Agilent Technologies MS40 Plus Instruction Manual

Agilent Technologies MS40 Plus Instruction Manual

Rotary vane pumps
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Single Stage
Rotary Vane Pumps
Model 949-9225
Model 949-9240
Model 949-9241
87-901-008-01(A)
NOVEMBER 2008
MS40+
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
(I)
MANUALE DI ISTRUZIONI
(D)
BEDIENUNGSHANDBUCH
(F)
NOTICE DE MODE D'EMPLOI
(GB) INSTRUCTION MANUAL

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Summary of Contents for Agilent Technologies MS40 Plus

  • Page 1 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies MS40+ Single Stage Rotary Vane Pumps MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 949-9225 (GB) INSTRUCTION MANUAL Model 949-9240...
  • Page 2 MS40+ SINGLE STAGE ROTARY VANE PUMPS...
  • Page 5: Table Of Contents

    ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCTIONS FOR USE....................7 TECHNICAL INFORMATION ....................9 SECTION I .............................9 TECHNICAL DESCRIPTION ......................9 VACUUM SEALS ...........................9 ANTI-SUCKBACK DEVICE......................9 TECHNICAL DATA ........................10 Dimensions ........................11 SAFETY PRECAUTIONS ......................12 TRANSPORT AND INSTALLATION....................12 PRELIMINARY OPERATIONS ....................12 SECTION II ..........................13 CONNECTION TO THE ELECTRIC SUPPLY ................13...
  • Page 6: Istruzioni Per L'uso

    ISTRUZIONI PER L’USO INFORMAZIONI GENERALI NOTA Questa apparecchiatura è destinata ad uso professiona- La pompa è fornita con alcuni accessori standard: le. L'utilizzatore deve leggere attentamente il presente • 1 connettore "D" a 9 contatti per I/O (femmina) manuale di istruzioni ed ogni altra informazione addizio- (escluso il modello 949-9241) nale fornita dalla Varian prima dell'utilizzo dell'apparec- •...
  • Page 7 ISTRUZIONI PER L’USO  PERICOLO!  PERICOLO! Durante l'installazione, prestare la massima attenzione Quando la macchina è alimentata prestare attenzione che la flangia di aspirazione sia collegata alla camera da per la presenza di parti in movimento e di alta tensione. evacuare e che la flangia di scarico non sia tappata (ve- dere la figura seguente).
  • Page 8: Gebrauchsanleitung

    GEBRAUCHSANLEITUNG ALLGEMEINE HINWEISE ANMERKUNG Dieses Gerät ist für den professionellen Gebrauch be- Die Pumpe wird mit einigen Standardzubehörteilen ge- stimmt. Vor dem Gebrauch soll der Benutzer dieses liefert: Handbuch sowie alle weiteren von Varian mitgelieferten • 1 9-Stift-Stecker "D" für I/O (Steckbuchse) (mit Au- Zusatzinformationen genau lesen.
  • Page 9 GEBRAUCHSANLEITUNG   GEFAHR! GEFAHR! Bei der Installation ist unbedingt darauf zu achten, dass Bei eingeschaltetem Gerät ist auf Bewegungs- und der Saugflansch an die zu entleerende Kammer ange- Hochspannungsteile zu achten. schlossen ist und der Ablassflansch nicht verschlossen ist (siehe nachstehende Abbildung). ...
  • Page 10: Mode D'emploi

    MODE D'EMPLOI moment de sa mise en place sur le système afin d'éviter INFORMATION GÉNÉRALE toute pollution due à la poussière. Cet appareil a été conçu en vue d'une utilisation profes- sionnelle. Il est conseillé à l'utilisateur de lire attentive- NOTE ment cette notice ainsi que toute autre information La pompe est équipée de certains accessoires standard:...
  • Page 11 MODE D'EMPLOI   DANGER! DANGER! Pendant l'installation, faire très attention à ce que la Lorsque la machine est sous tension, faire attention à la bride d'aspiration soit reliée à la chambre à vider et que présence d'organes en mouvement et de haute tension. la bride de vidange ne soit pas bouchée (voir la figure ci- après).
  • Page 12: Instructions For Use

    INSTRUCTION MANUAL GENERAL INFORMATION NOTE This equipment is destined for use by professionals. The The pump is provided with some standard accessories: user should read this instruction manual and any other • 1 9 pin "D" connector for I/O (female) (excluding additional information supplied by Varian before operat- model 949-9241) ing the equipment.
  • Page 13 INSTRUCTION MANUAL  WARNING!  WARNING! During installation, pay maximum attention that the suc- tion flange is connected to the vacuum chamber and the When machine is powered take care on account of mov- exhaust flange is not closed (see the following figure). ing parts and high voltages.
  • Page 14: Technical Information

    TECHNICAL INFORMATION VACUUM SEALS SECTION I A special feature of this pump is the low number of TECHNICAL DESCRIPTION gaskets that are employed. The MS40+ Single Stage Rotary Vane Pumps are rotary vane pumps oil sealed, driven by a three- The seals in the circuit are obtained by means of phase electric motor.
  • Page 15: Technical Data

    TECHNICAL INFORMATION TECHNICAL DATA The following table lists the main technical data of the MS40+ Single Stage Rotary Vane Pumps. TECHNICAL DATA UNITS 949-9225 949-9240 949-9241 PUMPING SPEED (at 5 mbar inlet pressure) 1450 ULTIMATE TOTAL PRESSURE * mbar 5x10 5x10 5x10 OIL CAPACITY min/max...
  • Page 16: Dimensions

    TECHNICAL INFORMATION Dimensions The following figure shows the pumps layout and dimensions: ELECTRONIC CONTROLLER OUTLET FLANGE ELECTRIC MOTOR OIL FILTER PUMPING BLOCK OIL LEVEL INDICATOR INLET FLANGE MS40+ Single Stage Rotary Vane Pumps layout MS40+ Single Stage Rotary Vane Pumps dimensions 11/22 87-901-008-01(A)
  • Page 17: Safety Precautions

    TECHNICAL INFORMATION Pump off the ground. In this case, the user SAFETY PRECAUTIONS must design a suitable support structure, re- Always carry the pump by means of the ring- membering the following points: bolt provided. the plane supporting the pump must be The pump must be set in position taking the perfectly horizontal;...
  • Page 18: Section Ii

    TECHNICAL INFORMATION STARTING AND RUNNING THE PUMP SECTION II CONNECTION TO THE ELECTRIC SUPPLY  WARNING! CAUTION The pump is designed for operation with neutral or non-corrosive fluids. It is absolutely forbidden to It is recommended to connect the pump to the use potentially explosive or flammable substances.
  • Page 19: Warning Notes

    TECHNICAL INFORMATION mating surfaces, before making the required NOTE connections. Before connecting the IEC320 mains cable, install the Retention Spring provided with the MS40+. Ensure that all joints and couplings are locked The Retention Spring has to be fastened to correctly before starting the pump again after IEC320 connector lateral screws.
  • Page 20: Maintenance Actions

    TECHNICAL INFORMATION MAINTENANCE ACTIONS Only the recommended lubricants, or lubricating oils with similar characteristics and known and ex- Maintenance may be seen as the totality of all perimented quality, should be used. scheduled and unscheduled maintenance work. Oil changes must be made with the oil at a suffi- •...
  • Page 21: Oil And Filter Cartridge Replacement Procedures

    TECHNICAL INFORMATION OIL AND FILTER CARTRIDGE REPLACEMENT PROCEDURES Oil Change Procedure Place a tank for waste oil under the oil drain plug. Cartridge Filter P/N 9499201 Insert new cartridge filter and double check it is in the right position (inserted in the appro- priate hole).
  • Page 22 TECHNICAL INFORMATION rules are liable to persecution as provided for SW60 oil characteristics by law. When using lubricants always keep an UNIT OF oil can nearby. PROPERTY SW60 MEASURE • Take care in draining off waste oils. In dis- posal of these products respect all regulations Vapour Pressure @ 25°C Torr 5x10...
  • Page 23: Pump Electronic Controller

    TECHNICAL INFORMATION PUMP ELECTRONIC CONTROLLER Input/Output Communications: P1 – I/O J1 SERIAL PIN N. SIGNAL NAME IN / OUT Interlock. Status (N.O. relay contact) Speed setting (0-10V) Oil level (relay contact) Start (-) P1 I/O 1 Ground Interlock. Status (N.O. relay contact) STATUS Oil level (relay contact) Start (+)
  • Page 24: Rs 232/Rs 485 Communication Description

    TECHNICAL INFORMATION The communication is performed in the following RS 232/RS 485 COMMUNICATION way: DESCRIPTION Both the RS 232 and the RS 485 interfaces are 1. the host (MASTER) send a MESSAGE + CRC to available on the connector J2 the controller (SLAVE);...
  • Page 25 TECHNICAL INFORMATION The controller can answers with the following re- Examples: sponse types: Command: START Source: PC TYPE LENGTH VALUE DESCRIPTION Destination: Pump After a read instruction of a Logic 1 byte logic window After a read instruction of a Numeric 6 bytes numeric window...
  • Page 26: Windows Meaning

    TECHNICAL INFORMATION Windows Meaning TYPE DESCRIPTION PARAMETER LISTING CODE & RE- TYPE DESCRIPTION VISION START/STOP (1= START ; 0= STOP) RS485 SERIAL ADDRESS SETTING [0-31] REMOTE/SERIAL CONFIGURATION SERIAL TYPE SELECT (0=RS232; (1= Remote ; 0= Serial) 1=RS485) SET POINT VALUE [Hz] (0 – 100) SET POINT HYSTERESIS [%] (0 –...
  • Page 27: Accessories

    TECHNICAL INFORMATION ACCESSORIES NOTE: If the electronic controller status is “Oil Under- PART NUMBER DESCRIPTION level” the pump starting is not allowed. 949-9201 MS40+ Exhaust filter NOTE 949-9202 MS40+ 1 Litre Oil Tank If the oil level check fails (low level) the pump 949-9203 Maintenance kit doesn't stop.
  • Page 28 Request for Return 1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out, signed and returned to Varian Customer Service. 2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN). 3.
  • Page 29 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 30 Sales and Service Offices France and Benelux Japan Other Countries Varian s.a. Varian Vacuum Technologies Varian Inc. 7 Avenue des Tropiques Sumitomo Shibaura Building, 8th Floor Vacuum Technologies Z.A. de Courtaboeuf - B.P. 12 4-16-36 Shibaura Via F.lli Varian 54 Les Ulis cedex (Orsay) 91941 Minato-ku, Tokyo 108 10040 Leini, (Torino)

This manual is also suitable for:

949-9225949-9240949-9241

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