Ulvac VS1501 Instruction Manual page 44

Oil sealed rotary vacuum pump
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SK00-4390-DI-002-11
Ensure to flow the Coolant with the specified volume. Lack of the
Coolant might give damage to the Pump unit or evaporate the water
remained in the Pump to raise the pressure inside the Cooling system
resulting in accidentally jetting out the hot steam.
CAUTION
Follow the process described below if the rotation at start was not
smooth;
Check first the oil level and fill it appropriately.
The oil might enter inside the Pump cylinder if you left the Pump stopped
longtime (three days or more) even you kept the atmospheric pressure
inside the Pump when stopped it last time. The Overload protective
device might work if you attempted to restart the Pump under such a
CAUTION
condition.
This time, do the inching start of the Pump (repeat turning ON/OFF in a
short time) several times.
24

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Vs2401

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