Related Manuals for Pfeiffer Vacuum A 124H
Summary of Contents for Pfeiffer Vacuum A 124H
- Page 1 OPERATING INSTRUCTIONS Translation of the original instructions A4 SERIES Multi-stage Roots pump for harsh applications...
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Page 2: Table Of Contents
Table of contents Table of contents About this manual ..........5 1.1 Validity. - Page 3 Table of contents 6.2.1 Switch on..........31 Pump start-up .
- Page 4 Table of contents 9.1.1 How to contact us ........60 9.2 Maintenance frequency.
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Page 5: About This Manual
About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. -
Page 6: Pictographs
About this manual 1.2.2 Pictographs Prohibition of an action to avoid any risk of accidents, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document... -
Page 7: User Target Group
This manual is intended for all persons in charge of transport, installation, commission- ing/decommissioning, use, maintenance or storage of the product. The work described in this document may only be carried out by persons who have a suitable technical edu- cation (specialist staff) or have received appropriate training from Pfeiffer Vacuum. -
Page 8: Safety
Safety Safety Safety precautions Obligation to inform Any person responsible for installing, using or maintaining the product must first read the security instructions in this operating manual and comply with them. It is the operating customer’s responsibility to protect all operators against the dan- gers associated with the product, with the media pumped and with the entire instal- lation. -
Page 9: Safety For Flammable/Pyrophoric Materials
Responsibility for safe operation of the pump(s), the process tool, and the abate- ment device, always belongs to the user and/or the integrator. The user and/or the integrator is/are responsible for the application for which the Pfeiffer Vacuum product will be used. -
Page 10: Protective Equipment
For more details regarding safety instructions related to flammable and pyrophoric gas- es, contact Pfeiffer Vacuum Service. Protective equipment In some situations, personal protective equipment must be worn when handling the vac- uum pump and its components. -
Page 11: Proper Use
Safety WARNING Risk of injury due to falling objects When transporting parts/components and during maintenance there is a danger of loads slipping and falling down. Carry small and medium-size parts/components with both hands. Carry parts/components > 20 kg with a suitable lifting device. Wear safety shoes with a steel toe in accordance with directive EN 347. -
Page 12: Transport And Storage
Transport and storage Transport and storage Upon delivery, check that the product has not been damaged during transport. If the product is damaged, take the necessary measures with the carrier and notify the manu- facturer. In all situations we recommend: Keeping the product in its original packaging so it stays as clean as it was when dis- patched by us. -
Page 13: Storage
Transport and storage Storage NOTICE Duty to inform In order to prevent moisture from entering the pump before installation, it has been pres- surized before shipment with nitrogen and sealed with blanking plates. Do not remove the blanking plates sealing the inlet and exhaust ports if the product is not connected to the pumping line. -
Page 14: Product Description
Roots blower. Several compact pumping systems are available in H version (harsh applications): A 124H, A 204H, A 604H, A 804H, A 1204H, A 1504H, A 1804H, A 2404H, A 2504H, A 3004H. Other compact pumping systems are available in X version (extremely harsh applica- tions): A 204X, A 804X, A 1504X, A 1804X, A 2404X, A 2504X, A 3004X. -
Page 15: Man/Machine Interfaces
Product description Man/machine interfaces Fig. 1: Front panel Inlet Emergency stop button Power White indicator light: pump powered Running Green indicator light: pump started Warning Yellow indicator light: alert Fault Red indicator light: alarm Hand-held remote module connector... - Page 16 Product description Fig. 2: Rear panel Main switch Power supply Inlet Exhaust Nitrogen inlet Water inlet/outlet EMS Emergency stop connector Earth connector Pressure regulator REMOTE control connector Roots 2 connector RS-232 SERIAL LINK connector RS-232/485 SERIAL LINK connector USER connector RS-485 SERIAL LINK connector Coding wheel Configuration switch...
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Page 17: Hand-Held Remote Module (Hhr)
Product description Hand-held remote module (HHR) It interfaces with the pump. The keyboard is used to display and configure parameters. Fig. 3: Hand-held remote module 1 Display 3 Parameter selection and configuration keys 2 Indicator Green: the pump is running 4 Manual control keys lights Yellow: warning presence... -
Page 18: Display Description
Product description 4.3.2 Display description The monitoring displays the status of the pump and the operating parameters. Gain access to other operating parameters using + or – keys. Switching on 185h PUMPING STOPPED 05/09/16 10:10 Running RUNNING FIXE SPEED BF FREQ: 60 Hz R1 FREQ: 100 Hz 1 Running time machine 4 Date and hour... -
Page 19: Installation
Use a spirit level to check that the frame is in horizontal position in both axis. Remove the transport flange. Removing the transport flange (except for A 124H, A 204H, A 204X, A 2404H, A 2404X) Remove the top cover. -
Page 20: Oil Filling
Wear mask, gloves, protective glasses to fill the pumps with oil. NOTICE Only use approved operating fluids The pumps are factory tested using Pfeiffer Vacuum oil. The same oil must be used during operation. The oil safety data sheet is available on the Pfeiffer Vacuum website. -
Page 21: Connection To The Water Circuit
Installation 5.2.1 Oil filling caution Make sure the pump is off (main switch on O) and the power line cable discon- nected. Make sure the pump is positioned horizontally. Remove the pump covers. Use the funnel equipped with a flexible tube. 5.2.2 Procedure Fill the housings:... -
Page 22: Connection To The Nitrogen Circuit
Installation WARNING Pressurised circuit In order to carry out operations on the product safely, the user must: Fit a manual valve on the water circuit 3 m from the product allowing the cooling cir- cuit to be locked. Connect the water pipes to the coupling connections (delivered with the pump): Water inlet = female connection, Water outlet = male connection. -
Page 23: Connection To The Pumping Line
Installation WARNING Pressurised circuit To work safely on the product, the operator must: Install a manual valve on the nitrogen circuit at a distance of 3 m from the product, so that the nitrogen supply can be locked. Connect the nitrogen pipe to the coupling connection (delivered with the pump). Pro- vide a 6.35 OD (1/4 inch) pipe tubing (supplied by the customer). -
Page 24: Connection At Pump Inlet
Installation WARNING Risk of crushing or cutting related to the rotating parts Do not expose any part of the human body to the vacuum. The product is supplied with the inlet and exhaust sealed. Remove these blanking plates when you are ready to connect the product to your vacuum system. -
Page 25: Exhaust Ventilation Of The Cover
Installation Exhaust ventilation of the cover The pump is equipped with a device for ventilating the inside of the cover to extract any gas to an exhaust gas extraction system. This device consists of a pipe and a differential pressure sensor. The gas extraction system must guarantee a minimum flow rate of 85 m3/h in order to generate a differential pressure of 0.33 hPa (see 7.13). -
Page 26: Leak Test
Installation Leak test WARNING Leak-tightness of the equipment It is the user's responsibility to ensure this level of leak tightness is maintained, espe- cially when dangerous gases are pumped. The operator must maintain this level of tight- ness, particularly when pumping dangerous gases. Proceed as follows: Perform a leak test on the entire pumping line after installation. -
Page 27: Customer Electrical Installation Protection
Installation close the electrical box. 5.8.1 Customer electrical installation protection Installation protection with circuit breaker The user must supply the pump from facilities equipped with main circuit breaker, curve D (IEC 60947-2), in accordance with local regulations and with at least a 10 kA short circuit cut-off capacity. -
Page 28: Operating For The First Time
Installation Before switching on, connect the cover plug on EMS connector (see 4.2). To integrate the pump into the emergency stop circuit of a equipment, wired the EMS connector at the rear of the pump (see 8.7). Semi S2 requirements (EMO) To meet the requirements of the Semi S2 standards, it is the customer's responsibility to integrate the pump into the equipment's emergency off circuit. -
Page 29: Default Setting
Installation 5.9.3 Default setting When the pump is delivered, it runs according to the default setting: it depends on the product ordering guide. The user or the integrator is responsible for the application for which the pump is used and must adapt the parameters accordingly (see 8.2). 5.9.4 Access code modification The setting made at the factory is protected by an access code (“0”... - Page 30 Installation Select DATE AND TIME with the ENTER key. DATE AND TIME Some parameters can only be modified when the pump is stopped. Adjust the value with the + or – keys. DATE AND TIME Validate with the ENTER key. Min: 1 Max: 31 Return to the main menu by pressing the SET key.
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Page 31: Operation
Operation Operation The following steps describe the use when the pump is locally controlled: the [CON- TROL MODE] is [HHR]. For other control modes, please refer to Control Interfaces (see 8) for instructions on how to wire and set the parameters of the other interfaces. Prerequisites to use WARNING Risk associated with process gases... -
Page 32: Pump Shut-Down
Operation 6.2.2 Pumping start-up Press START key, valid with ENTER, the pumping starts. The Running green indica- tor lights on. The following operations will perform automatically: – FB pump starts up, – purge gas valve opens, – Roots pump starts up, –... -
Page 33: Switching Off
Operation NOTICE Risk of injury When the STOPPING message appears on the display, don’t intervene on the pump. Wait for the PUMPING STOPPED message before intervening on the pump. Switch off the pump. Wait for the pump cooling. The message STOPPING appears on the HHR display. 185h STOPPING... -
Page 34: Use With Two Hhrs
Operation Use with two HHRs Two HHR can be connected to the pump (HHR on pump front panel, J8 at the rear panel (see 4.2)). Reading of data and parameters can be done on both HHR, even if they do not control the pump. -
Page 35: Advanced Settings
Advanced settings Advanced settings This chapter describes the available functions and their respective operating modes to help the user configure the parameters according to the operating specifications during processes. Nitrogen injection device The nitrogen injection device is used to facilitate the evacuation of pollutants produced by the process, to dilute harmful gases in the compression stages and to protect the me- chanical parts of the pump. -
Page 36: Indicating A Nitrogen Flow Defect
Advanced settings Purge valve Pump PURGE START PURGE PURGE STOP Time WARNING Risk due to process gases It is highly recommended not to stop the purge when the pump is running. 7.1.2 Indicating a nitrogen flow defect 3 monitoring thresholds and a delay linked to each threshold can be set in menu [SET- TING] [PURGE] [PURGE FLOW] then[PRE-WARNING]/[WARNING]/[PRE-ALARM] (see 8.2). -
Page 37: Exhaust Pressure Monitoring
Advanced settings Exhaust pressure monitoring Exhaust pressure monitoring is used to control the level of clogging in the functional block. The nitrogen injection system is equipped with a pressure sensor that measures the pump exhaust pressure. A pre-warning, a warning, a pre-alarm thresholds and their associated delay can be set in [SETTING] [EXH PRESS] [PRE-WARNING/WARNING/ PRE-ALARM] [THRESHOLD]/[DELAY] (see 8.2). -
Page 38: Water Circuit
It is also used for thermal regulation of the high pressure (HP) and low pressure (LP) stages of the functional block (FB) (see 7.4.1). Fig. 10: A 124H/A 204H/A 204X water circuit Roots Fig. 11: Water circuit for other models... -
Page 39: Functional Block Temperature Management
Advanced settings Functional block temperature management 7.4.1 Thermostatic control of the functional block The temperature regulation in the FB prevents deposits or condensation of process by- products in the pump and limits corrosion. The water circuit regulates the heat in the HP and LP stages of the functional block. It is composed of following components, figure (see 7.3): LP water valve (if present) Regulate the temperature of the HP and LP stages... -
Page 40: Heating
Advanced settings Heating The heating system eliminates any cold points in the pumping system to avoid gas con- densation. The system can manage up to 3 different heating elements inside the pump. Roots Fig. 12: Heating 7.6.1 Management modes The management mode is selected with the pump stopped : –... -
Page 41: Management Of An Inlet Isolation Valve
Advanced settings A pre-alarm message appears but the pump doesn’t stop. Temperature Pre-alarm message Warning message Thermal safety No message Time Management of an inlet isolation valve The inlet isolation valve is used to isolate the pump it in the pumping line. A J4 connector (see 8.5) is used to supply and manage an inlet isolation valve (accessory). -
Page 42: Motor Power Monitoring
Advanced settings Isolation valve Pompe Time AUX AUX START STOP AUTO. SOFT PUMPING The pump controls either a valve incorporating the “soft pumping” function or two valves in parallel. The opening and closing of the « soft pumping » valve is controlled automat- ically by the pump when it starts or stops. -
Page 43: Management And Monitoring Of The Motor Rotation Frequencies
Advanced settings Management and monitoring of the motor rotation frequencies When the motors of the functional block and/or Roots are powered by a frequency vari- ator, the management mode can be selected (FIXED or ANALOG) depending on the ap- plication. These modes are used to define the rotation frequencies: minimum, intermedi- ate or maximum. -
Page 44: Analog Input Management
Advanced settings 7.11 Analog input management An analog input (0-10 Volt) [ANA1] is available on the ANA1 plug (see 15.4). An analog input (0-10 Volt) [USER ANA] is available on the J3 connector (see 8.4.3). 2 monitoring thresholds (warning and alarm) and a delay linked to each threshold can be set [SETTING] [ANALOGIC INPUT] [ANA1]/[USER ANA] [ENABLED] (see 8.2). -
Page 45: Semi Pump Configuration (Option)
Advanced settings 7.13 SEMI pump configuration (Option) The SEMI option pump (factory configuration) is equipped with a cover that allows com- pliance with the requirements of SEMI S2-0712 and SEMI S6-070: – a cover equipped with a sensor for ventilation and an exhaust box for connection to the customer’s installation (see 5.6), –... -
Page 46: Control Interfaces
Control interfaces Control interfaces This chapter describes the connections and protocols associated with each control mode. Different control modes 4 control mode are available: – HHR: locally controlled by the hand-held remote, – REMOTE: remote controlled by J1 connector, – SERIAL LINK: remote controlled by serial link J2, J7, J6, –... - Page 47 Control interfaces DEFINITION Selection Choice Description LANGUAGE ENGLISH Select the language. FRENCH TEMPERATURE UNIT °C Select the temperature unit. °F PRESSURE UNIT mbar Select the pressure unit. Torr PUMP MODEL A124 / A204/ A604 / A804 /A1204 / Select the pump model (reserved for service). A1504 /A1804 /A2504 /A3004 PUMP TYPE Select the pump type (reserved for service).
- Page 48 Control interfaces SETTING Selection Setting range CONTRAST 30-250 PURGE PURGE FLOW LOW DEFAULTS PRE-WARNING DISABLED ENABLED Threshold 20-120 slm Delay 0- 600 s WARNING DISABLED ENABLED Threshold 15-120 slm Delay 0- 600 s PRE-ALARM Threshold 15 slm Delay 0- 600 s PURGE PROLONG Delay 0-7200 s...
- Page 49 Control interfaces SETTING Selection Setting range TEMPERATURE LP FB T° ENABLED CONTROL SETPOINT H: 70-120 °C X: 50-120 °C DEFAULTS HIGH DEFAULTS ALARM Threshold 80-130 °C Delay 0-600 s WARNING Threshold setpoint +5 °C Delay LOW DEFAULTS DESABLED ENABLED Threshold setpoint - 10 °C Delay MEASUREMENT DEFAULTS...
- Page 50 Control interfaces SETTING Selection Setting range TEMPERATURE DEFAULTS PRE-ALARM DESABLED HEATER ALARMS ENABLED Delay 0-600 s WARNING DESABLED ENABLED Delay EXH PRESSURE HIGH DEFAULTS WARNING Threshold 500-1990 mbar Delay 0-600 s PRE-WARNING DISABLED ENABLED Threshold 500-1650 mbar Delay 0-600 s ALARM Threshold 1990 mbar...
- Page 51 Control interfaces MAINTENANCE Selection Display RUNNING TIME (XXXXX h): total functionning time MAINTENANCE TIME VALUE XXXXX h: functionning time after the last maintenance WARNING YYYYY h : warning THRESHOLD (Threshold adjustement depending on process type) WATER DRAINING DISABLED Allows to drain the water cooling circuit (access with password) ENABLED (1) Modification possible only with pump stopped.
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Page 52: Remote Control J1 Connector
Control interfaces Remote control J1 connector 8.3.1 Description NOTICE Extra low voltage circuit The remote control circuits are equipped with dry contact outputs (30 V - 1 A max.). Any overvoltage or overcurrent can result in internal electrical damage. The installer must: Connect these outputs in accordance with the rules and protection of safety extra low voltage (SELV) circuits,... -
Page 53: Wiring Of The Digital Outputs
Control interfaces Contact Function S2 (20-21) Pump Start/Stop Contact closed: pump starts. Contact open: pump stops. This function is valid when REMOTE mode is validated: S1 contact open. S3 (22-23) Roots Start/Stop Contact closed: Roots starts. Contact open: Roots stops. This function is valid when: –... -
Page 54: Remote Control J3 Connector
Control interfaces Remote control J3 connector 8.4.1 Description NOTICE Extra low voltage circuit The remote control circuits are equipped with dry contact outputs (30 V - 1 A max.). Any overvoltage or overcurrent can result in internal electrical damage. The installer must: Connect these outputs in accordance with the rules and protection of safety extra low voltage (SELV) circuits,... -
Page 55: Command Of An Inlet Isolation Valve Via J4 Connector
Control interfaces 8.4.3 Wiring of analog inputs Fig. 16: J3 connector: analog output wiring Contact Function A1 (5-13) IN_ANA_SPEED Rotation frequency setpoint (0/10 V input) (see 7.9): – for the maximum frequency: the voltage applied is between 0 and 3 V, –... -
Page 56: Remote Control J5 Connector
Control interfaces 8.5.2 Wiring of digital inputs Fig. 17: J4 connector: digital input wiring Contact Function S1 (2-10) IN_IN_VALVE_OPEN Contact open in end of travel not reached: warning triggered. S2 (3-11) IN_IN_VALVE_CLOSE Contact open in end of travel not reached: warning triggered. S6 (6-14) IN_SOFT_VALVE_OPEN Contact open in end of travel not reached: warning triggered. -
Page 57: Wiring Of Digital Inputs
Control interfaces 8.6.2 Wiring of digital inputs Fig. 19: J5 connector: digital input wiring Contact Function S1 (1-4) Roots 2 frequency Contact closed: Roots 2 starts. converter status Contact open: Roots 2 stops. S2 (2-4) Roots 2 frequency Contact closed: no warning converter warning Contact open: there is a warning on Roots 2. -
Page 58: Emergency Stop Connector
Control interfaces Emergency stop connector 8.7.1 Description NOTICE Extra low voltage circuit The remote control circuits are equipped with dry contact outputs (30 V - 1 A max.). Any overvoltage or overcurrent can result in internal electrical damage. The installer must: Connect these outputs in accordance with the rules and protection of safety extra low voltage (SELV) circuits,... -
Page 59: Maintenance
NOTICE Exclusion of liability Pfeiffer Vacuum accepts no responsibility concerning equipment damage, disrupted service or physical injury resulting from maintenance carried out by technicians who have not been trained in safety rules (EMC, electrical hazards, chemical pollution). Lia- bility and warranty claims shall be inadmissible in this case. -
Page 60: How To Contact Us
Maintenance WARNING Other localised hazardous energies Electrical circuits and other pressurized circuits, such as nitrogen and water are poten- tial hazards. Always lock out these energy sources before working on the product. ● Ensure that the maintenance technician is trained in the safety rules concerning pumped gases. -
Page 61: Freeing Up The Fb
Maintenance Check the oil level via the holes provided for this purpose. For it, remove the rubber caps on the side covers and put them back in place after oil check: they protect the product against the intrusion of solids and liquids. Semi Option: check the proper operation of safety interlocks [N2 pressure, exhaust overpressure, exhaust ventilation pressure, FB and Roots motor temperature (FB MOT, RSV1 MOT)] once every 6 months. -
Page 62: Disconnecting The Pump From The Installation
Maintenance – Disconnecting the pump from the installation (see 9.5.1) – Draining the water circuit (see 9.5.2) – Conditioning the pump for shipping (see 9.5.3) – Declaration of contamination (see 12) – Handling the new pump (see 3) – Installing the new pump (see 5) –... -
Page 63: Draining The Water Circuit
9.5.3 Conditioning the pump for shipping Install the transport flange (except for A 124H, A 204H, A 204X, A 2404H, A 2404X models) (see 15.1). – Remove the top cover. – Attach the yellow transport flange using the screws: 1 screw (or 2) on the pump flange and 2 on the frame rails. -
Page 64: Decommissioning
The only guaranteed solution by Pfeiffer Vacuum to restart a process pump after a prolonged stop is to perform a com- plete overhaul of the pump. - Page 65 Decommissioning Our products contain various materials which can be recycled: steel, stainless steel, cast iron, brass, aluminum, nickel, copper, fluoroelastomers, perfluorinated synthetic oil. Take particular precautions for: ● fluoroelastomers which may breakdown if they are subjected to high temperatures, ● components in contact with the products resulting from the processes which may have been contaminated, ●...
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Page 66: Malfunctions
Malfunctions 11 Malfunctions Study the safety instructions related to maintenance (see 9.1). 11.1 What happens in the event of a defect When a problem occurs, the user is informed through: – the relevant fault indicator light: yellow lit in case of warning, red lit in case of alarm, –... -
Page 67: Pump Or Roots Does Not Start
Malfunctions 11.2 Pump or Roots does not start 11.2.1 The white indicator light Power does not switch on Incident Cause Remedy Power indicator light does not No mains Check power supply. switch on Main switch on position O Switch it on I. External emergency stop engaged Check the presence of cover plug EMS or check its locking. - Page 68 Malfunctions Incident Cause Remedy W05/D05 LOG IN.1 Incorrect monitoring configuration Check that [LOG 1], [LOG 2] or [LOG 3] is [DIS- ABLED] if input is not used. W06/D06 LOG IN.2 Check the warnings or fault delays. W12/D12 LOG IN.3 Connection not present or cut Check the sensors connection on LI1, LI2 and LI3 plug (see 15.4).
- Page 69 Malfunctions Incident Cause Remedy HP FB water valve problem Check the condition of the solenoid valve dia- phragm and its operation. HP T° < setpoint T -10°C Temperature sensor problem Check the proper operation and the connection of the sensor on FB HP TEMP plug (see 15.4). Other problem Contact your service center.
- Page 70 Malfunctions Incident Cause Remedy D40 HAZ T° R1 MOT Roots 1 motor temperature is > 150°C Check the water cooling supply on the pump. Check that the Roots 1 motor is correctly cooled. Check that the cooling pipes are not clogged. Sensor not connected Check the connection of the sensor on RSV1 MOTOR plug (see 15.4).
- Page 71 Malfunctions Incident Cause Remedy W60/D60 ROOTS 2 T° Incorrect monitoring configuration Check that [DEFINITION] [ROOTS R2 OPTION] is set on [DESABLED]. Cooling problem Check the water cooling supply on the pump. Check that the Roots 2 motor is correctly cooled. Check that the cooling pipes are not clogged.
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Page 72: The Pump Is Running But The Performance Is Not Correct
Malfunctions Incident Cause Remedy D89 FB PH DRIVE Phase loss of FB frequency inverter Check the power supply wiring of the concerned frequency inverter (presence of voltage on R, S W90 R1 PH DRIVE Phase loss of Roots 1 frequency inverter and T terminal plugs) W91 R2 PH DRIVE Phase loss of Roots 2 frequency inverter... -
Page 73: Service
Fill out the "Service Request/Product Return" form and send it to your local Pfeiffer Vacuum Service contact. Include the confirmation on the service request from Pfeiffer Vacuum with your ship- ment. Fill out the declaration of contamination and include it in the shipment (mandatory!). -
Page 74: Accessories
Accessories 13 Accessories Accessory Type Dimension Isolation valve at pump inlet Auto valve 24 VDC Stainless steel DN 100 ISO-F DN 160 ISO-F Cable for electropneumatic valve Length 1,2 m A335263 Seismic bracket Set of two seismic brackets 122339S Hand-held remote control HHR EDR and cable (length 1.5 m) 125540S Spiral cable... -
Page 75: Technical Data And Dimensions
Technical data and dimensions 14 Technical data and dimensions 14.1 Technical data Characteristics Unit A 204H A 804H/ A 1504H/ A 1804H/ A 2404H/ /A 204X A 804X A 1504X A 1804X A 2404X Peak pumping speed (50/60 Hz) 130/160 600/700 1100/1200 1650/1700... - Page 76 Technical data and dimensions Characteristics Unit A 2504H/A 2504X A 3004H/A 3004X Peak pumping speed (60 Hz) 2500 3000 Maximum ultimate pressure 4·10 4 ·10 (without N purge) (60 Hz) Maximum ultimate pressure 9·10 9·10 (with N purge 50 slm) (60 Hz) Maximum pumped volume Maximum continuous inlet flow...
- Page 77 Technical data and dimensions Characteristics Unit A 124H A 604H A 1204H Peak pumping speed (50/60 Hz) 95/110 480/560 1050/1150 Maximum ultimate pressure (without N purge) (50/60 Hz) 5 ·10 /2·10 3·10 /2·10 4·10 /2.2·10 Maximum ultimate pressure (with N...
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Page 78: Facilities Characteristics
> 2·10 The oxidising action of the chlorine depends on the pH (aggressiveness of the water). The chlorine content must be within the coloured area on the graph opposite. Depend on pumping conditions. Contact Pfeiffer Vacuum. Connection Water inlet 3/8’’ NPT male connection... -
Page 79: Electrical Characteristics
1) For other networks, types T.N or I.T, use the proper protection device Model Main circuit breaker rat- Cable wire specifica- (minimum values) tions A 124H 200-230V 50/60 Hz 15 A 2.5 mm AWG-14 380-480V 50/60 Hz 10 A 1.5 mm... -
Page 80: Dimensions
14.3 Dimensions 260 (A) 274 (B) 284 (C) 294 (D) Fig. 23: A 124H, A 204H, A 204X - Dimensions (mm) 260 (A) 274 (B) 284 (C) 294 (D) Fig. 24: A 604H, A 804H, A 804X - Dimensions (mm) - Page 81 Technical data and dimensions 260 (A) 274 (B) 284 (C) 294 (D) Fig. 25: A 1204H, A 1504H, A 1504X, A 1804H, A 1804X - Dimensions (mm) Fig. 26: A 2404H, A 2404X - Dimensions (mm)
- Page 82 Technical data and dimensions Fig. 27: A 2504H, A 2504X, A 3004H, A 3004X - Dimensions...
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Page 83: Weight Distribution And Seismic Brackets
Bracket: seismic accessory Seismic anchorage points – Screw number: 4 – Screw diameter: M12 Pump model Center of gravity (mm) Pump model Load by foot (DaN) A 124H A 124H 40,7 87,7 35,3 76,3 A 204H/A 204X A 204H/A 204X... -
Page 84: Materials
The material in contact with the process gases are the followings: iron, stainless steel, fluoroelastomer, nickel and perfluorinated synthetic oil. The safety data sheet of A113 oil is available our website Pfeiffer Vacuum. 14.6 Maintenance area Luminosity > 300 lux... -
Page 85: Appendix
Appendix 15 Appendix 15.1 Location of transport flange 15.2 Location of electrical components RT3 RT2 RT1 Fig. 28: Location of electrical components : pump without frequency converter 24V power supply (A 204H/A 204X only) A1/A2 Current sensor Auxiliary contact FB circuit breaker FB command Roots circuit breaker Roots command... -
Page 86: Circuit Breaker Setting
F1/F2 Power filter Roots circuit breaker Heating circuit breaker (option) 15.3 Circuit breaker setting Pump Voltage A 124H 200-230 V - 50/60 Hz 14 A 380-480 V - 50/60 Hz 2.5 A A 204H/A 204X 200-230 V - 50/60 Hz... -
Page 87: Sensor Connectors Lay-Out
Appendix Pump Voltage A 2404H/A 2404X/A 2504H/A 2504X/A 3004H/A 3004X 200-230 V - 50/60 Hz 16 A 16 A 380-480 V - 50/60 Hz 13 A 13 A 2.5 A 15.4 Sensor connectors lay-out N2 VALVES RSV1 VALVES FB VALVES RSV1 MOTOR FB MOTOR H2O FLOW... -
Page 88: Etl Mark
ETL Mark... -
Page 89: Certificate Of Conformance To Semi
Certificate of conformance to SEMI... -
Page 90: Certificate Of Conformance To Semi
Certificate of conformance to SEMI... -
Page 91: Declaration Of Conformity
98, avenue de Brogny · B.P. 2069, 74009 Annecy cedex. A 124H / A 204H / A 604H / A 804H / A 1204H / A 1504H / A 1804H / A 2404H / A 2504 H / A3004 H... - Page 92 VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.
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