The Epx L; The Epx Le; The Epx N; The Epx Ne - Edwards EPX HiVac Series Instruction Manual

The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or
sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into
the system being evacuated.
Between 1 bar and 0.2 mbar, the EPX Twin pump offers a significant pumping performance advantage over the
standard EPX pump. As such, the EPX Twin pump is ideal for use on load lock applications, rapid cycling applications
etc.
The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is
therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water
supply and return pipelines are connected to the pump by water connectors (customer specified)
and 9). Cooling water must be provided commensurate with environmental conditions (humidity and temperature)
such that the dewpoint is not reached. Refer to
Refer to Figure 2 and 4. The pump incorporates an EMC supply filter and an inverter drive, which provides and
controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump: (refer
to Figure 4, items 2, 3, 4, and 5 and
pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which
is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the
motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases,
the motor will slow down again.
The EPX pump is supported by four vibration isolators
Pump protection sensors automatically shut down the pump if a fault condition arises: refer to
The EPX pump is available in a number of different variants. The nomenclature is arranged to help identify which
variants are suitable for which applications, and which method of control is required for the pump. The four base
variants are described in more detail below:
1.2.1

The EPX L

This pump is for use on clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is
provided by the process tool interface. (Refer to
1.2.2

The EPX LE

This pump is for use on clean duty applications such as loadlock, and is augmented with an End User Controller (EUC).
The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide
network for remote control and monitoring. A Pump Display Terminal (PDT) may also be used with the End User
Controller to facilitate local control. (Refer to
1.2.3

The EPX N

This is fitted with a gas module that supplies nitrogen purge gas to the shaft seal and pump mechanism areas to
provide dilution of process gases for the light duty applications specified in
Section 3.6 for further information).
1.2.4

The EPX NE

This system is a light process application pump with network and local control capability through the EUC as described
in Section 1.2.2. (Refer to
The four base variants, the L, LE, N and NE are also available in two capacities, 180 m
with 180 for example EPX180LE) and 500 m
The EPX pump can also be specified as either 200/208 V or 400 V compatible and a choice of either
1/4 inch BSP, 3/8 inch BSP, 9/16 inch BSP quick connect water fittings or no quick connects.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 9
Table 1). Motor speed depends on the pressure at the pump inlet. When the
Figure
Figure
Figure 5).
3
/hr (letter designation prefixed with 500 for example EPX500N).
for the water supply specifications.
(Figure 2, item 7).
2).
5).
Figure
A419-00-880 Issue F
(Figure 2, items 4
Section 1.3.
1. (Refer to Figure 5, Table 5
3
/hr (letter designation prefixed
and
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