Agilent Technologies MSD 5977B Series Operating Manual page 166

6 Operating in CI Mode
To Monitor CI Mode High Vacuum Pressure
Table 16 MFC settings and typical pressure readings
MFC
(%)
10
15
20
25
30
35
40
Familiarize yourself with the measurements on your system under operating
conditions and watch for changes that may indicate a vacuum or gas flow
problem. Measurements will vary by as much as 30% from one MSD and gauge
controller to the next.
166
Methane
EI/PCI/NCI MSD 
(Turbo pump)
–5
10
5.5
×
–5
10
8.0
×
–4
10
1.0
×
–4
10
1.2
×
–4
1
1.5
×
–4
10
2.0
×
–4
10
2.5
×
Pressure (Torr)
Ammonia
EI/PCI/NCI MSD 
(Turbo pump)
–5
5.0 10
×
–5
7.0 10
×
–5
8.5 10
×
–4
1.0 10
×
–4
1.2 10
×
–4
1.5 10
×
–4
2.0 10
×
5977B Series MSD Operating Manual