FALEX 430 ETR Operation Manual page 25

Ellipsometric tube rater
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3: Detailed User Interface Features
Results of Measurement
This area of the display is populated with important data results when the measurement
test has completed.
• Max 2.5mm
deposit that was found on the heater tube in nm. If this value is >85 nm, the test result
is determined to be a failure.
measurement test.
• Deposit Volume – Value represents the total volume of the deposit that was found on
the heater tube in mm
test.
• Normalization Value – Value represents the minimum 2.5mm
normalize the rest of the data by subtracting it from every data point. Value is
determined after the completion of the measurement test.
Other Information
Tube Name - Short alpha-numeric reference given to the tube that is being measured. This
reference is added to the data file name in front of the standard date/time naming convention.
This will be useful in locating specific data files. It is limited to ten (10) alpha-numeric
characters.
Progress – Shows the percentage of the measurement test that has been completed.
Measurement Status – Shows the status of the measurement test. Possible descriptions are:
running, finished, aborted.
Actual Measuring Point – Shows the current measuring point and its corresponding thickness
in nm.
Elapsed Time – Shows how much time has elapsed for the current measurement test.
Remaining Time – Shows how much time remains for the current measurement test.
Graph – The graph is a 3D representation of the deposit found on the installed heater tube.
The graph can be rotated by selecting it with one's finger, stylus, or mouse pointer (if a USB
mouse is connected). The data values displayed will be color coded as follows:
• Green – All data values ≤75 nm
• Yellow – Data values >75 nm and ≤85 nm
• Red – 2.5mm
Reset View – Selection of this button will return the graph to its original appearance.
Auto Rotation – Selection of this button will allow the automatic rotation of the 3D plot to be
switched on or off.
2
Ave Thickness – Value represents the maximum average thickness of the
3
. Value is determined after the completion of the measurement
2
average film thickness is ≥85 nm
Value is determined after the completion of the
25
2
area found. It is used to

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