Epx E Dry Pump - Edwards EPX HiVac Series Instruction Manual

Dry vacuum pumps
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A419-00-880 Issue F
Number
Description
1
Label - Product name.
2
XLR Connector - This may be used to connect a fab-wide network to allow remote monitoring
and control of the EPX Dry Pump.
3
Label - Warning do not remove cover until 4 minutes after disconnecting power from the
pump.
4
RJ12 Connector - This is used to connect the optional, external, PDT to the EPX Dry Pump.
5
End User Controller accessory - The End User Controller has an on-board display and keypad
that allows local control of the EPX Dry Pump. Refer to
this.
Page 10
Figure 5 - EPX E dry pump
Table 4 - EPX E (Refer to Figure 5)
Edwards and the Edwards logo are trademarks of Edwards Limited.
Section 1.8
and
4
for the operation of
© Edwards Limited 2007. All rights reserved.

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