Specific For Validation With Falex Nist Traceable Reference Tube - FALEX 430 ETR Operation Manual

5: Maintenance /Service

Specific for Validation with Falex NIST Traceable Reference Tube

Message
Validation aborted
because of deviation
in measurement data
Validation aborted
because of Timeout
during edge detection
Validation aborted
because of Timeout
during compensation
Validation aborted
because of Timeout
during Notch search
Validation aborted
because of Timeout
during Wafer
alignment
Validation aborted
because of Timeout
during measurement
Condition
The deviation of the averaged
measurement curve to the single
curves is too big (more than 500
increments which are 0.038V)
Edge Detection lasts longer
Than 15 seconds.
A timeout is hit during
Compensation.
A timeout is hit during
Notch search.
A timeout is hit during
Wafer alignment.
A timeout is hit during
measurement.
Effect
The Validation will fail,
but the measured
curves are saved to the
HMI folder.
The Validation will be
aborted.
The Validation will be
aborted.
The Validation will be
aborted.
The Validation will be
aborted.
The Validation will be
aborted.
46
Comments
Inspect the Tube for dust/dirt
Refer to Addendum C: NIST
Reference Validation Tube
Care & Cleaning or Contact
Falex Rep/Compass Service
Refer to Section 3.5.7
'Start Initialization' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Power cycle the unit
or Contact Falex Rep/Compass
Service
Power cycle the unit
or Contact Falex Rep/Compass
Service
Power cycle the unit
or Contact Falex Rep/Compass
Service
Power cycle the unit
or Contact Falex Rep/Compass
Service