Connect To Your Emergency Stop Circuit; Schematic Diagram Of Emergency Stop Facility - Edwards EPX HiVac Series Instruction Manual

A419-00-880 Issue F
Connect the cooling-water supply as follows:
1. If the pump has been supplied with quick-release connectors, fit a suitable female quick-release connector to
your cooling water supply line, and a suitable male quick-release connector to your cooling water return line
(refer to Section 2).
2. Refer to Figure 2. Remove the yellow blanking-caps from the cooling-water inlet
(Figure 2, item 9).
3. Fit the male quick-release connector on your cooling-water return pipeline to the cooling-water outlet
item 9).
4. Fit the female quick-release connector on your cooling-water supply pipeline to the cooling-water inlet
(Figure 2, item 4).
5. Turn on the cooling water supply.
6. Inspect the water hoses, pipelines and connection to make sure that there are no leaks.
7. Turn off the water supply whilst the remainder of the installation procedure is completed.
Take note of the following when you connect the cooling-water supply and return pipelines:
Route and secure cables, hoses and pipe-work neatly during installation to avoid possible risk of trips.
Wipe up any water spilt during installation to avoid possible risk of slips.
Each EPX pump must be connected to an independent water circuit not in series with each other or other
equipment.
The cooling-water supply should have a lock out/tagout facility in accordance with SEMI S2-0200 clause 17.4.
We recommend that you incorporate a suitable ball-type flow indicator in your water return pipeline, to
provide a visual indication of cooling water flow through the EPX pump.
We recommend that you incorporate a suitable filter in the water supply pipeline, if the water supply
contains particulates. (For the cooling-water supply specification refer to
To conserve resources we recommend that the return water is cooled and re-circulated.
3.9

Connect to your emergency stop circuit

Refer to Figure 18. The pump must be connected to an emergency stop facility, which should be located near to the
pump. The operation of the emergency stop function should immediately disconnect power from the pump when the
emergency stop control is operated. Returning the emergency stop control to its normal operating position should
not result in power being re-applied to the pump; a separate start or reset control should be used for this.
The emergency stop control must be compliant with clause 12 of SEMI S2-0200.
Page 32
Figure 18 - Schematic diagram of emergency stop facility
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(Figure 2, item 4) and outlet
Section 2.4).
© Edwards Limited 2007. All rights reserved.
(Figure 2,