Specific For Fpga Errors - FALEX 430 ETR Operation Manual

Ellipsometric tube rater
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5: Maintenance /Service

Specific for FPGA Errors

Message
FPGA Error:
Analyzer Index
FPGA Error:
Compensation Error
FPGA Error:
Edge Detection
FPGA Error:
Measurement Values
FPGA Error:
Shutter not closed
FPGA Error:
Shutter, Limit Switches
FPGA Error:
Compensation,
Limit Switches
FPGA Error:
Tube Rotation, index
FPGA Error:
Tube Translation,
Limit Switches
FPGA Error:
Tube Translation,
Init path
Condition
Timeout at initialization while
searching the index of the
analyzer axis.
The maximum sensor value
during compensation is below
the threshold value.
During edge detection the tube
translation axis will hit the back
limit switch or the sensor signal
won't be above the threshold
value for edge detection
The difference between min and
max value for one measurement
point is smaller than the value
for edge detection
Shutter is not closing during
Tube insert or eject.
Both Limit Switches are triggered
or there is a timeout when
moving the axis.
Both Limit Switches are triggered
or there is a timeout when
moving the axis.
Timeout at initialization while
Searching the index of the tube
Rotation axis.
Both Limit Switches are triggered
or there is a timeout when
moving the axis.
The measured path from one
limit switch to another is not
within the tolerated range
Effect
The Initialization will
abort.
Running measurement
will abort.
Running measurement
will abort.
Running measurement
will abort.
Test will continue
Running measurement
will abort.
Running measurement
will abort
Running measurement
will abort
Running measurement
will abort
Running measurement
will abort
47
Comments
Power cycle the unit
or Contact Falex Rep/Compass
Service
Power cycle the unit
or Contact Falex Rep/Compass
Service
Refer to Section 3.5.7
'Tube Translation' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Can happen for very thick
Deposits. Power cycle the
Unit or contact Falex Rep/
Compass Service
Refer to Section 3.5.7
'Shutter' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Refer to Section 3.5.7
'Shutter' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Refer to Section 3.5.7
'Compensation' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Refer to Section 3.5.7
'Tube Rotation' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Refer to Section 3.5.7
'Tube Translation' or Power
cycle the unit or Contact
Falex Rep/Compass Service
Refer to Section 3.5.7
'Tube Translation' or Power
cycle the unit or Contact
Falex Rep/Compass Service

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