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Summary of Contents for Pfeiffer Vacuum ATP 1603 M
- Page 1 OPERATING INSTRUCTIONS Translation of the Original ATP 1603 M Magnetically levitated turbomolecular pump...
- Page 2 These operating instructions describe all models and variants of your product. Note that your product may not be equipped with all features described in this document. Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior notice. Please take into account that online operating instructions can deviate from the printed operating instructions supplied with your product.
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Page 3: Table Of Contents
Table of contents Table of contents About this manual Validity 1.1.1 Applicable documents 1.1.2 Products concerned Target group Conventions 1.3.1 Instructions in the text 1.3.2 Pictographs 1.3.3 Labels 1.3.4 Abbreviations Safety General safety information Safety instructions Safety instructions relating to flammable/pyrophoric materials Precautions Intended use Misuse... - Page 4 7.4.1 Disconnecting the pump from the installation 7.4.2 Draining the water circuit 7.4.3 Preparing the pump for shipping Decommissioning Shutting down for longer periods Recommissioning Disposal Service solutions by Pfeiffer Vacuum Accessories Spare parts Technical data and dimensions 12.1 General 12.2 Technical characteristics 12.3 Environmental characteristics 12.4 Cooling water characteristics...
- Page 5 List of tables List of tables Tbl. 1: Loads exerted on the equipment Tbl. 2: Securing the high vacuum flange (inlet flange) Tbl. 3: Conversion table: Pressure units Tbl. 4: Conversion table: Units for gas throughput Tbl. 5: Environmental characteristics Tbl.
- Page 6 Horizontal pump installation Fig. 5: Installing the pump inlet facing up Fig. 6: Purge flow diagram Fig. 7: Dimensions ATP 1603 M with OBC Fig. 8: Dimensions of Purge solenoid valve Fig. 9: Dimensions of Air inlet solenoid valve 6/52...
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Page 7: About This Manual
Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status. -
Page 8: Labels
About this manual Note 1.3.3 Labels PURGE Purge circuit connection PUMP EXHAUST Pump exhaust WATER MAX Pr 7 bar/101 psi Maximum water circuit pressure WATER Connecting the water circuit Functional grounding connection Locking the connector before using the pump. Do not disconnect before the pump has stopped LOCK Direction of rotation of the pump rotor... -
Page 9: Abbreviations
About this manual This label warns users that they risk being injured if their hands come into contact with a hot surface: protective gloves must be worn at all times when working on the pump. This label warns users about pumped process gases that can be dangerous or toxic and lead to severe injury or death. -
Page 10: Safety
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►... - Page 11 ► Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be released from any warranty and liability for non-compliance with installation instructions. ► Only use approved original parts from Pfeiffer Vacuum for connection to the equipment (see ac- cessories).
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Page 12: Safety Instructions Relating To Flammable/Pyrophoric Materials
Safety WARNING Risk of injury in case of contact with pressurized water The product uses pressurized water as a cooling fluid. Non-compliant installations or installations not done to professional standards may endanger the user’s life. ► Install a manual valve on the circuit at a distance of 3 m from the product, so that the water sup- ply can be locked out. -
Page 13: Precautions
Safety The risk assessment must take into account the pumped gases, by-products, and all components mak- ing up the installation. The following situations are hazardous and must be avoided at all cost: ● Flammable or pyrophoric gas concentrations in the flammable range. ●... -
Page 14: Intended Use
● The turbomolecular pump must be combined with an appropriate backing pump. ● The vacuum pump must be integrated into industrial equipment. ● The pump must operate with a Pfeiffer Vacuum OBC electronic drive unit. When the pump is integrated into industrial equipment, it becomes a pumping component: the integrator of this component must provide the operator with all safety measures, notably for hot surface risks. -
Page 15: Transportation And Storage
Transportation and Storage 3 Transportation and Storage 3.1 Receipt of the product Condition of the delivery ● Check that the product has not been damaged during transport. ● If the product is damaged, take the necessary measures with the carrier and notify the manufacturer. -
Page 16: Storage
Transportation and Storage Handling the pump using a hoist 1 Strap Lifting ring Handle the pump with inlet facing up When handling the pump, a lifting device appropriate for the weight of the product must be used. The weight and center of gravity vary depending on the model (see chapter “Dimensions”). 1. -
Page 17: Product Description
Product description 4 Product description 4.1 Product identification To correctly identify the product when communicating with our service center, always have the informa- tion from the product rating plate available (see chapter "Labels"). 4.1.1 Scope of delivery ● 1 Magnetically levitated turbopump ● 1 splinter shield (in the pump inlet flange) ●... -
Page 18: Human/Machine Interface
Product description 4.2 Human/Machine interface 1 Splinter shield Exhaust flange (Pump exhaust) 2 Inlet flange (high vacuum flange) Neutral gas purge 3 Electrical connector Functional grounding 4 IN/OUT water connection 18/52... -
Page 19: Installation
► Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be released from any warranty and liability for non-compliance with installation instructions. ► Only use approved original parts from Pfeiffer Vacuum for connection to the equipment (see ac- cessories). - Page 20 A delay of up to several ms has been observed for the maximum torque value. Time ms Fig. 2: Graph of the loads exerted on the equipment 1 Turbopump Pendulum valve Characteristics Unit ATP 1603 M Nominal speed 37000 Energy kN·m Torque (C) Max. kN·m < 25...
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Page 21: Securing The Equipment And The Frame
Installation 5.1.2 Securing the equipment and the frame Fastening the pump to the equipment The maximum load caused by a sudden blockage must be absorbed by the pump's fastening elements. ► Design and secure the frame of the pump so that it can withstand the maximum load. ►... - Page 22 Installation Fig. 3: Operating positions Positioning the pump 1. Handling the pump, (see chapter “Handling the pump”). 2. Connect and secure the turbomolecular pump fastening to ensure operator safety and operational reliability (see chapter “Installation specifications”). 3. Stick the safety labels in the operator's language to the most appropriate and visible place on the pump to warn the operator about potential hazards.
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Page 23: Connecting To The Pumping Line
Installation Fig. 5: Installing the pump inlet facing up 1 Lifting table (example) Installing the pump inlet facing up When handling the pump, a lifting device appropriate for the weight of the product must be used. The weight and center of gravity vary depending on the model (see chapters “Technical data” and “Di- mensions”). -
Page 24: Pump Inlet Connection
Installation General instructions for installing the pump in the pumping line in accordance with industry best practice The inlet and exhaust connections must not put undue strain on the pumping line that could cause leak- age. 1. Wear gloves to connect and remove the pump from the equipment. 2. -
Page 25: Connecting The Water Circuit
Installation ► Connect the turbopump with an approved backing pump (see chapter "Technical data"). ► Install an isolation valve (NC) between the turbomolecular pump and the backing pump. 5.4 Connecting the water circuit To limit corrosion and clogging of the water circuit, we recommend using softened or non-aggres- sive water with the required characteristics (see chapter "Water characteristics"). -
Page 26: Connecting The Pump To The Water Circuit
Installation 5.4.2 Connecting the pump to the water circuit Follow the connector installation procedure to avoid any risk of leaks. Pump alone Pump with OBC 1. WATER OUT 2. WATER IN 3. Electronic drive unit (OBC) Provide a water-cooling circuit and a tap to adjust the flow. 1. - Page 27 Installation A filtered dry nitrogen supply with the given characteristics is required for optimum perform- ance (see chapter "Nitrogen characteristics"). Inert gas purge NOTICE Inert gas purge function When the inert gas purge is stopped, the pumped gases can pass from the fore vacuum side to the high vacuum side and damage the bearing housings.
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Page 28: Connection Of The Air Inlet Solenoid Valve
Installation Solenoid valve equipped with 50 sccm purge This option is available depending on the pump configuration. The solenoid valve installed on the pump is supplied and controlled by the electronic drive unit connect- ed to the pump. 1. Connect the solenoid valve to the PURGE port (affixed using 4 supplied screws). 2. -
Page 29: Electrical Connection
Installation 5.8 Electrical connection WARNING Risk of electric shock due to non-compliant electrical installations This product uses mains voltage for its power supply. Non-compliant electrical installations or installa- tions not done to professional standards may endanger the user’s life. ► Only qualified technicians trained in the relevant electrical safety and EMC regulations are au- thorized to work on the electrical installation. -
Page 30: Customer Electrical Installation Protection
Installation 5.8.1 Customer electrical installation protection Circuit breaker protection The power circuit used to supply the pump must be fitted with a breaker complying with the IEC 60947-2 curve D standard whose short circuit cut-off capacity is at least 10 kA. This protection device should be in close proximity to the pump (no further than 7 m away) and in line of sight of the product. -
Page 31: Operation
Operation 6 Operation 6.1 Preliminary precautions for use WARNING Risk of poisoning when process gases are present in the atmosphere The manufacturer has no control over the types of gases used with the pump. Process gases are of- ten toxic, flammable, corrosive, explosive and/or otherwise reactive. There is a risk of serious or fatal injury if these gases are allowed to escape freely into the atmosphere. -
Page 32: Pumping Start-Up
Operation 6.2.2 Pumping start-up The following steps describe the use of the pump regardless of the control interface: ● Use via HHR. ● Use via REMOTE control. ● Use via RS-232/RS-485 Serial link. ● Use via FIELDBUS. Pumping installation diagram Exh. Turbo Fore-vacuum isolation valve Inert gas purge inlet... -
Page 33: Shutting Down The Pump
Operation 6.3 Shutting down the pump 6.3.1 Pumping shutdown NOTICE Risk of damaging the pump by generating an electric arc The pump and its electronic drive unit must not be disconnected from the electrical network before the rotor completely stops rotating and the unit is isolated from the electrical network: an electric arc is created when the circuit is interrupted, which damages internal components. -
Page 34: Powering Off
Operation Otherwise, if the minimum speed is reached before the power supply has been restored: ● the pump lands on its landing bearings, ● the electronic drive unit is powered off; no indicator light is on, ● the landing bearings’ counter decreases. Start up the pump according to the standard start-up procedure when the mains supply has been re- stored. -
Page 35: Maintenance
Maintenance 7 Maintenance 7.1 Maintenance safety instructions DANGER Risk to health posed by residual traces of process gases inside the pump Process gases are toxic and hazardous to health. They can cause poisoning and be fatal. Before dis- connecting the pump, any remaining traces of process gases must be eliminated. ►... -
Page 36: Maintenance Frequency
The initial percentage is set at 100%. When this value reaches the warning threshold, a warning is triggered: the landing bearings must be replaced. If other landings occur, the counter contin- ues to decrease to 0%. Theses landing bearings must be replaced by a Pfeiffer Vacuum service center. -
Page 37: On-Site Maintenance
Maintenance 7.3 On-site maintenance The pump does not require any maintenance on the customer’s premises other than the day-to-day servicing described in this manual. All other maintenance operations must be carried out by our service center. ► Clean the outer surfaces of the product using a clean, lint-free cloth and a product that will not damage the screen-printed surfaces or adhesive labels. -
Page 38: Draining The Water Circuit
Maintenance Disconnection procedure 1. Stop the pump by sending a Stop order (see chapter “Pumping shutdown”). 2. Switch off the pump by setting the mains switch of the electronic drive unit to O. 3. Switch off the circuit breaker of the customer's installation. 4. - Page 39 Maintenance 30’ 10’ A Complete flushing Pressurizing the pump B Purge/inlet flushing Complete flushing 1. Install the blanking plate equipped with the injector on the connector PURGE. 2. Connect the nitrogen to the gas connector provided for this purpose. 3. Flush with nitrogen by injecting a relative pressure of 120 to 150 hPa for 30 minutes. 4.
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Page 40: Decommissioning
All process pumps are designed for continuous operation in process gas pumping applications and should not be stopped. Pfeiffer Vacuum declines any liability for process pumps that have been stop- ped for a prolonged period of time leading to by-product condensation, powder build-up or corrosion inside the pump, nor does its warranty cover such items. -
Page 41: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 42 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 43: Accessories
Accessories 10 Accessories Accessory Function Description Dimension Isolation valve This isolation valve is used to Manual valve see manufacturer's catalog maintain vacuum in the pump by isolating it in the pumping line. Copper seal for This seal makes the connection DN 200 CF-F 303293 CF-F inlet flange between the CF-F housing of the... -
Page 44: Spare Parts
Spare parts 11 Spare parts Description Comments Dust filter 106229 on air inlet solenoid valve 24 V DC coil 038066 for purge valve and air inlet valve 44/52... -
Page 45: Technical Data And Dimensions
Technical data and dimensions 12 Technical data and dimensions 12.1 General Basic principles for the Technical Data of Pfeiffer Vacuum turbomolecular pumps: ► Recommendations from PNEUROP committee PN5. ► ISO 21360; 2007: “Vacuum technology - Standard methods for measuring vacuum-pump perform- ance - General description”... -
Page 46: Environmental Characteristics
Technical data and dimensions Technical data Units ATP 1603 M Maximum pressure at inlet 4 · 10 2.7 · 10 Maximum pressure at exhaust Ultimate pressure < 1 · 10 Nominal rotation speed 37000 (616) (Hz) Stand-by speed 15000 (250) -
Page 47: Nitrogen Characteristics
< 0.1 ppm v Absolut pressure 1 · 10 to 1.5 · 10 Tbl. 7: Nitrogen characteristics 12.6 Electrical characteristics Characteristics of the three-phase motor ATP 1603 M Voltage between phases 44 Vrms Power frequency 1234 Hz Phase current 10 A Tbl. 8:... -
Page 48: Dimensions And Weight
Purge 74.9 1/4 NPT Female 1/4 NPT Female 52.1 Fig. 7: Dimensions ATP 1603 M with OBC Center of gravity CPC ground connection Equidistant holes Ø d2 on Ø d1 Lifting rings (Qty: 2) ATP 1603 M - Dimensions (mm) - Page 49 Technical data and dimensions 83.8 Fig. 8: Dimensions of Purge solenoid valve 1 Connection to pump Possible rotation Fig. 9: Dimensions of Air inlet solenoid valve 1 1/8" NPT female connector 49/52...
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Page 50: Declaration Of Conformity
Declaration of conformity Declaration for product(s) of the type: Magnetically levitated turbomolecular pump ATP 1603 M 1) Pump connected to an electronic drive unit OBC V4. We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. - Page 51 51/52...
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