MKS 651C Instruction Manual

Pressure controller

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115605-P1

Rev F, 10/97

Instruction Manual

MKS Type 651C

Pressure Controller

Six Shattuck Road

Fax: (978) 975-0093

Andover, MA 01810-2449

E-mail: mks@mksinst.com

(800) 227-8766 or (978) 975-2350

Web site: http://www.mksinst.com

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Page 1 115605-P1 Rev F, 10/97 Instruction Manual MKS Type 651C Pressure Controller Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
Page 2 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
Page 3 115605-P1 Rev F, 10/97 MKS Type 651C Pressure Controller 600 Series Point Pressure Controller Valve Stop Parameters Remote Learn Open Local Select Close Zero Adjust...
Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Page 5: Table Of Contents
Table of Contents Table of Contents Safety Information........................1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Sicherheitshinweise........................ 5 In dieser Betriebsanleitung vorkommende Symbole ........... 5 Am Gerät angebrachte Symbole................. 6 Sicherheitsvorschriften und Vorsichtsmaßnahmen............
Page 6 Table of Contents Checking the Fuses and Line Voltage Selector Switch ........24 How To Change the Line Voltage ..............25 Chapter Three: Overview .......................27 Front Panel.........................27 Front Panel Components................27 Front Panel Display ..................28 Local and Remote Operation................29 Command Priority ..................29 Control Mode: Self-Tuning or PID Control...........29 Softstart Control ....................30 Battery Backups.....................30 Rear Panel........................31...
Page 7 Table of Contents How To Activate Set Points..................51 How To Identify an Out-of-Range Condition ............. 51 How To Control the Valve..................52 How To Open the Valve................52 How To Close the Valve ................52 How To Halt the Valve.................. 52 How To Activate the Learn Function .................
Page 8 Table of Contents How To Use the Special Zero ................69 How To Remove the Zero................69 How To Activate the Learn Function................70 How To Stop the Learn Function ..............71 How To Determine the Active Set Point..............72 How To Select the Active Set Point................73 How To Select Pressure or Position Control ...............74 How To Change the Set Point Value ................75 How To Adjust the Analog Set Point Value..............76...
Page 9 Table of Contents How To Check the Firmware Version ................ 89 Digital Logic Control....................90 I/O Board Digital Circuitry................90 Digital Input Priorities................... 92 Digital Functions................... 93 Analog Set Point Inputs................. 95 Chapter Seven: Battery-Backed Memory Module ..............97 Replacing the Battery-Backed Memory Module............97 Opening the Unit...................
Page 10 Table of Contents Appendix B: Model Code Explanation...................115 Model Code .......................115 Appendix C: Product Compatibility ..................117 Product Compatibility ....................117 Valves ......................117 Transducers ....................117 Adapter Cables ....................118 Appendix D: Type 651 Displayless Unit ................119 Type 651 Displayless Unit ..................119 RS-232 Configuration ....................120 Internal Switches ...................120 Opening/Closing the 651 Controller...............120 Dipswitch Bank Settings................122...
Page 11 List of Figures List of Figures Figure 1: Voltage and Fuse Data for the Low Power Unit............25 Figure 2: Voltage and Fuse Data for the High Power Unit ............. 26 Figure 3: Front Panel of the 651 Instrument................27 Figure 4: Rear Panel of the 651 Instrument................
Page 12 List of Figures...
Page 13 Table 11: Transducer Connector Pinout..................36 Table 12: System Interface Cables for MKS Transducers ............36 Table 13: Valve Connector Pinout....................37 Table 14: System Interface Cables for MKS Throttle Valves ............37 Table 15: Sensor Range Values ....................67 Table 16: Priority of Digital Inputs...................92 Table 17: Digital Input Functions ....................93...
Page 14 List of Tables...
Page 15: Safety Information
Safety Information Symbols Used in This Instruction Manual Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.
Page 16: Symbols Found On The Unit
Symbols Found on the Unit Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5008...
Page 17: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
Page 18 Safety Procedures and Precautions Safety Information USE THE PROPER POWER SOURCE This product is intended to operate from a power source that does not apply more voltage between the supply conductors, or between either of the supply conductors and ground, than that specified in the manual.
Page 19: Sicherheitshinweise
Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise In dieser Betriebsanleitung vorkommende Symbole Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in dieser Betriebsanleitung. Warnung! &CU 5[ODQN 9#4070) YGKUV CWH GKPG )GHCJTGPSWGNNG JKP 'U OCEJV CWH GKPGP #TDGKVUCDNCWH GKPG #TDGKVUYGKUG GKPGP <WUVCPF QFGT GKPG UQPUVKIG )GIGDGPJGKV CWHOGTMUCO FGTGP WPUCEJIGO·G #WUHÒJTWPI D\Y WPIGPÒIGPFG $GTÒEMUKEJVKIWPI \W -ÌTRGTXGTNGV\WPI HÒJTGP MCPP...
Page 20: Am Gerät Angebrachte Symbole
Am Gerät angebrachte Symbole Sicherheitshinweise Am Gerät angebrachte Symbole Der untenstehenden Tabelle sind die Bedeutungen der Symbole zu entnehmen, die an dem Gerät angebracht sind. Definitionen der am Gerät angebrachten Symbole Ein (Netz) Aus (Netz) Erde Schutzleiter IEC 417, Nr. 5007 IEC 417, Nr.
Page 21: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Bauen Sie in das Instrument keine Ersatzteile ein, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor! Schicken Sie das Instrument zu Wartungs- und Reparatur-zwecken an einen MKS-Kalibrierungs- und -Kundendienst ein! Dadurch wird sicher-gestellt, daß alle Sicherheitseinrichtungen voll funktionsfähig bleiben.
Page 22 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise Erdung und Verwendung geeigneter elektrischer Armaturen! In diesem Instrument liegen gefährliche Spannungen an. Alle verwendeten elektrischen Armaturen und Kabel müssen dem angegebenen Typ entsprechen und sich in einwand-freiem Zustand befinden. Alle elektrischen Armaturen sind vorschriftsmäßig anzubringen und zu erden. Richtiges Netzkabel verwenden! Das verwendete Netzkabel muß...
Page 23: Informations Relatives À La Sécurité
Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité Symboles utilisés dans ce manuel d'utilisation Définition des indications AVERTISSEMENT, ATTENTION et REMARQUE utilisées dans ce manuel. #XGTVKUUGOGPV . KPFKECVKQP #8'46+55'/'06 UKIPCNG WP FCPIGT RQVGPVKGN 'NNG GUV FGUVKP¾G ¯...
Page 24: Symboles Apparaissant Sur L'appareil
Symboles apparaissant sur l'appareil Informations relatives à la sécurité Symboles apparaissant sur l'appareil Le tableau suivant décrit les symboles apparaissant sur l'appareil. Définition des symboles apparaissant sur l'appareil Terre de protection Marche (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.
Page 25: Mesures De Sécurité Et Mises En Garde
NE PAS SUBSTITUER DES PIÈCES OU MODIFIER L'APPAREIL Ne pas utiliser de pièces détachées autres que celles vendues par MKS Instruments, Inc. ou modifier l'appareil sans l'autorisation préalable de MKS Instruments, Inc. Renvoyer l'appareil à...
Page 26 Mesures de sécurité et mises en garde Informations relatives à la sécurité UTILISATION D'UN CORDON D'ALIMENTATION APPROPRIÉ Utiliser uniquement un cordon d'alimentation en bon état et conforme aux exigences de puissance d'entrée spécifiées dans le manuel. Utiliser uniquement un cordon d'alimentation amovible avec des conducteurs dont la section est égale ou supérieure à...
Page 27: Información Sobre Seguridad
Información sobre seguridad Símbolos usados en el manual de instrucciones Información sobre seguridad Símbolos usados en el manual de instrucciones Definiciones de los mensajes de ADVERTENCIA, PRECAUCIÓN Y OBSERVACIÓN usados en el manual. #FXGTVGPEKC 'N UÃODQNQ FG #&8'46'0%+# KPFKEC WP TKGUIQ 2QPG FG TGNKGXG WP RTQEGFKOKGPVQ RT±EVKEC EQPFKEKÉP GVE SWG FG PQ TGCNK\CTUG W QDUGTXCTUG EQTTGEVCOGPVG RQFTÃC ECWUCT NGUKQPGU C NQU GORNGCFQU...
Page 28: Símbolos Que Aparecen En La Unidad
Símbolos que aparecen en la unidad Información sobre seguridad Símbolos que aparecen en la unidad En la tabla que figura a continuación se indican los símbolos que aparecen en la unidad. Definición de los símbolos que aparecen en la unidad Encendido Apagado (alimentación eléctrica)
Page 29: Procedimientos Y Precauciones De Seguridad
No se debe instalar piezas que no sean originales ni modificar el instrumento sin autorización. Para garantizar que las prestaciones de seguridad se observen en todo momento, enviar el instrumento al Centro de servicio y calibración de MKS cuando sea necesaria su reparación y servicio de mantenimiento.
Page 30 Procedimientos y precauciones de seguridad Información sobre seguridad USAR EL CABLE ELÉCTRICO ADECUADO Usar únicamente un cable eléctrico que se encuentre en buenas condiciones y que cumpla los requisitos de alimentación de entrada indicados en el manual. Usar únicamente un cable desmontable instalado con conductores que tengan un área de sección transversal equivalente o superior a 0,75mm².
Page 31: Chapter One: General Information
Chapter One: General Information Introduction The Type 651C instrument is a self-tuning pressure controller for throttle valves. It can supply ±15 Volts to power and provide a readout for an attached capacitance manometer. The self- tuning feature of the Type 651 unit determines system characteristics necessary for control. This...
Page 32: How This Manual Is Organized
Appendix A, Product Specifications, lists product specifications for the 651 instrument. Appendix B, Model Code Explanation, describes the instrument’s ordering code. Appendix C, Products Compatibility supplies information about MKS compatible products. Appendix D, Displayless Version, describes the displayless version and how it differs from the standard 651 unit.
Page 33: Customer Support
Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.
Page 34 Customer Support Chapter One: General Information This page intentionally left blank.
Page 35: Chapter Two: Installation
Chapter Two: Installation How To Unpack the Type 651 Unit MKS has carefully packed the Type 651 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.
Page 36: Product Location And Requirements
651-K1 accessory kit (includes an I/O connector for the rear panel of the unit, a connector cover for the I/O connector, and a screwlock assembly for the I/O connector cover) • Cables for supported sensors and the MKS Types 253 or 653 valves • RM-13 or RM-14 rack mount option •...
Page 37: Setup
Chapter Two: Installation Setup Setup Environmental Requirements Follow these requirements when installing and using a 651 pressure controller. 1. Operating ambient temperature must be in the range of 15° to 40° C (15° to 35° C when equipped with the optional valve failsafe battery backup). 2.
Page 38: Checking The Fuses And Line Voltage Selector Switch
Setup Chapter Two: Installation Checking the Fuses and Line Voltage Selector Switch The 651 unit is shipped with the line voltage set for 115 VAC. If you need to operate the unit with a 230 VAC line voltage, follow the instructions in this section. Refer Table 5 for information on the fuse types.
Page 39: How To Change The Line Voltage
Chapter Two: Installation Setup How To Change the Line Voltage 1. Check the current line voltage setting. Refer to Figure 1 for the location of the voltage selector switch on the low power unit, or to Figure 2, page 26, for the location of the switch on the high power unit. The label above the switch (on either unit) shows the corresponding voltage range and fuse requirements for either voltage setting.
Page 40: Figure 2: Voltage And Fuse Data For The High Power Unit
Setup Chapter Two: Installation Voltage Selector Switch Fuses Figure 2: Voltage and Fuse Data for the High Power Unit The 651 pressure controller is now ready for valve connection and system setup. Refer to Chapter Three: Overview, page 27, for an overview of the controller and to Chapter Four: System Setup, page 39, for instructions on how to setup and operate the unit.
Page 41: Chapter Three: Overview
Chapter Three: Overview Front Panel Chapter Three: Overview Front Panel Front Panel Components Figure 3 labels all the components located on the front panel of the 651 instrument. Table 6, page 28, summarizes the functions of the front panel components. Display window Valve position control keys 600 Series...
Page 42: Front Panel Display
Front Panel Chapter Three: Overview Front Panel Display The front panel display shows pressure and valve position by default. The down scrolling key, ] selects the previous display in the display list. The up scrolling key, [ ] scrolls to the next display in the display sequence.
Page 43: Local And Remote Operation
Chapter Three: Overview Front Panel Local and Remote Operation The Key Lock switch is used to select front panel control (Local) or rear panel control (Remote). When set to Local, control command input and set point parameter modification must be entered via the front panel.
Page 44: Softstart Control
Front Panel Chapter Three: Overview When used in the PID control mode, the 651 unit employs a Proportional, Integral, and Derivative (PID) algorithm for control. PID control requires the input of user-defined lead and gain values. Each set point uses its own lead and gain values to optimize response from set point to set point.
Page 45: Rear Panel
Chapter Three: Overview Rear Panel Rear Panel Rear Panel Components Figure 4 labels all the components located on the rear panel of the 651 instrument. The power On/Off switch and the line voltage selector switch are on the back of the 651 unit. The four Type “D”...
Page 46: Electrical Connections
Chapter Three: Overview Electrical Connections Tables 8 through 14, on the following pages, list each connector’s pinout as well as corresponding MKS cable numbers. Note 1. An overall metal braided shielded cable, properly grounded at both ends, is required to meet CE specifications.
Page 47: Table 9: Rs-232 Serial Communication Cables
(pins 2 and 3 reversed) Table 9: RS-232 Serial Communication Cables Caution The MKS RS-232 Serial Communications cable (CB651-10-10) must be used for the 9-pin, Serial Interface connector. Unlisted pins on this connector are not compatible with the current Type “D” 9-pin,...
Page 48: Table 10: I/O Connector Pinout
Rear Panel Chapter Three: Overview I/O Connector Pinout Function Number PLO relay #1 - NC contact PLO relay #1 - NO contact PLO relay #2 - NC contact Digital ground Learn system (low) Hold both pin 6 and pin 11 low to select analog set point with position control Softstart (low) Close valve (low) Reserved...
Page 49 Chapter Three: Overview Rear Panel I/O Connector Pinout (Continued) Function Number Remote zero (low) Stop valve (low) Open valve (low) PLO #2 status (low = out of limit) PLO #1 status (low = out of limit) +15V Output -15V Output Power ground + Set point input - Set point input...
Page 50: Table 11: Transducer Connector Pinout
Digital ground - Pressure input Reserved Reserved Chassis ground Table 11: Transducer Connector Pinout System Interface Cables for MKS Transducers Transducer Type Number Cable Numbers 122/124/223/225/622/623 CB112-2-10 127/128/624/625/626/627/628 CB259-5-10 CB120-1-10 CB112-10-10 121/221 CB112-14-10 Table 12: System Interface Cables for MKS Transducers...
Page 51: Table 13: Valve Connector Pinout
Motor winding B low +15 V @25 mA (for Opto switches) Table 13: Valve Connector Pinout System Interface Cables for MKS Throttle Valves Valve Type Number Cable Number 253A CB652-2-10 653A CB652-1-10 Table 14: System Interface Cables for MKS Throttle Valves...
Page 52: Labels
CE mark signifying compliance with the European CE regulations. Serial #: 0123456789 Model #: 651CXYZCD MKS Instruments, Inc. Made in the USA Figure 5: Serial Number Label The product model number (code) is identified as “651CXYZCD”, where: 651C = Type number...
Page 53: Chapter Four: System Setup
Chapter Four: System Setup Overview Chapter Four: System Setup Overview The 651 pressure controller is configured entirely through menu selection via display lists that appear on the front panel. It is not necessary to open the unit to set any switches. Valve connection and calibration, sensor range and pressure units, etc.
Page 54: Valve Selection And Calibration
Overview Chapter Four: System Setup Valve Selection and Calibration Prior to its use, the appropriate valve must be connected and identified by the 651 controller. The 651 controller is initially configured to work with a 653 valve. Follow the steps below to select another valve.
Page 55: Setup Menu
Chapter Four: System Setup Setup Menu Setup Menu The Setup menu enables you to change the configuration of the 651 controller. The initial configuration is listed in Appendix E: Initial Settings, page 125. The instructions in this section assume that you will enter the commands from the front panel, so be sure that the key lock switch is set to local.
Page 56: Rs-232 Communications
Setup Menu Chapter Four: System Setup RS-232 Communications The 651 controller is initially configured with a baud rate of 9600, no parity, 8 data bits, and CRLF delimiter. Follow the steps below to change any of the RS-232 communication parameters. 1.
Page 57: Sensor Setup
Chapter Four: System Setup Setup Menu Sensor Setup The 651 controller is initially configured to use Torr as the pressure units, 100 Torr as the sensor full scale range, 0 to 10 Volts for the sensor input signal, and 0 to 5 Volts for the analog set point input.
Page 58 Setup Menu Chapter Four: System Setup 4. Scroll to the next topic. PRESSURE UNITS: Torr 5. Scroll through the display list until the unit of measure that the sensor has been calibrated to, appears. The display list includes the following pressure units: Torr* mTorr mbar...
Page 59: Analog Set Point
Chapter Four: System Setup Setup Menu Analog Set Point 1. From the sensor type display, scroll to the next topic in the Setup menu. ANALOG SETPT RANGE: 10 VOLTS 2. Choose either 5 Volts or 10 Volts full scale signal. The initial setting is 0 to 5 Volts.
Page 60: Set Points A Through E, Pressure/Position Selection
Setup Menu Chapter Four: System Setup Set Points A Through E, Pressure/Position Selection The 651 controller is initially configured to use pressure control for all set points, A through E. Follow the steps below to change configuration of any of the set points. 1.
Page 61: Softstart Rates
Chapter Four: System Setup Setup Menu Softstart Rates Softstart rates for set points A through E, analog set point, valve open, and valve close can be established via the Setup menu. If it is not necessary to utilize softstart control in your process, the softstart rate should be left at 100% (of F.S.).
Page 62: Valve Control
Setup Menu Chapter Four: System Setup Valve Control A valve can be controlled to open and close in a direct or reverse direction. Direct action of valve control is defined as valve open at 100% of the valve position’s full scale. and valve close at 0%.
Page 63: Chapter Five: Local Operation
Chapter Five: Local Operation Overview Chapter Five: Local Operation Overview Local operation of the 651 Pressure Controller is similar to System Setup outlined in the previous chapter, in that all functions of the controller can be accessed via display lists, and they respond according to information entered at the front panel.
Page 64: How To View And Adjust Set Points
How To View and Adjust Set Points Chapter Five: Local Operation How To View and Adjust Set Points The 651 instrument provides five user-definable set points (set point A through set point E). Each set point can be configured as a pressure set point or a valve position set point. Pressure set points are displayed in units of Torr, mTorr, mbar, µbar, Pascal, or kPa.
Page 65: How To Activate Set Points
Chapter Five: Local Operation How To Activate Set Points How To Activate Set Points Activating a set point causes the 651 unit to control to that set point. To activate a set point, press the appropriate set point key (A through E). The system responds by illuminating a light in the set point key and controlling according to the selected set point.
Page 66: How To Control The Valve
How To Control the Valve Chapter Five: Local Operation How To Control the Valve The 651 unit can drive the throttle valve to full open or full close, or halt it at its current position. How To Open the Valve To drive the valve to full open, press the [O ] key.
Page 67: How To Activate The Learn Function
Chapter Five: Local Operation How To Activate the Learn Function How To Activate the Learn Function The learn function, activated by pressing the [L ] key, enables the 651 unit to identify EARN important system characteristics for Self-Tuning control. Use the learn function whenever the 651 controller is used in a new vacuum system or when processing conditions are changed (such as changed flow rate, new or refurbished pump, or piping modifications).
Page 68: How To Zero A Sensor
How To Zero a Sensor Chapter Five: Local Operation How To Zero a Sensor Zeroing a sensor is performed to correct sensor zero offsets. 1. Turn the gas flow off. 2. Fully open the control valve. 3. Wait until the system is pumped down to base pressure. In order to achieve a proper zero, the pressure of the system must be lower than the resolution of the Baratron used to measure system pressure.
Page 69: How To Set A Process Limit Relay
Chapter Five: Local Operation How To Set a Process Limit Relay How To Set a Process Limit Relay There are two process limit (PLO) relays in the 651 controller. Each relay has two trip limits: a high trip limit, and a low trip limit. Refer to Table 10, page 34, for the I/O connector pinout to determine which pins are for relay 1, and which are for relay 2.
Page 70: How To View And Adjust The Analog Set Point
How To View and Adjust the Analog Set Point Chapter Five: Local Operation How To View and Adjust the Analog Set Point The 651 controller is capable of accepting one analog set point through the I/O connector on the rear panel. The analog set point can be configured for 5 Volt or 10 Volt full scale input. The analog set point display reflects the voltage percent of the actual input.
Page 71: How To Calibrate Full Scale Span For The Analog Set Point
Chapter Five: Local Operation How To Set Lead and Gain Parameters How To Calibrate Full Scale Span for the Analog Set Point The 651 units are calibrated at the factory for 10 Volt full scale input; if the actual input applied is 10 Volts, the analog set point display shows a value of 100%.
Page 72: How To Set Lead And Gain Parameters
How To Set Lead and Gain Parameters Chapter Five: Local Operation How To Set Lead and Gain Parameters When the 651 unit is configured for PID control, separate lead and gain parameters are maintained for each pressure set point. Set point A is associated with Lead A and Gain A. Set point B is associated with Lead B and Gain B, and so forth.
Page 73: How To Calibrate Span Of The A/D Converter
Chapter Five: Local Operation How To Calibrate Span of the A/D Converter How To Calibrate Span of the A/D Converter The controller’s A/D (analog-to-digital) converter converts the analog input to a digital value that the controller uses. The span of the A/D converter is calibrated at the factory before you receive your controller.
Page 74 How To Calibrate Span of the A/D Converter Chapter Five: Local Operation This page intentionally left blank.
Page 75: Chapter Six: Remote Operation
Chapter Six: Remote Operation Overview Chapter Six: Remote Operation Overview Remote operation of the 651 Pressure Controller is accomplished via the rear panel either by RS- 232 communication by means of a computer connected to the Serial Interface connector or through analog or digital logic levels at the I/O connector.
Page 76 RS-232 Commands and Requests Chapter Six: Remote Operation Commands Sent from the Computer to the 651 Controller Table 26, page 128, lists the syntax for RS-232 commands. Commands are not case sensitive. If a command requires user-supplied parameters, it is not necessary to type a space between the command and the parameters.
Page 77: Priority Of Command Execution
Chapter Six: Remote Operation RS-232 Commands and Requests Responses Sent from the 651 Controller to the Computer Responses sent from the 651 controller to your computer are shown in the last column of Table 27, page 134. The format of responses sent by the 651 controller to the computer will appears in the table as: response value where response is a label that allows you to identify the response and value is the...
Page 78: How To Change Valve Selection And Calibration
How To Change Valve Selection and Calibration Chapter Six: Remote Operation How To Change Valve Selection and Calibration The 651 controller is initially configured as if it is controlling a Type 653 valve. You must reconfigure the 651 controller to work with a Type 253 valve. Follow the steps below to select another valve.
Page 79: How To Determine And Change The Control Mode
Chapter Six: Remote Operation How To Determine and Change the Control Mode How To Determine and Change the Control Mode The 651 controller is initially configured for PID control. Follow the steps below to change the control mode setting. 1. To determine which control mode is currently selected, issue the request: ENTER The 651 controller will return the following response: V value...
Page 80: How To Configure The Sensor Parameters
How To Configure the Sensor Parameters Chapter Six: Remote Operation How To Configure the Sensor Parameters The 651 controller is initially configured to use 100 Torr as the sensor full scale range, and 0 to 10 Volts for the sensor input signal. Follow the steps below to change these parameters. Note Be sure that the sensor is connected to the 651 controller before changing the sensor parameters.
Page 81: How To Change The Sensor Range
Chapter Six: Remote Operation How To Configure the Sensor Parameters How To Change the Sensor Range The 651 controller is initially configured to work with a 100 Torr pressure sensor. If your sensor covers a different range, issue the command: E value ENTER where value is a valid sensor range.
Page 82: How To Request The Pressure Reading
How To Request the Pressure Reading Chapter Six: Remote Operation How To Request the Pressure Reading To request the system pressure, issue the request: ENTER The 651 controller responds with the message: P value where value is % of Full Scale. For example, if the pressure is 10 Torr for a 10 Torr F.S.
Page 83: How To Zero A Sensor
Chapter Six: Remote Operation How To Zero a Sensor How To Zero a Sensor Zeroing a sensor allows you to correct any zero offsets. 1. Turn the gas flow off. 2. Fully open the control valve. 3. Wait until the system is pumped down to base pressure. In order to achieve a proper zero, the pressure of the system must be lower than the resolution of the Baratron used to measure system pressure.
Page 84: How To Activate The Learn Function
How To Activate the Learn Function Chapter Six: Remote Operation How To Activate the Learn Function The learn function enables the 651 unit to identify important system characteristics for Self-Tuning control. Use the learn function whenever you install a new vacuum system or change any processing conditions (such as changed flow rate, new or refurbished pump, or piping changes).
Page 85: How To Stop The Learn Function
Chapter Six: Remote Operation How To Activate the Learn Function How To Stop the Learn Function It is recommended that the learn function go through to completion. However, if your process is slow to reach its highest pressures and your process will not be operating at those pressures, it is possible to stop the learn function early.
Page 86: How To Determine The Active Set Point
How To Determine the Active Set Point Chapter Six: Remote Operation How To Determine the Active Set Point To determine the set point currently selected as active: • Issue the following request to determine the active set point: ENTER The 651 controller responds with the following message: M XYZ where X = indicates the active set point: 0 for the analog set point...
Page 87: How To Select The Active Set Point
Chapter Six: Remote Operation How To Select the Active Set Point How To Select the Active Set Point The 651 instrument provides five user-definable set points (set point A through set point E) and one external analog set point, received through the I/O connector. The 651 controller uses the “active”...
Page 88: How To Select Pressure Or Position Control
How To Select Pressure or Position Control Chapter Six: Remote Operation How To Select Pressure or Position Control The 651 controller is initially configured to use pressure control for the internal set points, A through E, and the analog set point. 1.
Page 89: How To Change The Set Point Value
Chapter Six: Remote Operation How To Change the Set Point Value How To Change the Set Point Value Follow these instructions to change the value of one of the internal set points, A through E. Refer to How To Adjust the Analog Set Point Value, page 76, for information on changing the analog set point value.
Page 90: How To Adjust The Analog Set Point Value
How To Adjust the Analog Set Point Value Chapter Six: Remote Operation How To Adjust the Analog Set Point Value The 651 controller is capable of accepting one analog set point through the I/O connector on the rear panel. The analog set point value is expressed as a % of full scale, using the following formula: analog set point = (analog set point voltage / full scale voltage) For example, if the 651 unit is configured for 5 Volt full scale input, and the actual input applied...
Page 91: How To Zero The Analog Set Point
Chapter Six: Remote Operation How To Adjust the Analog Set Point Value How To Zero the Analog Set Point Zeroing the analog set point allows you to correct any zero offsets. The Z4 command instructs the controller to take the current value of the external analog set point for its zero value.
Page 92: How To Set The Full Scale Level Of The Analog Set Point
How To Adjust the Analog Set Point Value Chapter Six: Remote Operation How To Set the Full Scale Level of the Analog Set Point 1. Issue the following command to set the value of the analog set point: S6 value ENTER where value = 0 for 100% of the controlling transducer’s range;...
Page 93: How To Calibrate Span Of The A/D Converter
In that case, perform the procedure to calibrate the span of the A/D converter again. If the error persists, it indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.
Page 94: How To Respond To A Checksum Error
Perform the steps described in How To Calibrate Span of the A/D Converter, page 79. If the checksum error persists after you perform a full calibration, the error indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.
Page 95: How To Set The Lead And Gain Parameters
Chapter Six: Remote Operation How To Set the Lead and Gain Parameters How To Set the Lead and Gain Parameters When the 651 unit is configured for PID control, separate lead and gain parameters are maintained for each pressure set point. Set point A is associated with Lead A and Gain A. Set point B is associated with Lead B and Gain B, and so forth.
Page 96 How To Set the Lead and Gain Parameters Chapter Six: Remote Operation 4. Issue the following command to enter a new gain parameter: Mx value ENTER where x = 1 is the gain parameter for set point A 2 is the gain parameter for set point B 3 is the gain parameter for set point C 4 is the gain parameter for set point D 5 is the gain parameter for set point E...
Page 97: How To Set The Softstart Control Rate
Chapter Six: Remote Operation How To Set The Softstart Control Rate How To Set The Softstart Control Rate Each set point, A through E, can be assigned a different softstart rate. In addition, you can assign a softstart rate for the valve open and valve close commands. If it is not necessary to utilize softstart control in your process, leave the softstart rate at 100% (of F.S.).
Page 98: How To Check The Softstart Rate
How To Set The Softstart Control Rate Chapter Six: Remote Operation How To Check the Softstart Rate Issue the RS-232 request: ENTER where xx = 15 for set point A 16 for set point B 17 for set point C 18 for set point D 19 for set point E 20 for the analog set point...
Page 99: How To Configure The Valve Parameters
Chapter Six: Remote Operation How To Configure the Valve Parameters How To Configure the Valve Parameters In order for the 651 controller to work properly with your valve, you need to check several valve parameters. All of the parameters are set to an initial value, so it may be unnecessary for you to change any entries.
Page 100: How To Change The Valve Position Output
How To Configure the Valve Parameters Chapter Six: Remote Operation How To Change the Valve Position Output The valve position output can be configured for 5 Volts or 10 Volts full scale. The 651 controller is initially configured for 10 Volts. To change the valve position output, follow the steps below.
Page 101: How To Control The Valve
Chapter Six: Remote Operation How To Control the Valve How To Control the Valve You can command the 651 unit to drive the throttle valve to full open or full close, or hold the valve at its current position. Note The RS-232 commands to open, close, or hold the valve, override the active set point control of the valve.
Page 102: How To Set A Process Limit Relay
How To Set a Process Limit Relay Chapter Six: Remote Operation How To Set a Process Limit Relay There are two process limit relays (also known as trip point relays) in the 651 controller. Each relay has two trip limits: a high trip limit, and a low trip limit. Refer to Table 10, page 34 for pinout of the I/O connector to determine which pins are for relay 1, and which are for relay 2.
Page 103: How To Check The System Status
Chapter Six: Remote Operation How To Check the System Status How To Check the System Status You can issue a “system status” request to determine the state of the 651 controller. The request ENTER The 651 controller sends the response: M XYZ where X = 1 for remote control...
Page 104: Digital Logic Control
Digital Logic Control Chapter Six: Remote Operation Digital Logic Control Digital and analog control of the 651 unit is accomplished via the I/O connector located on the rear panel. Refer to Table 10, page 34, for the pinout of the I/O connector. Note Any RS-232 command takes priority over digital logic commands.
Page 105: Figure 7: I/O Board Digital Output Circuitry
Chapter Six: Remote Operation Digital Logic Control The I/O board contains 6 type 74HC digital outputs, each having the capacity to drive one standard TTL load. The approximate time constant of the outputs are 2.5 microseconds. Each output includes a 240 ohms series resistor to protect it against line surges and spikes. Additionally, there is a 0.01 µFD capacitor connected to the chassis.
Page 106: Digital Input Priorities
Digital Logic Control Chapter Six: Remote Operation Digital Input Priorities Digital inputs are scanned and selected in a prioritized manner, enabling a higher priority request to override a lower one. The order of priority is shown in Table 16. Priority of Digital Inputs Order of Priority I/O Pin No.
Page 107: Digital Functions
Chapter Six: Remote Operation Digital Logic Control Digital Functions Most digital input functions are activated by pulling the input to a TTL low level (0 to 0.8 Volts) for a minimum of 50 milliseconds. If a higher priority function has not already been selected, the requested function will be activated.
Page 108 Digital Logic Control Chapter Six: Remote Operation Digital Input Functions (Continued) Digital I/O Pin No. State Digital Input Function Input No. Selects set point A High No function Selects set point B High No function Selects set point C High No function Selects set point D High...
Page 109: Analog Set Point Inputs
Chapter Six: Remote Operation Digital Logic Control Digital Output Functions Digital I/O Pin No. State Digital Output Function Output No. Pressure outside of PLO 1 band (relay is not energized) High Pressure inside of PLO 1 band (relay is energized) Pressure outside of PLO 2 band (relay is not energized) Pressure inside of PLO 2 band (relay is...
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Page 111: Chapter Seven: Battery-Backed Memory Module
The 651 pressure controller has a battery-backed memory module which stores configuration and learned system information while power is off. The battery-backed memory module (MKS part no. 037-9227) is specified to provide at least seven years of memory storage under all operating conditions.
Page 112: Removing The Cpu Board And Memory Module
Replacing the Battery-Backed Memory Module Chapter Seven: Battery-Backed Memory Module Removing the CPU Board and Memory Module 1. Locate the CPU board. It is labeled on the rear panel as the Serial Interface connector (in slot 1). 2. Remove the screw to the left of the connector. 3.
Page 113: Installing A New Memory Module And Replacing The Cpu Board
Chapter Seven: Battery-Backed Memory Module Replacing the Battery-Backed Memory Module Installing a New Memory Module and Replacing the CPU Board 1. Position the new memory module over the socket, being careful to line up the pins correctly (pin 1 is located directly to the left of the notch). Snap the module firmly into place.
Page 114 Replacing the Battery-Backed Memory Module Chapter Seven: Battery-Backed Memory Module This page intentionally left blank...
Page 115: Chapter Eight: Valve Failsafe Battery Back-Up Option
30 seconds after an AC power failure. The 651 instrument can be set to drive the valve open, closed, or hold it in its current position upon a power loss. This battery is a rechargeable, 12 Volt, 2 amp-hour, sealed lead-acid battery (MKS part no. 003-1109451).
Page 116: Battery Voltage
Battery Voltage Chapter Eight: Valve Failsafe Battery Back-up Option Battery Voltage The normal voltage level of the battery ranges from 11 V to 15.5 V. A voltage level below 11 V indicates a discharged battery. A voltage level above 15.5 V indicates an open fuse, a disconnected battery, or a defective charger.
Page 117: Startup
If the battery voltage is within the acceptable range of 11 V to 15.5 V, the instrument revision and the current software/firmware version appears on the front panel display for about five seconds, before advancing to the default Pressure and Position screen: 651C V 1.8 Figure 9: Initial Display Screen PRES 4.90 Torr...
Page 118: Battery Voltage Out-Of-Range
Startup Chapter Eight: Valve Failsafe Battery Back-up Option Battery Voltage Out-of-Range If the battery voltage is out-of-range, the instrument revision and the current software/firmware version appears on the front panel display for about five seconds (refer to Figure 9, page 103), followed by the appropriate error message, rather than advancing to the default Pressure and Position display screen (refer to Figure 10, page 103).
Page 119: Operation
If the battery back-up module has not been recognized, the screen reverts to the initial display screen which lists the instrument revision and the current software/firmware version: 651C V 1.8 Press any key to return to the default Pressure and Position screen.
Page 120: How To Set The Battery Back-Up Valve Control
Operation Chapter Eight: Valve Failsafe Battery Back-up Option How To Set The Battery Back-up Valve Control Local Operation 1. Ensure the Key Lock Switch is set to Local and that the default Pressure and Position display appears on the screen. PRES 4.90 Torr 35.0 % 2.
Page 121 Chapter Eight: Valve Failsafe Battery Back-up Operation Option Remote RS-232 Operation The command [K value] defines the direction of valve control upon power failure, where: value: 0 disable option open valve at power failure close valve at power failure To check the type of valve battery back-up control, issue the request: R 40 The controller responds with the message [K value ], where: value : 0...
Page 122: Expected Battery Life
Expected Battery Life Chapter Eight: Valve Failsafe Battery Back-up Option Expected Battery Life When AC power is lost, the valve battery backup drives the valve to full open or full closed within 20 seconds. An AC power failure typically results in a 30% discharge of the battery. Under this condition, the battery life is at least 1000 cycles, and should be able to recharge within a few hours after power returns.
Page 123: Battery Replacement
Chapter Eight: Valve Failsafe Battery Back-up Battery Replacement Option Battery Replacement Opening the Unit Warning The 651 unit has lethal voltages inside. Servicing of the unit must be performed by qualified personnel only. To avoid an electrical shock, disconnect the power line before opening the unit.
Page 124: Installing The New Battery
Battery Replacement Chapter Eight: Valve Failsafe Battery Back-up Option 14. Pull the front panel module completely forward and remove the battery circuit board assembly. Installing the New Battery 1. Disconnect the two insulated clips from the battery terminals. Caution Do not allow anything to short across the battery terminals; for example, a screwdriver.
Page 125: Chapter Nine: Maintenance
(Equipment Return Authorization Number) from a MKS Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. Periodically, check for wear on the cables and inspect the enclosure for visible signs of damage.
Page 126: Figure 13: Fuse Holder
How To Replace Fuses Chapter Nine: Maintenance Fuse Holder Clip Figure 13: Fuse Holder 4. Gently press against the clip and push up with the screwdriver until the plastic fuse holder pops out. It may be necessary to repeat steps 2 and 3 on the left side to release the fuse holder. 5.
Page 127: Appendix A: Product Specifications
An overall metal braided shielded cable, properly grounded at both ends, is required during use. Interconnecting cables between the Type 651 and the valve, sensor, and serial communications are available at an additional charge. Please consult factory for ordering information. Necessary adapter cables are included when retrofitting MKS Type 152, 252, and 652 controllers.
Page 128 Appendix A: Product Specifications Input power Low power unit 90 to 132 or 180 to 264 VAC @50/60 Hz 75 VA (max) High power unit 90 to 132 or 180 to 264 VAC @48/62 Hz 150 VA (max) Interface RS-232 Analog Digital Inputs (16): HCMOS pulled high with a 4.7k...
Page 129: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation Model Code The desired options for the 651 controller are identified in the model code when you order the unit. The model code is identified as follows: 651C X Y Z C D where: 651C Type Number Display...
Page 130 Model Code Appendix B: Model Code Explanation Interface (Y) The type of interface is indicated by a single digit code. Ordering Code RS-232 Valve Driver (Z) The valve driver is designated by a single letter code. Ordering Code Stepper Motor Power Supply (C) Two power supplies are available, designated by a single number code.
Page 131: Appendix C: Product Compatibility
Product Compatibility Appendix C: Product Compatibility Product Compatibility Valves MKS downstream control valves compatible with the 651 unit include: Types 253 and 653 Transducers Table 21 lists the current available to a transducer from a 651 controller (and its specific valve configuration).
Page 132: Adapter Cables
Product Compatibility Appendix C: Product Compatibility Adapter Cables The 651 Pressure Controller can replace the 152, 252, and 652 controllers. It may, however, be necessary to fit the Type “D” connectors on the 651 unit with adapter cables. Refer to Table 22 for a listing of the appropriate cable numbers.
Page 133: Appendix D: Type 651 Displayless Unit
Appendix D: Type 651 Displayless Unit Type 651 Displayless Unit Appendix D: Type 651 Displayless Unit Type 651 Displayless Unit The displayless unit is a standard 651 unit with the following differences: • There is no front panel display • An additional RS-232 serial port, located on the front panel, is intended to be used in conjunction with a laptop or notebook computer •...
Page 134: Rs-232 Configuration
RS-232 Configuration Appendix D: Type 651 Displayless Unit RS-232 Configuration Since the displayless 651 controller cannot use the Setup menu to change the controller’s RS-232 configuration, changes can be made by means of internal dipswitch settings. Note If a 651 controller has a front panel display, use the Setup menu to change the RS-232 configuration, described in Setup Menu, page 41.
Page 135: Figure 15: Dipswitch Bank Location (Top View)
Appendix D: Type 651 Displayless Unit RS-232 Configuration Dipswitch Bank on I/O Board Figure 15: Dipswitch Bank Location (Top View) The dipswitch bank is located on the I/O board, shown in Figure 15. You can also identify the I/O board by locating the I/O connector on the rear panel (refer to Figure 4, page 31). Figure 16, shows an enlarged view of a dipswitch bank.
Page 136: Dipswitch Bank Settings
RS-232 Configuration Appendix D: Type 651 Displayless Unit Dipswitch Bank Settings The dipswitch settings control the RS-232 communications parameters. When you receive your 651 controller, the unit is set up with the initial dipswitch settings listed in Table 23. Default Dipswitch Settings Dipswitch Setting Function...
Page 137: Table 24: I/O Board Dipswitch Bank And Rs-232 Communications Settings
Appendix D: Type 651 Displayless Unit RS-232 Configuration Caution Before opening the unit to change dipswitch settings, you must power off the unit as a safety precaution. Refer to Opening/Closing the Type 651 Controller, page 120. Any new dipswitch settings take effect when the unit is powered up.
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Page 139: Appendix E: Initial Settings
Appendix E: Initial Settings RS-232 Configuration Appendix E: Initial Settings Your 651 controller is shipped with the following initial configuration. This configuration is not a default configuration, however, since the 651 unit stores most of the configuration settings in non-volatile RAM. Settings stored in non-volatile RAM are not lost when the power is turned off.
Page 140 RS-232 Configuration Appendix E: Initial Settings Initial Settings (Continued) Parameter Default Options Page mTorr, mbar, µbar, Pa, kPa, Display Units Torr cmH 2 O, inH 2 O Analog Set point Input 0 to 5 V 0 to 10 V Pressure Sensor Input 0 to 10 V 0 to 5 V, 0 to 1 V Analog Output...
Page 141: Appendix F: Command And Request Reference
Appendix F: Command and Request Reference Command Reference Appendix F: Command and Request Reference Command Reference A command sent to the 651 unit instructs it to perform a task or change a setting. Commands are grouped into two categories: control commands and parameter commands. Control commands directly control the actions of the valve.
Page 142: Table 26: Rs-232 Command Summary
Command Reference Appendix F: Command and Request Reference RS-232 Command Summary Command Function Set level of set point A; where value is the % of F.S. S1 value pressure for pressure set points; position for position set points % of open for direct direction control % of closed for reverse direction control S2 value Set level of set point B;...
Page 143 Appendix F: Command and Request Reference Command Reference RS-232 Command Summary (Continued) Command Function Select set point C Select set point D Select set point E Select analog set point E value Sensor range value 0 = 0.1 10 = 1000 1 = 0.2 11 = 5000 2 = 0.5...
Page 144 Command Reference Appendix F: Command and Request Reference RS-232 Command Summary (Continued) Command Function I1 value Set softstart rate of set point A, value is % of full speed I2 value Set softstart rate of set point B, value is % of full speed I3 value Set softstart rate of set point C, value is % of full speed I4 value...
Page 145 Appendix F: Command and Request Reference Command Reference RS-232 Command Summary (Continued) Command Function Y1 value Calibrate span of A/D converter; calibrate position output and zeroed pressure output. The controller will assign value to the converter reading of the pressure channel. Learn the full scale of the analog set point.
Page 146 Command Reference Appendix F: Command and Request Reference RS-232 Command Summary (Continued) Command Function Set point E type where value is: T5 value 0 = position 1 = pressure Set point analog type where value is: T6 value 0 = position 1 = pressure Valve position output range where value is: B value...
Page 147 Appendix F: Command and Request Reference Command Reference RS-232 Command Summary (Continued) Command Function Disable battery backup Select valve to open upon power fail Select valve to close upon power fail Table 26: RS-232 Command Summary...
Page 148: Request And Response Reference
Request and Response Reference Appendix F: Command and Request Reference Request and Response Reference A request to the 651 controller causes it to send back information. Refer to Table 27 for a complete list of request messages. Note To conserve space, the ENTER key is not included in the request messages listed the following tables.
Page 149 Appendix F: Command and Request Reference Request and Response Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message Alternate system status M XYZ (for compatibility) For the value of X : 0 = analog set point 1 = set point A 2 = set point B 3 = set point C...
Page 150 Request and Response Reference Appendix F: Command and Request Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message I4 value Softstart rate for set point D where value is % of full speed I5 value Softstart rate for set point E where value is % of full speed I6 value Softstart rate for analog set...
Page 151 Appendix F: Command and Request Reference Request and Response Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message Set point D type (either T4 type , where type equals: pressure or position) 0 = position 1 = pressure Set point E type (either T5 type , where type equals: pressure or position)
Page 152 Request and Response Reference Appendix F: Command and Request Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message Sensor voltage range G value , where value equals: 0 = 1 Volt 1 = 5 Volts 2 = 10 Volts Sensor type U value , where value equals: 0 = Absolute...
Page 153 Appendix F: Command and Request Reference Request and Response Reference RS-232 Request and Response Summary (Continued) Request Message Information Requested Response Message Valve response to power fail K0 = Option is disabled (or not (when using the optional valve installed) failsafe backup) K1 = Valve opens at power fail K2 = Valve closes at power fail...
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Page 155: Index
Index Index Analog set point, 30, 45, 55–57, 58, 76–78, Front panel components, 29 Fuse, 24–26 Analog set point inputs, 95 Gain parameter, 58, 81 Battery backup, 30 Battery-backed memory module, 97–99 Initial settings, 125 Installation Category, 22 Calibrating span of A/D converter, 59, 79 Internal switches, 120 Checksum error, 80 Introduction, 17...
Page 156 Index Operating temperature, 23 analog, 30, 41, 45, 55–57, 58, 76–78, 81 Out-of-range signal, 51 analog inputs, 95 digital logic, 30 Settings, initial, 125 PID control mode, 29, 41, 65 Setup menu, 65–80 PID control parameters, 58, 81 Softstart control, 30, 41 Pollution Degree, 22 Softstart rates, 47 Position set points, 74...
Page 157 Local or Remote operation. Please read the information carefully and make the following additions to your 651C, Revision E instruction manual (MKS p/n 115605-P1). Six Shattuck Road...
Page 158 Please Note: MKS Instruments provides these documents as the latest version for the revision indicated. The material is subject to change without notice, and should be verified if used in a critical application. Copyright © 1997 by MKS Instruments, Inc.
Page 159 For complete, detailed information on the battery back-up option, refer to Chapter Eight: Valve Failsafe Battery Back-up Option, in Revision E of the 651C instruction manual. Battery Voltage The normal voltage level of the battery ranges from 11 V to 15.5 V. A voltage level below 11 V indicates a discharged battery.
Page 160 If the battery voltage is within the acceptable range of 11 V to 15.5 V, the instrument revision and the current software/firmware version appears on the front panel display for about five seconds, before advancing to the default Pressure and Position screen: 651C V 1.8 Figure 1: Initial Display Screen PRES 4.90 Torr...
Page 161 Supplement 1 Startup Battery Voltage Out-of-Range If the battery voltage is out-of-range, the instrument revision and the current software/firmware version appears on the front panel display for about five seconds (refer to Figure 1, page 4), followed by the appropriate error message, rather than advancing to the default Pressure and Position display screen (refer to Figure 2, page 4).
Page 162 If the battery back-up module has not been recognized, the screen reverts to the initial display screen which lists the instrument revision and the current software/firmware version: 651C V 1.8 Press any key to return to the default Pressure and Position screen.
Page 163 Supplement 1 Operation How To Set The Battery Back-up Valve Control Local Operation 1. Ensure the Key Lock Switch is set to Local and that the default Pressure and Position display appears on the screen. PRES 4.90 Torr 35.0 % 2.
Page 164 Operation Supplement 1 Remote RS-232 Operation The command [K value] defines the direction of valve control upon power failure, where: value: 0 disable option open valve at power failure close valve at power failure To check the type of valve battery back-up control, issue the request: R 40 The controller responds with the message [K value ], where: value : 0...
Page 165 122094-P1 Rev A, 3/98 Firmware Kit Instructions MKS Type 651C and 655A Pressure Controllers Firmware Revision Kit FRK-651C-V1.9 FRK-655A-V1.9 Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail:mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
Page 166 Please Note: MKS Instruments provides these documents as the latest version for the revision indicated. The material is subject to change without notice, and should be verified if used in a critical application. Copyright © 1998 by MKS Instruments, Inc.
Page 167 Instructions on how to upgrade to EPROM version 1.9x (this document, MKS part no. 122094-P1) Downward Compatibility The 651C and 655A version 1.9x firmware is completely compatible with the 651C and 655A version 1.8x firmware. Returning the Type 651/655 Unit for Firmware Revision Standard maintenance services are available at all of our regional MKS Calibration and Service Centers listed on the inside back cover of your instruction manual.
Page 168 Returning the Type 651/655 Unit for Firmware Revision General Information This page intentionally left blank. Page 4 of 8...
Page 169 Safety Information Safety Information The following general safety precautions must be observed during all phases of upgrading this instrument. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these requirements. DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument.
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Page 171 EPROM Replacement Instructions How To Open the Unit EPROM Replacement Instructions How To Open the Unit Warning DISCONNECT THE POWER CORD The 651/655 unit has lethal voltages present when the power cord is connected. To avoid the danger of electrical shock, disconnect the power cord before opening the unit.
Page 172 How To Replace the EPROM EPROM Replacement Instructions How To Replace the EPROM 1. Locate the EPROM. The EPROM is located in the middle of the CPU board, when viewed from the top. 2. Firmly grasp the EPROM and disengage it from the socket. 3.

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