Table Of Contents; Contents - Ulvac DISL-102 Instruction Manual

Contents

Important information ................................................................................................................. 1
For safe operation ....................................................................................................................... 2
Contents ....................................................................................................................................... 7
1. Before use ................................................................................................................................ 8
1.1 Check the product ............................................................................................................. 8
2. Name and structure of each section ................................................................................... 10
3. Installation .............................................................................................................................. 11
3.1 Wiring ................................................................................................................................ 12
3.2 Test operation .................................................................................................................. 16
3.3 Connection to vacuum system (chamber) .................................................................... 17
4. Operation ................................................................................................................................ 18
4.1 Air-flush closed operation .............................................................................................. 20
4.1.1 Start-up ...................................................................................................................... 20
4.1.2 Shut-down .................................................................................................................. 20
4.2 Air-flush opened operation ............................................................................................. 21
4.2.1 Preparation ................................................................................................................ 21
4.2.2 Start-up and shut-down ............................................................................................ 22
4.2.3 When returning to air-flush closed operation ....................................................... 22
5. Maintenance and inspection ................................................................................................ 23
5.1 Daily maintenance and inspection ................................................................................ 23
5.2 Maintenance ..................................................................................................................... 24
6. Problems and remedies ........................................................................................................ 25
7. Disposal .................................................................................................................................. 25
8. Specifications ........................................................................................................................ 26
8.1 Specifications .................................................................................................................. 26
8.2 Dimensions ...................................................................................................................... 27
8.3 Performance data ............................................................................................................ 27
9. Warranty and After-sales service ........................................................................................ 28
9.1 Warranty ........................................................................................................................... 28
9.2 After-sales and service ................................................................................................... 28
Vacuum Pump Check Sheet For Repair ................................................................................. 29
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