Gas Module Schematic - Edwards EPX HiVac Series Instruction Manual

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Figure 17 - Gas module schematic
1. Supply port
2. Solenoid valve
3. Fixed pressure regulator
4. Check valve
5. Flow switch
6. Fixed flow restrictors
7. Gas ballast port
7a. Alternative ballast port (unused)
8. Seal purge port
8a. Alternative seal purge port (unused)
9. Connector
A419-00-880 Issue F
Page 25