Related Manuals for Inficon BPG402-SE
Summary of Contents for Inficon BPG402-SE
- Page 1 Operating Manual Bayard-Alpert Pirani Gauge Dual Filament Bayard-Alpert Pirani Gauge BPG402-S BPG402-SD BPG402-SE BPG402-SL BPG402-SP tina46e1-b (2017-12)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below. INFICON AG, LI-9496 Balzers Model: Validity This document applies to products with the following part numbers:... -
Page 3: Functional Principle
Functional Principle Over the whole measuring range, the gauge has a continuous characteristic curve and its measuring signal is output as logarithm of the pressure. The gauge functions with a Bayard-Alpert hot cathode ionization measurement system (for p < 2.0×10 mbar) and a Pirani measurement system (for p >... -
Page 4: Table Of Contents
3.1.1 Removing and Installing the Electronics Unit 3.1.2 Using the Optional Baffle 3.2 Electrical Connection 3.2.1 Use With INFICON VGC40x / VGC50x Vacuum Gauge Controller 3.2.2 Use With Other Controllers 3.2.2.1 Making an Individual Sensor Cable 3.2.2.2 Making a DeviceNet Interface Cable (BPG402-SD) 3.2.2.3 Making two EtherCAT Interface Cables (BPG402-SE) - Page 5 6 Maintenance, Repair 6.1 Cleaning the Gauge 6.2 Adjusting the Gauge 6.2.1 Adjustment at Atmospheric Pressure 6.2.2 Zero Point Adjustment 6.3 What to Do in Case of Problems 6.4 Replacing the Sensor 7 Options 8 Spare Parts 9 Storage Returning the Product Disposal Appendix Relationship Output Signal –...
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Page 6: Safety
1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice Hint, recommendation The result is O.K. -
Page 7: General Safety Instructions
Communicate the safety instructions to all other users. 1.4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end- user or third parties • disregard the information in this document •... -
Page 8: Technical Data
2 Technical Data Measurement Measurement range (air, O CO, N 5×10 … 1000 mbar, continuous Accuracy 15% of reading in the range of (after 10 min. stabilization) 1×10 … 10 mbar Repeatability 5% of reading in the range of (after 10 min. stabilization) 1×10 …... - Page 9 5 conductors (→ 21 and [5]) Cable length, system wiring according to DeviceNet specifications (→ [7], [5]) EtherCAT interface Fieldbus name EtherCAT (BPG402-SE) Standard applied, data format, → [11], [12] communication protocol Data rate 100 Mbps Node address...
- Page 10 (PELV). The connection to the gauge has to be fused (INFICON controllers fulfill these requirements). Supply voltage at the gauge +24 V (dc) (+20 … +28 V (dc)) ripple max.
- Page 11 For reasons of compatibility, the expression "sensor cable" is used for all BPG402 versions in this document, although the pressure reading of the gauges with fieldbus interface (BPG402-SD, BPG402-SE and BPG402-SP) is normally transmitted via the corresponding bus. Electrical connection...
- Page 12 Dimensions [mm] 4-40UNC 2B 4-40UNC 2B DN 25 ISO-KF DN 40 CF-R 4-40UNC 2B Gauges with DeviceNet connector are 14 mm longer. DN 40 CF-R 353-570, 353-572 450 g 353-574, 353-576, 353-590 490 g Weight ≈ ≈ 353-571, 353-573 710 g 353-575, 353-577, 353-591 750 g ≈...
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Page 13: Installation
3 Installation 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure. -
Page 14: Removing And Installing The Electronics Unit
Procedure Remove the protective lid and install the gauge to the vacuum system. Seal with centering ring Protective lid (keep it) Clamp 3.1.1 Removing and Installing the Electronics Unit Required tools / material • Allen wrench, AF 2.5 Removing the electronics unit ... -
Page 15: Using The Optional Baffle
Installing the electronics unit Place the electronics unit (2) on the sensor (3) (be careful to correctly align the pins and notch (4)). Slide the electronics unit in to the mechanical stop and lock it with the hexa- gon socket set screw. - Page 16 Carefully place the baffle onto the sensor opening. Using a pin, press the baffle down in the center until it catches. Deinstallation Carefully remove the baffle with the screwdriver. tina46e1-b (2017-12) BPG402.om...
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Page 17: Electrical Connection
3.2 Electrical Connection 3.2.1 Use With INFICON If the gauge is used with an INFICON VGC40x / VGC50x controller, a correspond- ing sensor cable is required (→ [4]). The sensor cable permits supplying the gauge VGC40x / VGC50x with power, transmitting measurement values and gauge statuses, and making pa- Vacuum Gauge rameter settings. -
Page 18: Making An Individual Sensor Cable
For reasons of compatibility, the expression "sensor cable" is used for all Sensor Cable BPG402 versions in this document, although the pressure reading of the gauges with fieldbus interface (BPG402-SD, BPG402-SE or BPG402-SP) is normally transmitted via DeviceNet, EtherCAT or Profibus. - Page 19 Sensor cable connection BPG402-S, -SL Threshold value, SP Filament status RS232 Degas Degas Measuring signal 1.25 AT 42 kΩ Ident. Common (power GND 24V supply) D-Sub,15-pin, Ground (housing, vacuum connection) female, soldering side Electrical connection Pin 1 Relay switching function, common contact Pin 2 Measuring signal output 0 …...
- Page 20 Sensor cable connection BPG402-SD, -SE, -SP SP A Threshold value SP B SP A SP B RS232 Degas Degas Measuring signal 1.25 AT 42 kΩ Ident. Common (power GND 24V supply) D-Sub,15-pin, Ground (housing, vacuum connection) female, soldering side Electrical connection Pin 1 Relay switching function A, common contact Pin 2...
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Page 21: Making A Devicenet Interface Cable (Bpg402-Sd)
For cable lengths up to 5 m (0.34 mm conductor cross-section) the out- put signal can be measured directly between the positive signal output (Pin 2) and supply common (Pin 5). At greater cable lengths, differential measurement between signal output (Pin 2) and signal common (Pin 12) is recommended. -
Page 22: Making Two Ethercat Interface Cables (Bpg402-Se)
Lock the DeviceNet (and sensor) cable connector. 3.2.2.3 Making two EtherCAT If no Ethernet cables are available, make two according to the following indications: Interface Cables (BPG402-SE) Cable type Shielded Ethernet Patch cable (quality CAT5e or higher). Procedure ... -
Page 23: Making A Profibus Interface Cable (Bpg402-Sp)
Connect the Ethernet cables (and sensor cable) to the gauge: From the previous device the cable connected to the <OUT> port has to be con- nected to the BPG402-SE <IN> port. And the cable from the BPG402-SE <OUT> port has to be connected to the next device's <IN> port. -
Page 24: Using The Optional Power Supply (With Rs232C Line)
Plug the Profibus (and sensor) cable connector into the gauge. Sensor cable Profibus cable Lock the Profibus cable (and sensor cable) connector. 3.2.3 Using the Optional The optional 24 V (dc) power supply (→ 47) allows RS232C operation of the BPG402-Sx gauge with any suitable instrument or control device. - Page 25 Connecting the power supply Connect the power supply to the gauge and lock the connector with the screws. Connect the RS232C line to the instrument or control device and lock the connector with the screws. RS232C Power supply Mains BPG402-Sx ...
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Page 26: Operation
4 Operation 4.1 Measuring Principle, The BPG402-Sx vacuum gauges consist of two separate measuring systems (hot cathode Bayard-Alpert (BA) and Pirani). Measuring Behavior Bayard-Alpert The hot cathode measuring system uses an electrode system according to Bayard- Alpert which is designed for a low X-ray limit. The measuring principle of this measuring system is based on gas ionization. - Page 27 However, filament selection can be commanded via the interfaces (→ 29, 31, [1], [2] and [3]). INFICON recommends the replacement of the sensor as soon as the first filament failure has been detected. The replacement can be carried out during an appropri- ate off time such as the completion of a process or a planned maintenance brake.
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Page 28: Operational Principle Of The Gauge
4.2 Operational Principle of The analog measuring signals of the Bayard-Alpert and Pirani sensors are con- verted into a digital form by a micro-controller and subsequently converted to a the Gauge value representing the measured total pressure. After further processing this value is available as analog measurement signal (0 …... -
Page 29: Filament Status
One filament broken green, flashing Both filaments broken INFICON recommends the replacement of the sensor as soon as the first filament failure has been detected (replacing the sensor → 46). 4.5.2 Filament Status Relay The BPG402-S, SL features a "Filament status" relay contact available at the... -
Page 30: Emission Control Mode
4.7 Emission Control Mode General The emission control mode function defines the rules by which the emission of the gauge is switched on and off. The manual mode feature has a positive effect on gauge live time, mainly in process situations where the process chamber has to be vented frequently. Emission Control Mode Description By default, the automatic mode is active and the emis-... -
Page 31: Rs232C Interface
Error Display No error (green background illumination) Pirani sensor error (red background illumination) Bayard-Alpert sensor error (red background illumination) EEPROM error (red background illumination) Internal data communication failure (red background illumination) What to do in case of problems → 44. 4.9 RS232C Interface The built-in RS232C interface (all BPG402 versions) allows transmission of digital measurement data and instrument conditions as well as the setting of instrument... -
Page 32: Output String (Transmit)
Electrical connections • Pin 13 Pin 14 • Pin 5 • (Sensor cable connector) The complete output string (frame) is nine bytes (byte 0 … 8). The data string is 4.9.1.1 Output String (Transmit seven bytes (byte 1 … 7). Byte No Function Value Comment... - Page 33 Error byte Bit 7 Bit 3 Bit 1 Bit 0 Definition not used Bit 6 Bit 5 Bit 4 Bit 2 Definition Pirani error hot cathode error hot cathode warning electronics error / EEPROM error Both filaments broken One filament broken Software version The software version of the gauge can be calculated from the value of byte 6 of the transmitted string according to the following rule:...
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Page 34: Input String (Receive)
4.9.1.2 Input String (Receive) For transmission of the commands to the gauge, a string (frame) of five bytes is sent (without <CR>). Byte 1 … 3 form the data string. Format of the input string Byte no Function Value Comment Length of data string set value →... -
Page 35: Devicenet Interface (Bpg402-Sd)
4.10 DeviceNet Interface This interface allows operation of BPG402-SD with part numbers (BPG402-SD) 353-576 and 353-577 in connection with other devices that are suited for DeviceNet operation. The physical interface and communication firmware of BPG402-SD comply with the DeviceNet standard (→ [5], [7]). Two adjustable switching functions are integrated in BPG402-SD. -
Page 36: Data Rate Setting
4.10.2.3 Data Rate Setting The admissible data rate depends on a number of factors such as system pa- rameters and cable length (→ [5], [7]). It can be set on the gauge or pro- grammed via DeviceNet. By means of the "RATE" switch, the data rate can be set to 125 ("1"), 250 ("2") or 500 kBaud ("5"). -
Page 37: Ethercat Interface (Bpg402-Se)
353-590 and 353-591 in connection with other devices that are suited for EtherCAT operation. The physical interface and communication firmware of BPG402-SE comply with the EtherCAT standard (→ [11], [12]). Two adjustable switching functions are integrated in BPG402-SE. The corre- sponding relay contacts are available at the sensor cable connector (→... -
Page 38: Profibus Interface (Bpg402-Sp)
4.12 Profibus Interface This interface allows operation of BPG402-SP with part numbers (BPG402-SP) 353-574 and 353-575 in connection with other devices that are suited for Profibus operation. The physical interface and communication firmware of BPG402-SP comply with the Profibus standard (→ [6], [12]). Two adjustable switching functions are integrated in the BPG402-SP. -
Page 39: Switching Functions
4.13 Switching Functions The BPG402-S, SL have one, the gauges BPG402-SD, BPG402-SE and BPG402-SP have two independent, manually adjustable switching functions. Each switching function has a floating, normally open relay contact. The relay contacts are accessible at the sensor cable connector (→ 19, 20). -
Page 40: Setting The Switching Functions
• Reading the status via fieldbus interface, for BPG402-SD → [1], for BPG402-SE→ [3], for BPG402-SP → [2]. • Measurement of the relay contacts at the sensor cable connector with an ohmmeter / continuity checker (→ 19, 20). -
Page 41: Deinstallation
5 Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. - Page 42 Remove gauge from the vacuum system and replace the protective lid. Protective lid tina46e1-b (2017-12) BPG402.om...
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Page 43: Maintenance, Repair
6 Maintenance, Repair DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. 6.1 Cleaning the Gauge Small deposits on the electrode system can be removed by baking the anode (Degas →... -
Page 44: Zero Point Adjustment
Insert the pin through the opening shown in the following illustration and push the button inside for 1 s. BPG402-SD BPG402-S BPG402-SE BPG402-SL BPG402-SP max. ø1.3 Gauges with display will show the reading "1000 mbar". 6.2.2 Zero Point Adjustment Zero point readjustments are automatically carried out during operation of the gauge, no manual adjustment is needed. - Page 45 Problem Possible cause Correction Output signal Sensor cable defective or Check the sensor cable not correctly connected permanently ≈0V No supply voltage Turn on the power supply Gauge in an undefined Turn the gauge off and on status again (reset) Output signal ≈+0.1 V EEPROM failure Turn the gauge off and on...
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Page 46: Replacing The Sensor
/ both filaments of hot cathode broken (→ 44) • the sensor is faulty, e.g. Pirani element broken (→ 44) INFICON recommends the replacement of the sensor as soon as the first filament failure has been detected. Required tools / material •... -
Page 47: Options
7 Options Ordering number 353-511 24 V (dc) power supply / RS232C line (→ 24) 353-512 Baffle DN 25 ISO-KF / DN 40 CF-R (→ 15) 8 Spare Parts When ordering spare parts, always indicate: • All information on the product nameplate •... -
Page 48: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved coun- tries and forwarding companies and enclose a duly completed decla- ration of contamination (form under "www.inficon.com"). -
Page 49: Appendix
Appendix Relationship Output Signal – Pressure (U - 7.75) / 0.75 + c Conversion formulae p = 10 U = 0.75 × (log p - c) + 7.75 where [mbar] [Pa] [Torr] -0.125 Conversion curve Pressure p [mbar] 1E+04 1E+03 1E+02 1E+01 1E+00... -
Page 50: B: Gas Type Dependence
Gas Type Dependence Indication range Pressure indicated (gauge adjusted for air, Pirani-only mode) above 10 mbar p (mbar) He Ne Indication range Freon 12 above 10 mbar –1 vapor –2 –3 –3 –2 –1 (mbar) Calibration in pressure range The gas type dependence in the pressure range 10 …... - Page 51 The gas type dependence in the pressure range <10 mbar can be compensated by means of the following formula (gauge adjusted for air): = C × indicated pressure where Gas type Calibration factor C Air, O , CO, N (The above calibration factors are mean values.) A mixture of gases and vapors is often involved.
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Page 52: C: Literature
Literature [1] www.inficon.com Communication Protocol DeviceNet™ BPG402-SD tira46e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [2] www.inficon.com Communication Protocol Profibus BPG402-SP tira47d1 (German) tira47e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [3] www.inficon.com Communication Protocol EtherCAT BPG402-SE tira93e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein... - Page 53 Notes tina46e1-b (2017-12) BPG402.om...
- Page 54 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina46d1-b (2017-12) www.inficon.com t i na46e1- b...