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Ulvac VMR-050 User Manual

Small mechanical booster pump exhaust unit
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Moving and carrying the packed product
Thank you for purchasing this product.
This product is delivered in a cardboard box.
The descriptions here cover the following items: 1. Moving and carrying the
packed product, 2. Opening the cardboard box, and 3. Checking the product and
accessories.
Moving and carrying the packed product
Opening the cardboard box
(1) The product is packed and delivered as shown in the
picture on the left.
(2) Use the slits on the sides of the cardboard box as shown
in the picture on the left, and always move and carry
the box with at least 2 people.
Take the necessary precautions to avoid hurting your back or other
body parts.
(1) Remove the plastic bands that are wrapped around the
cardboard box, and lift up the exterior box and remove.
Exterior box
(2) Remove the inner lid.
Remove the user manual.
Inner lid
User manual
(1/2)

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Summary of Contents for Ulvac VMR-050

  • Page 1 Moving and carrying the packed product Thank you for purchasing this product. This product is delivered in a cardboard box. The descriptions here cover the following items: 1. Moving and carrying the packed product, 2. Opening the cardboard box, and 3. Checking the product and accessories.
  • Page 2 Sealed rotary vacuum pump Base (container) Checking the product and accessories Make sure that the product and the following accessories are included. (1) VMR-050 product unit : Qty. 1 (2) Bolts for flange installation • Hex socket bolts (M8×25) : Qty. 4 •...
  • Page 3 Please read the following before using this product. Keep this manual in a safe place ready for use. The content of this manual is liable to change without prior notice due to changes in product specifications, product improvements and revisions. Ulvac Kiko, Inc.

  • Page 4: Table Of Contents

    Table of Contents indicates a page with safety-related content. For safe use of the product (1) Introduction -----------------------------------------------------------------------------------1 1. Users --------------------------------------------------------------------------------------1 2. Reading and Understanding the Manual ---------------------------------------------1 3. Storing the User Manual----------------------------------------------------------------1 4. Warranty----------------------------------------------------------------------------------1 5. Legal Compliance -----------------------------------------------------------------------1 6. Safety During Repairs ------------------------------------------------------------------1 (2) Product Outline -------------------------------------------------------------------------------2 1.
  • Page 5 2-2 Operation ------------------------------------------------------------------------- 16 2-3 Stopping--------------------------------------------------------------------------- 16 3. Handling Malfunctions --------------------------------------------------------------- 17 3-1 Instantaneous power failure ---------------------------------------------------- 17 3-2 Long-term power failure-------------------------------------------------------- 17 3-3 Restoration procedure after power failure ------------------------------------ 17 (5) Maintenance and Repairs------------------------------------------------------------------ 17 1. Risks During Maintenance and Repairs, and Associated Safety Measures ---- 17 2.

  • Page 6: For Safe Use Of The Product

    Please read the information provided and make sure you understand correctly so as to prevent a serious accident. The Technical Division of Ulvac Kiko Inc. holds the copyright for this manual and the safety guide.
  • Page 7 Power Supplies Primary power supply capacity Prepare the corresponding power supply: • Single-phase, 100 – 120 V specification Single phase, 100 – 120 V, 15.0 A or greater • Single-phase, 200 – 240 V specification Single phase, 200 – 240 V, 8.0 A or greater Check capacity The customer shall make the necessary arrangements for the breaker.
  • Page 8 Environment This equipment is not explosion-proof, and therefore cannot be used in environments where there is a danger of explosion. Prohibited Use in such environments may result in ignition and explosion causing a fire and burn injury. The pump becomes hot during operation. Therefore, do not place any flammable objects close to the pump.
  • Page 9 Installation Install the equipment in a location that satisfies the following requirements. 1) Flat and level. 2) Floor with sufficient strength. 3) Good ventilation. 4) Protected from direct sunlight. 5) Room temperature: 7 – 40ºC. 6) No danger of ignition. 7) No chemicals or gases liable to corrode the equipment.

  • Page 10: Legal Compliance

    Operation Ｃ Open the leak valve after the exhaust unit stops, and release or evacuate the inside of the rough piping into the atmosphere. Release into The customer shall make the necessary arrangements for the leak valve. atmosphere To prevent the reverse flow of oil. Do not suction corrosive gases and fluids (such as acid, Caution alkaline or solvents) or particles.

  • Page 11: Introduction

    (1) Before Using 1. Target Users Only persons who have used a vacuum exhaust unit or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 12: Product Outline

    (2) Product Outline 1. Purpose of Use and Prohibited Items This equipment is a small, lightweight exhaust unit, with all necessary components mounted onto a simple rack. The exhaust system is comprised of a mechanical booster pump, a sealed rotary vacuum pump and piping. In addition, the equipment also includes an electric system that operates those components, etc.

  • Page 13: Product Specification

    Method of Item Purpose Function verification The sealed rotary vacuum pump has a • Only the built-in thermal protector with an sealed rotary automatic recovery function. vacuum When rotation stops or an overload occurs pump due to a pump malfunction during operation operation and a current surge runs through stops.

  • Page 14: Single-Phase, 200 - 240 V Specification)

    3-2 (Single-phase, 200 – 240 V specification) Ultimate pressure 4.0 × 10-2 Pa (Indicated value based on ionization gauge) Exhaust flow rate 833 L/min (at 100 Pa) Maximum intake pressure Atmospheric pressure Ambient temperature 7 - 40°C Power specification AC single-phase, 200 – 240 V, 50 Hz or 60 Hz Rated power 750 W Full-load current...

  • Page 15: Standard Accessories

    5. Standard Accessories 1) Bolts for flange • Hex socket bolts: M8×25 installation • Plain washers: M8 • Spring washers: M8 * Use when connecting to the piping for the VG40 inlet (or its equivalent) on the mechanical booster pump. 2) User manual •...

  • Page 16: Switch Layout & Unit Dimensions

    7. Switch Layout & Unit Dimensions 7-1 (Single-phase, 100 – 120 V specification) Connecting pipe (Equivalent) MBS-053 Switch Single-phase Exhaust duct Terminal box GLD-202B Single-phase Power cord with 3P plug Plug adapter 7-2 (Single-phase, 200 – 240 V specification) Connecting pipe (Equivalent) MBS-053 Switch...

  • Page 17: Exhaust System Diagram

    8. Exhaust System Diagram Equivalent Mechanical booster pump Sealed rotary vacuum pump...

  • Page 18: Electrical Wiring Diagram

    9. Electrical Wiring Diagram 9-1 (Single-phase, 100 – 120 V specification) Terminal box Switch Model： With 2P conversion adapterWith 2P conversion adapter Powe Model： line Terminal block Model： Sealed rotary vacuum pump Mechanical booster pump Power cord with 3P plug （Built-in TP with manual recovery）...

  • Page 19: Single-Phase, 200 - 240 V Specification)

    (Single-phase, 200 – 240 V specification) Terminal box Switch Model： Powe Model： line Terminal block Model： Sealed rotary vacuum pump （Power cord） Mechanical booster pump （Built-in TP with automatic recovery） （Built-in TP with manual recovery） Model： Connection for straight Connection for straight plug type power cord plug type power cord Model：...

  • Page 20: Opening The Packaging And Installation

    (3) Opening the Packaging and Installation 1. General Precautions 1) Verify that the contents match the product that was ordered. 2) Verify that the specified accessories are included. 3) Clear a space at least 0.5 m around the equipment to ensure safety during installation.

  • Page 21: Moving The Equipment

    4. Moving the Equipment Use two or more personnel when lifting and moving this equipment. In addition, remove the oil from the mechanical booster pump before moving. Do not work alone Take the necessary precautions to avoid hurting your back or other body parts. Moving the unit without removing the lubricant and while the unit is tilted may cause the lubricant to leak into the cylinder compartment.

  • Page 22: Exhaust Outlet Check

    6. Exhaust Outlet Check The sealed rotary vacuum pump that is installed on the equipment is shipped with the specified amount of oil already poured inside. Ensure that the oil cap (red) is used to plug the exhaust outlet so that oil does not leak while being transported.
  • Page 23 Exhaust outlet check (1) When unit is unpacked (2) Oil cap (red) is removed (3) G1 exhaust duct (black) is installed Power cord end Single-phase, 100 – 120 V Single-phase, 200 – 240 V specification specification Cautionary tag...

  • Page 24: Vacuum System

    7. Vacuum System 1) Thoroughly clean the inside walls of the vacuum system, such as the vacuum compartment, piping and valve. Remove all water, particles, dust or rust before connecting the system to the pump. 2) Install the shutoff valve and leak valve in between the vacuum compartment and the unit.

  • Page 25: List Of Required Tools

    Connect to a Class D ground. This equipment uses a grounded plug for 100 V - 120 V. When using a plug adapter, connect the ground wire to the nearest ground terminal. Connect to ground An incomplete ground may result in electric shock in the event of a malfunction or short circuit.

  • Page 26: Operation

    (4) Operation 1. Risks During Operation, and Associated Safety Measures Open the leak valve after the exhaust unit stops, and release or evacuate the inside of the rough piping into the atmosphere. Release into The customer shall make the necessary arrangements atmosphere for the leak valve.

  • Page 27: Handling Malfunctions

    3. Handling Malfunctions 3-1 Instantaneous power failure All devices are automatically restored to the status prior to the power failure. 3-2 Long-term power failure 1) Unit switch 2) Leak valve *Customer provided. Open 3-3 Restoration procedure after power failure 2. Exhaust Unit Operation: Refer to the previous sections “2-1 Preparation”...

  • Page 28: Removing, Maintaining And Fitting The Device

    3. Removing, Maintaining and Fitting the Device 3-1 Mechanical booster pump 1. Oil replacement Refer to the mechanical booster pump user manual (provided separately) 2. Refer to the following when removing the mechanical booster pump from the exhaust unit. 1) Required tools: 4 mm Allen wrench × 1 13 mm spanner ×...
  • Page 29 Ensure that the O-ring is inserted inside the O-ring groove and that there are no foreign objects attached to the O-ring seal. (3) Connect the sealed rotary vacuum pump and the rack using the quick coupling. [Part 1 (B) in diagram on p.19] * Ensure that the quick coupling is not loose.

  • Page 30: Sealed Rotary Vacuum Pump

    3-2 Sealed rotary vacuum pump 1) Oil replacement Refer to sealed rotary vacuum pump user manual (provided separately). Refer to the following for the individual pump unit. 1) Required tools: 4 mm Allen wrench × 1 13 mm spanner × 1 2) Removal (1) Remove the pump following the mechanical booster pump user manual procedure.

  • Page 31: Troubleshooting

    5. Troubleshooting Symptoms Cause Solution Use air conditioning to High ambient temperature reduce ambient temperature in area of installation. to 25ºC or lower. Short operation time following installation or Run for 24 – 48 hours and long-term stoppage of check again. Ultimate pressure is poor equipment.

  • Page 32: Consumables

    7. Consumables Replaceable Location Name Specification Material Qty. by customer O-ring for exhaust Rack V-55 ○ (VG40 connecting pipe) flange SMR-200 ○ Mechanical booster pump O-ring for intake V-55 ○ flange SMR-100 1.1 L ○ Sealed rotary vacuum Rubber feet K-3215 ○...

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