Pfeiffer Vacuum ATH 1603 M Operating Instructions Manual
Magnetically levitated turbomolecular pump
Hide thumbs
Also See for ATH 1603 M:
- Operating instructions manual (78 pages) ,
- Operating instructions manual (63 pages) ,
- Operating instructions manual (62 pages)
Subscribe to Our Youtube Channel
Related Manuals for Pfeiffer Vacuum ATH 1603 M
Summary of Contents for Pfeiffer Vacuum ATH 1603 M
- Page 1 OPERATING INSTRUCTIONS Translation of the Original ATH 1603 M - ATH 2303 M Magnetically levitated turbomolecular pump...
- Page 2 These operating instructions describe all models and variants of your product. Note that your product may not be equipped with all features described in this document. Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior notice. Please take into account that online operating instructions can deviate from the printed operating instructions supplied with your product.
-
Page 3: Table Of Contents
Table of contents Table of contents About this manual Validity 1.1.1 Products concerned 1.1.2 Applicable documents Conventions 1.2.1 Pictographs 1.2.2 Target group 1.2.3 Instructions in the text 1.2.4 Labels 1.2.5 Abbreviations Safety General safety information Safety instructions Safety instructions relating to flammable/pyrophoric materials Precautions Intended use Misuse... - Page 4 7.4.1 Disconnecting the pump from the installation 7.4.2 Draining the water circuit 7.4.3 Preparing the pump for shipping Decommissioning Shutting down for longer periods Recommissioning Disposal Service solutions by Pfeiffer Vacuum Accessories Spare parts Technical data and dimensions 12.1 General 12.2 Technical characteristics 12.3 Environmental characteristics 12.4 Cooling water characteristics...
- Page 5 List of tables List of tables Tbl. 1: Loads exerted on the equipment Tbl. 2: Securing the high vacuum flange (inlet flange) Tbl. 3: Conversion table: Pressure units Tbl. 4: Conversion table: Units for gas throughput Tbl. 5: Environmental characteristics Tbl.
- Page 6 Fig. 3: Mechanical connection of the pump to the equipment Fig. 4: Graph of the loads exerted on the equipment - ATH 1603 M Fig. 5: Graph of the loads exerted on the equipment - ATH 2303 M Fig. 6: Purge flow diagram Fig.
-
Page 7: About This Manual
Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status. -
Page 8: Instructions In The Text
About this manual 1.2.3 Instructions in the text Usage instructions in the document follow a general structure that is complete in itself. The required ac- tion is indicated by an individual step or multi-part action steps. Individual action step A horizontal, solid triangle indicates the only step in an action. ►... -
Page 9: Abbreviations
About this manual This label warns users that they risk being injured if their hands come into contact with a hot surface: protective gloves must be worn at all times when working on the pump. This label warns users about pumped process gases that can be dangerous or toxic and lead to severe injury or death. -
Page 10: Safety
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►... - Page 11 ► Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be released from any warranty and liability for non-compliance with installation instructions. ► Only use approved original parts from Pfeiffer Vacuum for connection to the equipment (see ac- cessories).
-
Page 12: Safety Instructions Relating To Flammable/Pyrophoric Materials
Safety WARNING Risk of injury in case of contact with pressurized water The product uses pressurized water as a cooling fluid. Non-compliant installations or installations not done to professional standards may endanger the user’s life. ► Install a manual valve on the circuit at a distance of 3 m from the product, so that the water sup- ply can be locked out. -
Page 13: Precautions
Safety The risk assessment must take into account the pumped gases, by-products, and all components mak- ing up the installation. The following situations are hazardous and must be avoided at all cost: ● Flammable or pyrophoric gas concentrations in the flammable range. ●... -
Page 14: Intended Use
● The turbomolecular pump must be combined with an appropriate backing pump. ● The vacuum pump must be integrated into industrial equipment. ● The pump must operate with a Pfeiffer Vacuum OBC or Magpower electronic drive unit. When the pump is integrated into industrial equipment, it becomes a pumping component: the integrator of this component must provide the operator with all safety measures, notably for hot surface risks. -
Page 15: Transportation And Storage
Transportation and Storage 3 Transportation and Storage 3.1 Receipt of the product Condition of the delivery ● Check that the product has not been damaged during transport. ● If the product is damaged, take the necessary measures with the carrier and notify the manufacturer. -
Page 16: Storage
Transportation and Storage Pump alone Pump with OBC 1. Strap 2. Lifting ring Handling the pump using a hoist When handling the pump, a lifting device appropriate for the weight of the product must be used. The weight and center of gravity vary depending on the model (see chapter “Dimensions”). 1. -
Page 17: Product Description
Product description 4 Product description 4.1 Product identification To correctly identify the product when communicating with our service center, always have the informa- tion from the product rating plate available (see chapter "Labels"). 4.1.1 Scope of delivery ● 1 magnetically levitated turbomolecular pump ●... -
Page 18: Man/Machine Interface
Product description 4.2 Man/machine interface Fig. 1: Description of an ATH 1603 M pump 1 Splinter shield IN/OUT water connection 2 Inlet flange (high vacuum flange) Electrical connector 3 Neutral gas purge (Purge) Functional grounding 4 Exhaust flange (Pump exhaust) Fig. 2:... -
Page 19: Installation
► Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be released from any warranty and liability for non-compliance with installation instructions. ► Only use approved original parts from Pfeiffer Vacuum for connection to the equipment (see ac- cessories). -
Page 20: Graph Of The Loads Exerted On The Equipment - Ath 1603 M
A delay of up to several ms has been observed for the maximum torque value. Time ms Fig. 4: Graph of the loads exerted on the equipment - ATH 1603 M Time ms Fig. 5: Graph of the loads exerted on the equipment - ATH 2303 M... -
Page 21: Securing The Equipment And The Frame
Installation Characteristics Unit ATH 1603 M ATH 2303 M Nominal speed 39000 31000 Energy kN·m Torque (C) Max. kN·m Duration ms 3.00 Delay ms Bending moment (B) Max. kN·m Duration ms Delay ms Max. kN 0 <<398 0<<650 Axial force (A) -
Page 22: Connecting To The Pumping Line
Installation CAUTION Risk of falling due to poorly-secured cables or pipework The space around the pump must be kept clear of obstacles to prevent falls from potentially occur- ring. ► Route and secure electric cables and pipework in the appropriate pathways. The manufacturer guarantees proper operation of the pump if it is used in a uniform magnetic field up to 0.5 mT. -
Page 23: Pump Inlet Connection
Installation General instructions for installing the pump in the pumping line in accordance with industry best practice The inlet and exhaust connections must not put undue strain on the pumping line that could cause leak- age. 1. Wear gloves to connect and remove the pump from the equipment. 2. -
Page 24: Connecting The Water Circuit
Installation ► Connect the turbopump with an approved backing pump (see chapter "Technical data"). ► Install an isolation valve (NC) between the turbomolecular pump and the backing pump. 5.4 Connecting the water circuit To limit corrosion and clogging of the water circuit, we recommend using softened or non-aggres- sive water with the required characteristics (see chapter "Water characteristics"). -
Page 25: Connecting The Pump To The Water Circuit
Installation Procedure for the assembly of single ferrule connectors Connectors used to connect flexible pipes between the pump and electronic drive unit (for example). 1. Insert the pipe until it is affixed tightly to the connector. 2. Manually place the nut into contact. 3. -
Page 26: Nitrogen Circuit Connection
Installation 5.5 Nitrogen circuit connection Depending on the application, the inert gas purge can consist of: ● Injecting ambient air, or ● Injecting an inert gas into the pump. In this manual, the inert gas will be called 'nitrogen', as it is the most commonly used gas. For more information on the type of purge gas, contact our service center. -
Page 27: Connection Of The Air Inlet Solenoid Valve
Installation 1 Flow reduction - 50 sccm Purge reduction device 50 sccm The operation of this purge is continuous. The flow reducer guarantees a 50 ؘsccm flow for a pressure of 1.1 · 10 hPa. When the inert gas line is equipped with a mass flowmeter, do not install the flow reduc- tion device. -
Page 28: Check That The Installation Is Leaktight
Installation 1 Air inlet solenoid valve Dust filter 1. Connect the solenoid valve to the PUMP EXHAUST port of the pump (use connecting accesso- ries of product catalog). 2. Connect the solenoid valve to the connector of the electronic drive unit (see electronic drive unit operating instructions). -
Page 29: Customer Electrical Installation Protection
Installation WARNING Danger of electrocution by contact during maintenance or overhaul There is an electric shock hazard in case of contact with a product powered on and not electrically isolated. ► Before carrying out any work, set the main switch to O. ►... - Page 30 Installation Grounding When necessary, the installer must provide dual protection in addition to the existing one. It consists of an uninsulated braid or a separate green/yellow conductor with a minimum section 3 mm (9AWG). The impedance between the pump body and the ground connection point must be < 0.1 Ohm at 25 A. ►...
-
Page 31: Operation
Operation 6 Operation 6.1 Preliminary precautions for use WARNING Risk of poisoning when process gases are present in the atmosphere The manufacturer has no control over the types of gases used with the pump. Process gases are of- ten toxic, flammable, corrosive, explosive and/or otherwise reactive. There is a risk of serious or fatal injury if these gases are allowed to escape freely into the atmosphere. -
Page 32: Pumping Start-Up
Operation 6.2.2 Pumping start-up The following steps describe the use of the pump regardless of the control interface: ● Use via HHR. ● Use via REMOTE control. ● Use via RS-232/RS-485 Serial link. ● Use via FIELDBUS. Pumping installation diagram Exh. Turbo Fore-vacuum isolation valve Inert gas purge inlet... -
Page 33: Shutting Down The Pump
Operation 6.3 Shutting down the pump 6.3.1 Pumping shutdown NOTICE Risk of damaging the pump by generating an electric arc The pump and its electronic drive unit must not be disconnected from the electrical network before the rotor completely stops rotating and the unit is isolated from the electrical network: an electric arc is created when the circuit is interrupted, which damages internal components. -
Page 34: Powering Off
Operation Otherwise, if the minimum speed is reached before the power supply has been restored: ● the pump lands on its landing bearings, ● the electronic drive unit is powered off; no indicator light is on, ● the landing bearings’ counter decreases. Start up the pump according to the standard start-up procedure when the mains supply has been re- stored. -
Page 35: Maintenance
Maintenance 7 Maintenance 7.1 Maintenance safety instructions DANGER Risk to health posed by residual traces of process gases inside the pump Process gases are toxic and hazardous to health. They can cause poisoning and be fatal. Before dis- connecting the pump, any remaining traces of process gases must be eliminated. ►... -
Page 36: Intervalles De Maintenance
The initial percentage is set at 100%. When this value reaches the warning set point deter- mined, a warning is triggered: the landing bearings must be replaced. If other landings occur, the coun- ter continues to decrease to 0%. Theses landing bearings must be replaced by a Pfeiffer Vacuum service center. -
Page 37: On-Site Maintenance
Maintenance 7.3 On-site maintenance The pump does not require any maintenance on the customer’s premises other than the day-to-day servicing described in this manual. All other maintenance operations must be carried out by our service center. ► Clean the outer surfaces of the product using a clean, lint-free cloth and a product that will not damage the screen-printed surfaces or adhesive labels. -
Page 38: Draining The Water Circuit
Maintenance Disconnection procedure 1. Stop the pump by sending an order to Stop (see chapter “Pumping shutdown”). 2. Switch off the pump by setting the mains switch of the electronic drive unit to O. 3. Switch off your main circuit breaker. 4. - Page 39 Maintenance Complete flushing 1. Install the blanking plate equipped with the injector on the connec- tor Purge. 2. Connect the nitrogen to the gas connector provided for this pur- pose. 3. Flush with nitrogen by injecting a relative pressure of 120 to 30’...
-
Page 40: Decommissioning
All process pumps are designed for continuous operation in process gas pumping applications and should not be stopped. Pfeiffer Vacuum declines any liability for process pumps that have been stop- ped for a prolonged period of time leading to by-product condensation, powder build-up or corrosion inside the pump, nor does its warranty cover such items. -
Page 41: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 42 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
-
Page 43: Accessories
Accessories 10 Accessories Accessory Function Description Dimension Isolation This isolation valve is used to Manual valve see manufacturer's catalog valve maintain vacuum in the pump by isolating it in the pumping line. Copper seal DN 200 CF-F 303293 for CF-F in- (Qty 5) let flange DN 250 CF-F... - Page 44 Accessories Accessory Function Description Dimension Air inlet sol- Air inlet solenoid valve is used 24 V DC (NC) 11 slm 114280 enoid valve to slow down the pump. It only opens for a rotation speed < at 10000 min Purge sole- Purge solenoid valve is used to 24 V DC (NC) 50 sccm...
-
Page 45: Spare Parts
Spare parts 11 Spare parts Description Comments 24 V DC coil 038066 for purge valve and air inlet valve Dust filter 106229 on air inlet solenoid valve 45/56... -
Page 46: Technical Data And Dimensions
Technical data and dimensions 12 Technical data and dimensions 12.1 General Basic principles for the Technical Data of Pfeiffer Vacuum turbomolecular pumps: ► Recommendations from PNEUROP committee PN5. ► ISO 21360; 2007: “Vacuum technology - Standard methods for measuring vacuum-pump perform- ance - General description”... -
Page 47: Environmental Characteristics
Technical data and dimensions Technical data Units ATH 1603 M ATH 2303 M Maximum flow with sccm 4000 4000 4000 4000 water flow 60 l/h sccm 1200 1200 1500 1500 sccm > 4000 > 4000 > 4000 > 4000 sccm >... -
Page 48: Cooling Water Characteristics
Technical data and dimensions Pollution degree Category II Transient overvoltage protection 1) Transient overvoltages up to overvoltage category II levels. Temporary overvoltages that affect the mains supply. Tbl. 5: Environmental characteristics 12.4 Cooling water characteristics The characteristics below concern only the turbomolecular pump with magnetic ball bearings. This pump is associated with a backing pump. -
Page 49: Electrical Characteristics
Electrical characteristics of the customer’s network 12.7 Dimensions and weight 122.5 1/4 NPT M4x8 Exh. Female DN 40 ISO-KF DN 16 ISO-KF Fig. 7: ATH 1603 M dimensions Center of gravity 5 M10 holes for handling Equidistant holes Ø d2 on Ø d1 49/56... -
Page 50: Dimensions Of Ath 1603 M With Obc
(OUT) 1/4 NPT Female 34.6 (IN) 49.6 Fig. 8: Dimensions of ATH 1603 M with OBC Center of gravity View according to F Equidistant holes Ø d2 on Ø d1 Lifting rings (Qty: 2) ATH 1603 M dimensions (mm) Pump... -
Page 51: Ath 2303 M Dimensions
Technical data and dimensions Inlet flange ATH 1603 M alone ATH 1603 M with OBC Pump weight (kg) Pump weight (kg) DN 250 ISO-F DN 250 ISO-K DN 250CF-F DN 200 ISO-F DN 200 ISO-K DN 200 CF-F 1/4 NPT Female 85.5... -
Page 52: Dimensions Of Ath 2303 M With Obc
Technical data and dimensions 268 maxi 155.4 195 maxi 125 maxi 85.7 17.9 Exh. 49.6 DN 40 ISO KF 1/4 NPT Exh. Fig. 10: Dimensions of ATH 2303 M with OBC Center of gravity Equidistant holes Ø d2 on Ø d1 ATH 2303 M dimensions (mm) Pump alone Pump + OBC... - Page 53 Technical data and dimensions 83.8 Fig. 11: Dimensions of Purge solenoid valve 1 Connection to pump Possible rotation Fig. 12: Dimensions of Air inlet solenoid valve 1 1/8" NPT female connector 53/56...
-
Page 54: Declaration Of Conformity
The person responsible for compiling the technical file is Mr. Nicolas Varennes, Pfeiffer Vac- uum SAS, 98, avenue de Brogny B.P. 2069, 74009 Annecy cedex, France. Magnetically levitated turbomolecular pumps ATH 1603 M ATH 2303 M Pump connected to an electronic drive unit OBC V4 or Magpower type. - Page 55 55/56...
Need help?
Do you have a question about the ATH 1603 M and is the answer not in the manual?
Questions and answers