Pump Protection Sensors; Led Status Indicators - Edwards EPX HiVac Series Instruction Manual

A419-00-880 Issue F
The EPX pump is fitted with a Tool Interface Module (TIM), which allows 'plug and play' connection with all major
process tools. This communication includes control and monitoring of the EPX by the tool for example Run, Stop,
Alarm.
A number of different tool interface options (TIMs) can be specified when the pump is first ordered: SPI, C3, TEL,
E73, MCM or HIT.
Note: The LE and NE versions of the EPX pump can be operated via the end user controller and so do not require
a TIM for operation.
The illustrations throughout this manual show the E73 variant of the TIM.
1.3

Pump protection sensors

For EPX N-series pumps, if the pump has been fitted with a C3 or E73 tool interface, there is no
provision for warnings, generated by the pump, to be passed onto the tool. The installer must fit
suitable monitoring equipment to check the nitrogen purge flow, as detailed in
For EPX N-series pumps, the nitrogen purge flow switch in the Gas Module is set to 12 slm. The
flow switch provides an indication that a flow in excess of 12 slm is present, but gives no guarantee
that there is sufficient flow to meet the process requirements. The flow switch is not a guaranteed
safety interlock.
When the pump protection sensor operates, only the electrical supply of the pump-motor is
switched off; the EPX is not isolated from the electrical supply.
A thermal snap-switch located within the pump, monitors the temperature of the body of the EPX pump. When the
temperature of the body exceeds a preset limit, the snap-switch operates, generating an alarm and causing the pump
to stop.
When the EPX pump is automatically shut down by a pump protection sensor, the Alarm LED is lit
On the EPX N series of pumps, a nitrogen purge flow switch is fitted to the Gas Module to monitor the total purge
flow to the pump. If the purge flow drops below 12 slm, the warning LED on the front panel (or EUC if fitted), will
light (Figure 4, item 4). The pump will continue to run.
1.4

LED status indicators

Refer to Table 1 and Figure
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4.
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Section 3.
(Figure 4, item 5).