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341579
MKS 341579 Manuals
Manuals and User Guides for MKS 341579. We have
1
MKS 341579 manual available for free PDF download: Instruction Manual
MKS 341579 Instruction Manual (70 pages)
Granville-Phillips 340 series. Vacuum Gauge Controller
Brand:
MKS
| Category:
Controller
| Size: 2 MB
Table of Contents
United Kingdom 240 Vac
4
Table of Contents
5
Chapter 1 Safety Instructions
7
Safety Introduction
7
Equipment Grounding
9
Implosion / Explosion
9
Damage Requiring Service
11
Service Guidelines
11
Warranty Information
12
FCC Verification
12
Canadian Users
12
Chapter 2 Introduction & Specifications
13
General Description
13
Available Options
13
Mounting Options
13
Receiving Inspection
13
Damaged Material
13
Specifications
15
340 VGC Specifications
15
Electrometer/Ion Gauge Pressure Range Specifications
15
Convectron
16
Specifications
16
Remote Input/Output
17
Chapter 3 Installation
19
Initial VGC Setup and Installation
19
Line Voltage Selection
19
Mounting Configurations
20
Ionization Gauge Types and Installation
21
Ion Gauge Cables
22
Convectron Gauge Installation
24
Important Precautions for Gauge Tube Installation
24
Gauge Orientation
25
Compression Mount (Quick Connect)
26
1/8 NPT Mount
26
NW16KF Flange Mount
26
Other Mounting Options
27
Convectron Gauge Cables
27
System Grounding Procedure
28
System Ground Test Procedure
30
Chapter 4 Operation
31
Series 340 VGC Controls
31
Sensor Failure
32
Power ON/OFF
32
Electrometer Module Units of Measure
32
Ion Gauge ON/OFF
32
Degas ON/OFF
32
Remote Input/Output
32
Theory of Operation
33
Ionization Gauge Theory of Operation
33
Convectron Gauge Theory of Operation
34
Convectron Gauge Operation
35
Reading Pressure
35
Special Considerations for Use below 10-3 Torr
35
Use with Gases Other than N2 and Air
35
Indicated Vs. True Pressure Curves
35
Convectron Gauge Module Setup
44
Chapter 5 Electrometer Module
45
Introduction to the Electrometer Module
45
Units of Measure
45
Display Update Rate Switch
46
Operation
46
Displaying Sensitivity, Pressure, and Emission with the Calibration Switch
46
Emission Range Switch
47
Emission Adjustment
47
Sensitivity Adjustment
47
Relative Gas Sensitivities
48
Analog Output
48
Electrometer Calibration
50
Electrometer Minimum Adjustment
50
Electrometer Scale Adjustment
50
Overpressure Shutdown Adjustment
50
A/D Calibration
50
Chapter 6 Convectron Gauge Module
51
Introduction to the Convectron Gauge Module
51
Units of Measure for a Convectron Gauge
51
Ionization Gauge Filament Auto Turn on
52
Process Relay Turn on
53
Setting the Internal CGB & CGA Switches
53
Process Relay Turn on Indicator
53
Gauge Zero and Atmospheric Pressure Calibration
53
Zero Calibration
54
Atmosphere Calibration
54
Convectron Gauge Analog Output Signal
55
Chapter 7 Service and Maintenance
57
Service Guidelines
57
Damage Requiring Service
58
Troubleshooting
59
Power Input Troubleshooting
59
Power Supply Troubleshooting
59
Ionization Gauge Filament Turn on and Emission
61
Degas Troubleshooting
61
Electrometer Troubleshooting
62
Convectron Gauge Troubleshooting
63
Chapter 8 Index
67
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