Cooling-Water Supply; Nitrogen Purge System (Epx N Series Pumps); Materials In Contact With Process Gases - Edwards EPX HiVac Series Instruction Manual

2.4

Cooling-water supply

Cooling-water items
Maximum supply pressure
Minimum required pressure differential across supply and return
Maximum supply temperature
Minimum supply temperature
Maximum particle size in supply
Typical heat removed from EPX pump
Minimum water flow rate
Connectors
Inlet
Outlet
2.5

Nitrogen purge system (EPX N series pumps)

Gas Module Items
Nitrogen supply interface
Maximum supply pressure
Minimum supply pressure
Minimum purity
Typical nitrogen purge flow at a supply pressure of 3.0 barg
2.6

Materials in contact with process gases

Material items
Pump-body
Pump rotor
Internal shaft seals
O-rings
Pump shaft
Gas module nitrogen components
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 9 - Cooling water supply
Table 10 - Nitrogen supply
Table 11 - Materials in contact with process gas
Reference data
Hard anodised aluminium
Hard anodised aluminium
PTFE coated aluminium
Viton fluoroelastomer
Carbon steel
Stainless steel, hard anodised aluminium and viton
Reference data
5
7 barg, 7 x 10 Pa, 100 psig
5
2 bar, 2 x 10 Pa, 30 psi
o
35 C
o
15 C
2 -5
0.03 mm , 4.6 x 10 inch
-1
1.3 kW, 5118 btu h
-1
2 l min , 31.7 US gallons h
Per customer specification
Per customer specification
Reference Data
1/4 inch (6.35 mm) Tube
5
7 barg, 7 x 10 Pa, 100 psig
5
3.0 barg, 3 x 10 Pa, 45 psig
0.9995
25 slm (17 slm Gas Ballast)
A419-00-880 Issue F
2
-1
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