Edwards EPX HiVac Series Instruction Manual page 5

28 Select line menu ........................................................................................................50
Tables
Table
1 LEDs on the EPX pumps ................................................................................................. 7
2 Connections ............................................................................................................... 7
3 EPX L pump labelling information (Refer to
4 EPX E (Refer to
5 EPX N (Refer to
6 General ................................................................................................................... 15
7 Performance ............................................................................................................. 15
8 Electrical data ...........................................................................................................16
9 Cooling water supply ...................................................................................................17
10 Nitrogen supply .........................................................................................................17
11 Materials in contact with process gas ............................................................................... 17
12 Tool connectors and mating tool connector kits ................................................................... 34
13 Tool input signals to the pump system .............................................................................. 34
14 Output signals from the pump system ............................................................................... 35
15 EUC and PDT menu structure ......................................................................................... 39
16 Maintenance plan .......................................................................................................58
17 Fault finding ............................................................................................................. 59
18 EPX EUC alarms and warnings ......................................................................................... 60
19 Accessory kits ...........................................................................................................63
© Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 5) ..............................................................................................10
Figure 6) ..............................................................................................11
Figure 4) ............................................................. 9
A419-00-880 Issue F
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