Pfeiffer Vacuum ATH 1603 M Operating Instructions Manual
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Pfeiffer Vacuum ATH 1603 M Operating Instructions Manual

Turbomolecular pumps
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OPERATING INSTRUCTIONS
OPERATING INSTRUCTIONS
ATH 1603 M - ATH 2303 M
ATH 1603 M - ATH 2303 M
Turbomolecular pumps
Turbomolecular pumps
Translation of the original instructions
Translation of the original instructions
EN
EN

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Summary of Contents for Pfeiffer Vacuum ATH 1603 M

  • Page 1 OPERATING INSTRUCTIONS OPERATING INSTRUCTIONS Translation of the original instructions Translation of the original instructions ATH 1603 M - ATH 2303 M ATH 1603 M - ATH 2303 M Turbomolecular pumps Turbomolecular pumps...

  • Page 2: Turbomolecular Pumps

    This operating instruction manual includes only the instructions to connect the pump to the equipment. Refer to the controller operating instructions to power and use the pump (chapter B, C and D). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 3 All rights reserved, including copying this document in whole or any part without prior written authorization from Pfeiffer Vaccum SAS. Specifications and information are subject to change without notice by the manufacturer. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 4: General Contents

    ATH 1603 M - ATH 2303 M Operating instructions Chapter A INTRODUCTION A 150 - Introduction to the ATH 1603 M - ATH 2303 M A 200 - Control loop of the pump A 210 - The pump operating principle A 400 - Pump technical characteristics...
  • Page 5 Purge port Exhaust of the pump Pump exhaust Water Water cooling circuit connection Water max Pr.7 bar/101 psi Max. cooling water pressure Direction of rotation of the pump Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 6 - The back-up ball bearing - Variation of the pump rotational speed A 400 Pump technical characteristics A 510 The accessories of the pump A 515 Accessory dimensions Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 7 In case of a power failure, the pump motor acts like a generator to transform the rotor energy into electrical power to supply the controller. Controller The ATH 1603 M and ATH 2603 M pumps work with OBC controller or with the MAGPOWER controller. (refer to the operating instructions corresponding).
  • Page 8 Electronics Bearing Position Stator sensor Position of Reference Power Correction Rotor amplifiers Electro- magnet Position return Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 9 It ensures the lowest possible levels of noise and vibration. Stator geometric axis Rotor geometric axis Rotor inertia axis Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 10 Motor Magnetic Exhaust levitated bearings purge* Cooling * The gas purge provides an excellent protection of the pump bearings for corrosive applications and ensures the rotor cooling. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 11 A distinction is made between the following speeds: - reduced speed (STANDBY speed) which can be set between the low speed value and the nominal speed. - nominal speed preselected at factory. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 12 (4) Reduced maximum flow rate, ultimate pressure at exhaust without loss of flow rate speed. Depends on environmental conditions. (5) Over 25 °C. modify the operating conditions to reduce the nominal power. Contact Pfeiffer Vacuum. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 13 (7) Value for the pump. All the current leakage may not pass through the earth wire. this depends on the way the pump is connected to the earth via the equipment in which it is integrated. (8) The value depends on controller type. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 14 A 400 Pump technical characteristics - ATH 1603 M without OBC Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 15 A 400 Pump technical characteristics - ATH 1603 M with OBC Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 16 A 400 Pump technical characteristics - ATH 2303M without OBC Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 17 A 400 Pump technical characteristics - ATH 2303M with OBC Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 18 32 Studs M8x35 110676S* 12 CHC M10x35 ATH 2800 M ATH 3200 M 113189* 12 CHC M12x45 * With the presence of centering ring at inlet port Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 19 Water valve 108668 Air inlet valve cables Dimensions and purge valve cables A462403-010 (for pumps controlled by 3,5 m A462403-035 Magpower) A462403-050 10 m A462403-100 20 m A462403-200 Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 20: Accessory Dimensions

    83.3 (3.26) 30 (1.18) Pump connection Water valve (0.59) Cable water valve dimensions mm (inch) Inlet and outlet (0,59) 1/8 NPT female Scale 13/20 38,7 (1.52) 47,7 (1.88) Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 21 Connector for coil (possible to rotate) 1/8 NPT female connector (air inlet) DN 40 ISO-KF 82 (3.23) 65.5 (2.58) 18.5 (0.73) 1/8 NPT female connector Dust filter Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 22 - Solenoid valve equipped with 50 sccm purge - Air inlet valve B 340 Water cooling connection - Water characteristics - Procedure to connection B 401 Typical electrical wiring diagram Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 23: Safety Instructions For Installation

    In all cases, we recommend keeping the packaging (reusable materials) for further transport of the equipment or for prolonged storage. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 24 100 kPa below atmospheric pressure and that they are impervious to damage from vacuum (seals, etc.). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 25 OSHA requirement 29 CFR.1910.147. If access to the IEC connector is restricted an additional isolation device  should be provided, which will be easily accessible by an operator. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 26  users due to the high temperatures generated (outer surfaces > 70 °C): wear protective gloves and leave the pump to cool before working on the product. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 27 Controller can be deteriorated when any objects are introduced or any liquids penetrate into the unit. Make sure no objects enter through the ventilation holes. Keep the unit away from the liquids. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 28: Other Labels

    Explosure may result in severe injury preventive maintenance operation can only be performed by or death. Preventive maintenance must be done by trained personnel only. trained personnel. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 29: Pump Handling

    Risk of tilting: although the product meets EEC safety regulations , it is advisable to guard against the risk of tilting during handling, installation, and use ( chapter A for the location of the center of gravity). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 30: Pump Storage

    (depends on the model). Exhaust Blanked with a DN 40 ISO-KF blanking plates. Connection for air inlet Blanked with a DN 16 ISO-KF blanking plates. valve and nitrogen device Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 31: Pump Connections To An Installation

    - connect the pump to the customer’s handling device using the threaded holes located at the rear of the pump ( A 400 of the operating manual). The pump can operate in any position Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 32 Only use approved original connecting accessories from Pfeiffer Vacuum for the installation (see Accessories). Installations specifications Chamber Equipment ATHM Frame Pump connection Respect the item 1, 2 and 3 pump connection instructions. instructions Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 33 Loads transmitted to the system (1) Rotor Loads : Pump fixed to system : valve Bending moment (b) Pendulum plate Front view Axial load (a) Pump Torque (c) Top view Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 34 * Max. axial force occurs if the pump inlet is obstructed with high stiffness parts. There is no load if the system has low stiffness (i.e. valve). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 35 This rotation could damage the foreline and the purge gas line which would generate hazards for the user. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 36: Vacuum Connections

    Use only dry and clean pipe lines, and wear gloves to make the pump connections. After connecting the product to the pumping line, check for leaks along the entire to ensure proper connections (pump, pipes, valves,.…). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 37 It is highly recommended to install an isolation valve (closed when power is off) between the turbo pump and the roughing circuit. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 38: Nitrogen Characteristics

    It is advised to maintain the purge flow as long as the rotor is running to protect pump internal parts. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 39 10 N·m. - Adjust the inert gas purge pressure to obtain the desired flow (see graph below). Flow rate (SCCM) Dust filter Absolute pressure at inlet (kPa) Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 40: Air Inlet Valve

    Dust filter Operating instructions of the controller). Filtered air or N purge A nitrogen purge can be connected instead of the dust filter (1/8 NPT female). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 41: Water Cooling Connection

     An appropriate water treatment system must be used to prevent the growth of such microorganisms. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 42: Water Line Connection

     Rotate the nut finger-tight OBC and pump for  While holding the connector example body steady, tighten the nut of 1/2 turn using a flat open-ended spanner Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 43 - Connect the water inlet line to one of the cooler water fittings on the pump, with the other fitting connected to the water draining circuit via a tube (supplied by customer). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 44 The impedance between the pump-body and the earth connection point must be < 0.1 Ohm at 25A. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 45: Operation

    Operating instructions ATH 1603 M - ATH 2303 M Detailed contents C 100 Safety instructions for product use Refer to the Controller Operating instructions to have instructions about pump operation. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 46 Located on the controller, this label indicates that the controller must not be disconnected when the pump is running. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 47 Refer to the controller Operating manual to control and monitor the pump chapter C). Refer to the controller Operating manual if a fault appears D 200). Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 48: Maintenance

    Maintenance Operating instructions ATH 1603 M - ATH 2303 M Detailed contents D 100 Safety instructions for product maintenance D 150 Maintenance frequency Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 49 Before removing the pump from the installation:  Continue nitrogen flow from the process tool for 30 min. Nitrogen pressure and flow rate should be identical to the programmed values during process. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 50 Before returning the product, please consult the Service procedure. Fill in the declaration of contamination form available on our website. Attach it to the product before shipping to the closest service-repair office. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 51: Maintenance Frequency

    Only controller replacement, inlet screen or pump valve replacement are authorized at the customer’s site. Contact nearest service center or the service support at the following e-mail address: support.service@pfeiffer-vacuum.fr Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 52: Maintenance Instructions

    Maintenance instructions Operating instructions ATH 1603 M - ATH 2303 M Detailed contents E 100 Shipping procedure for contaminated pumps - Connecting ports - Rough decontamination procedure Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 53: Shipping Procedure For Contaminated Pumps

    Centering ring 068193 Seal 076705 with DN 16 seal DN 16 clamping Fitting 1/4 VCR 083333 108500 ring female *** Standard connection accessories available in the product catalog. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 54 Flush with nitrogen by injecting a 10’ relative pressure of 110 to 150 hPa for 10 minutes. Stop the nitrogen flow. * Characteristics of dry nitrogen: B 330. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 55: Labelling Of The Pump

    Preventive maintenance must be done by trained personnel only. unsafe products. Fill in the contamination declaration and attach it to the product G 200. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 56: Maintenance Components

    Maintenance components Operating instructions ATH 1603 M - ATH 2303 M Detailed contents F 000 Spare parts - Instructions of use F 100 First level maintenance parts Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...

  • Page 57: Replacement Of Parts

    The manufacturer supplies maintenance components, spare parts or kits to perform the maintenance of its products Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 58 Dust filter 106229 A complete range of connecting accessories is available in the manufacturer’s catalogue (flanges, fittings...). Water valve coil P/N. Coil 24 V DC 108667 Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 59 Appendix Operating instructions ATH 1603 M - ATH 2603 M Detailed contents G 200 Service Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 60 Service orders All service orders are carried out exclusively according to our general terms and conditions for the repair and maintenance, available in our website. Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M...
  • Page 61 VACUUM SOLUTIONS FROM A SINGLE SOURCE VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. technological perfection, competent advice and reliable service.

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Ath 2303 m

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