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Remove sheets from the process modules
Unlock the clean units
Caution: Hot area. Use heat-resistant gloves.
Use the D-wrench to turn N1 counter-clockwise.
1.
Use the D-wrench to turn M1 counter-clockwise.
2.
[53]
[53] Unlock the clean units
Lift the clean units
Caution: Hot area. Use heat-resistant gloves.
Caution: Make sure that both clean units are locked in the upper position.
Use the red handle to lift the right-hand clean unit to the upper position (1).
1.
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Chapter 3 Maintenance tasks - Level 2
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