FALEX 430 ETR Operation Manual page 14

Ellipsometric tube rater
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1: General Information
Calibration Check
Calibration is not required since the positions of the optical parts are fixed. However, a
verification check can be performed to verify that the laser system is functioning accurately.
Obtain a Falex NIST Traceable Reference Tube (p/n 430-200-002) to verify accurate functionality.
This reference tube comes with one specially designed aluminum tube with two silicon glass
wafers. These wafers are NIST
thickness range of 60nm & 100nm. This tube is housed in a specially designed stainless steel
tube that provides a dust-free environment when the tube is not in use. The tube comes with
two NIST certificates, one for each wafer that has the certified thickness in Angstroms, these
certificates are individually serial numbered, as well as the NIST Traceable Reference Tube. The
stainless steel tube also has a permanent sticker on the outside with this information. The
determined maximum average thickness should be within ±5% of the known value. If it is not,
contact your local Falex Corp representative. It may be determined that your Falex 430 ETR is
due for a Calibration, this is performed by your Falex Corp representative or Compass
Instruments service technician.
Note: Service/Calibration is to be done only by a trained technician.
Laser Safety
Caution: Use of controls, making adjustments or following procedures other than those specified
herein may result in hazardous radiation exposure.
Modifications that affect any aspect of the product's performance or intended functionality will
require re-certification and re-identification of the product in accordance with the provisions of
21CFR 1040.10 and 1040.11. A copy of 21CFR 1040.10 and 1040.11 can be found in FDA website:
http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/CFRSearch.cfm?FR=1040.10
http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/CFRSearch.cfm?FR=1040.11
Labeling
Explanatory Label
Note: The Explanatory label does not appear on the machine. The contents of this label are
included within the Identification/Certification label.
(National Institute of Standards and Technology)
14
certified in the

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