Leak Test The System; Connect The Cooling-Water Supply - Edwards EPX HiVac Series Instruction Manual

3.7

Leak test the system

Leak test the system and seal any leaks found to prevent the leakage of dangerous substances out
of the system and leakage of air into the system.
Note: If your exhaust extraction system is unrestricted, and so cannot be sealed for leak test purposes, you must
leak test the system before you connect to the pump outlet.
Leak test the system, then seal any leaks found. Substances which leak from the system may be dangerous to people,
and there may be a danger of explosion if air leaks into the system.
As supplied, the leak rate of the EPX pump is tested to be less than 1 x 10
-8 3 -1
2.1 x 10 atm ft min ). The required leak rate for your system will depend on your safety and process requirements.
3.8

Connect the cooling-water supply

In products supplied with quick-release water connectors, a water expansion valve is installed
between the connector and the pump. This is to prevent over-pressurisation of the water circuit
in the event that the pump is incorrectly operated with water supply disconnected. When using or
maintaining this pump DO NOT REMOVE THE WATER EXPANSION VALVE.
A release of water under pressure constitutes a significant safety hazard. The water supply should
be provided with an isolator in accordance with SEMI S2-0200 Lockout/Tagout requirements.
Do not operate the pump without connecting the water supply and return lines, as permanent damage may be
caused to the equipment.
Appropriate filtration must be provided to ensure that the water supply quality is in accordance with
Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such
that the dew point is not reached.
To prevent damage to the pump in the event of cooling-water supply failure or a blockage in the pump, we
recommend that you incorporate a suitable flow-switch in the cooling-water return pipelines. You can connect
the outputs of the flow-switch to your control equipment to shut down the pump if the cooling-water flow
through the pump gets too low.
© Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
WARNING
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mbar l s
WARNING
WARNING
CAUTION
CAUTION
CAUTION
CAUTION
A419-00-880 Issue F
-1 -3 -1
(1 x 10 Pa l s ,
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