
Validation Data File
Date/Time
Operator
Expected Thickness 1
Expected Thickness 2
Measured Thickness 1
Measured Thickness 2
43
).
increments of 1 mm