Installation; Safety; Unpack And Inspect - Edwards EPX HiVac Series Instruction Manual

3

Installation

3.1

Safety

Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment. Do not use this pump in a manner that
is not specified in this manual.
Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such
that the dew point is not reached.
Ensure that the EPX pump is suitable for your application. The EPX L series of pumps are designed for
semiconductor loadlock or transfer pumping applications, or clean general vacuum applications. The EPX N
series of pumps are designed for the light-duty applications detailed in
supplier if you want to use the EPX pump on any other application. Incorrect use of the EPX pump may
invalidate your warranty.
Ensure that you comply with all local and national safety requirements during installation.
Ensure that the installation technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
Dismantle and clean contaminated foreline components inside a fume-cupboard. The EPX pump should NOT
be dismantled under any circumstances.
Vent and purge the process system before you start installation work.
Disconnect the other components in the process system from the electrical supply so that they cannot be
operated accidentally.
Further details are available from the Edwards publication 'Vacuum pump and Vacuum System Safety', part no.
P300-20-200.
3.2

Unpack and inspect

Heavy objects can cause muscle strain or back injury. Use suitable lifting equipment to move the
pump. Refer to
Ensure that M12 metric eyebolts are fitted to the EPX pump as per
the pump. Do not handle the pump using the gas module pipework.
1. Use suitable lifting equipment attached to the lifting bolts
convenient position, then remove any protective packaging and covers.
2. Inspect the pump. If the pump is damaged notify your supplier and the carrier in writing within three days; state
the Item Number of the EPX pump together with your order number and your supplier's invoice number. Retain
all packing materials for inspection. Do not use the pump if it is damaged.
© Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
WARNING
CAUTION
WARNING
Section 2 for the pump mass.
WARNING
Figure 1. Contact Edwards or your
Figure
(Figure 2, item 2) to move the EPX pump into a
A419-00-880 Issue F
2, item 2 when lifting
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