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Measurement Principle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .205
Basic Principles of Capacitance Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .208
Typical characteristics of capacitance DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .208
Selection criteria of parallel/series equivalent circuit models . . . . . . . . . . . . . . . . . . . . .209
Principle of four-terminal pair measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .210
Precautions for four-terminal pair measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .211
10
Keysight E4981B 120 Hz/1 kHz/1 MHz Capacitance Meter
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