Technical Data; General; Performance - Edwards EPX HiVac Series Instruction Manual

2

Technical data

2.1

General

Dimensions
Mass:
EPX L
EPX N
EPX LE
EPX NE
Inlet
Inlet fittings (not supplied)
Outlet
Ambient operating temperature range
Maximum ambient operating humidity
Noise level
Vibration
Maximum operating tilt angle
Handling
Maximum exhaust pressure
Lubricating oil
Ingress protection
2.2

Performance

Warm-up time
(to nominal performance)
Peak pumping speed
*
Ultimate vacuum
Maximum leak rate
*
The time taken to reach ultimate vacuum is dependent upon vacuum system cleanliness and foreline
conductance.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 6 - General
EPX180
Refer to
43.5 kg
45.5 kg
44.6 kg
46.6 kg
ISO63
One ISO63 centring ring.
4 Claw clamps
5 to 40
90% RH non-condensing
The pump must not be laid on its side or inverted
The EPX pump has a sealed lubricating oil system. For health and
safety information, refer to the Material Safety Data Sheet for Fomblin
6/6: MSDS No. P120-01-015.
IP44 (with inlet and exhaust connected)
(E-series pumps are rated to IP40)
Table 7 - Performance
EPX180
3 -1
170 m hr 103.0 cfm
-4
<1 x 10 mbar,
-2
<1 x 10 Pa,
-5
<7.5 x 10 Torr
-5 -1
1 x 10 mbar l s , 1 x 10
EPX500
Figure 12, 13, 14, and 15
45.2 kg
47.2 kg
46.3 kg
48.3 kg
ISO160
One ISO160 centring ring.
8 Claw clamps
NW25
o o
C, 41 to 104 F
<59 dB(A)
<0.25 g
o
5
Topple angle >15°
<1200 mbar absolute
EPX500
30 minutes
3 -1
500 m hr
<1 x 10
<1 x 10
<7.5 x 10
-3 -1 -8
Pa l s , 2.1 x 10 atm ft
A419-00-880 Issue F
294.3 cfm
-6
mbar,
-4
Pa,
-7
Torr
3 -1
min
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