Connection To Vacuum System (Chamber) - Ulvac DISL-102 Instruction Manual

3.3 Connection to vacuum system (chamber)

Inlet is NW25 (Internal screw size : Rc 3/8) and outlet is NW16.
Danger of exhaust disruption
When connecting exhaust piping to vacuum pump and when combining piping
with another vacuum pump, pay attention to piping size and length so that it does
not cause exhaust resistance.
Exhaust resistance can disrupt air flow, resulting in failure and over-current.
Danger of foreign matter entering inlet
If you use the seal material or the adhesive, etc. to prevent Leak of the joint when
piping with internal screw of inlet, be careful not to enter the seal material or the
adhesive into an inlet.
The seal material or the adhesive entering inlet can cause failure.
Use isolation valve
Isolation valve is necessary to prevent the drawback of debris attached to the inside of vacuum pump into the
vacuum chamber during start-up and shut-down. (We recommend the use of leak valve also). We recommend the
use of an automatic valve
drawback of debris inside pump into the vacuum chamber during power failure.
Use an appropriate and clean connecting pipe between vacuum chamber and vacuum pump.
Use the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the use of a flexible tube between the inlet of vacuum pump and outlet of vacuum chamber so that
vibration of the vacuum pump can be isolate.
When connecting exhaust piping to the outlet of vacuum pump, refer to the following
instructions.
Never exceed 9-meter in length in straight line when extending exhaust pipe. The pipe size should be no smaller
than Rc3/8 (inner dia.12.5)
When longer extension of exhaust piping is required, adopt larger exhaust pipe size.
Make sure that exhaust piping is not blocked during pump operation.
Make sure that pressure at outlet does not exceed atmospheric pressure at any conditions.
In order to keep condensation away from feeding into the exhaust port, take proper measure.
It causes exhaust disturbance. Drain condensations periodically by using valve separately arranged.
Chamber
Isolation valve
(Automatic valve)
Important
between vacuum system and inlet.
as the isolation valve which closes during power failure in order to prevent the
Leak
valve
-17-
CAUTION
Vacuum pump
Inlet Outlet
DISL-102
Pay attention to
exhaust resistance
Prevent foreign
matter from entering
Outlet duct
Drain
condensation