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Summary of Contents for Pfeiffer Vacuum Adixen A4 Series
- Page 1 A4 Series Multi-stage Roots pump for harsh applications Operating Instructions...
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Page 2: Table Of Contents
Table of contents Table of contents About this manual ..........5 1.1 Validity. - Page 3 Table of contents 6.2.3 Auto-restart configuration ....... 31 6.2.4 Start-up after an emergency stop ......31 6.2.5 Option Roots command .
- Page 4 Table of contents 9.1.1 How to contact us ........58 9.2 Maintenance frequency.
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Page 5: About This Manual
About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. -
Page 6: Pictographs
About this manual 1.2.2 Pictographs Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document... - Page 7 About this manual This label warns the user against possible risk of injury due to any hand contact with hot surfaces. It states that protective gloves should be used before performing any intervention. This label informs the user, that moving parts present inside the pump could cause per- sonal injury, like crushing or cutting.
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Page 8: Safety
Safety Safety Safety precautions Obligation to inform Any person responsible for installing, using or maintaining the product must first read the security instructions in this operating manual and comply with them. It is the operating customer’s responsibility to protect all operators against the dan- gers associated with the product, with the media pumped and with the entire instal- lation. -
Page 9: Safety For Flammable/Pyrophoric Materials
Safety WARNING Risk associated with process gases The user and/or integrator of the product is/are fully responsible for the operational safe- ty conditions of the equipment. The manufacturer has no control over the types of gases this pump is exposed to. Frequently process gases are toxic, flammable, corrosive, ex- plosive and/or otherwise reactive. -
Page 10: Protective Equipment
Interlock ‘gas purge fault ‘and ‘pump fault’ signals with tool in order to stop process gases in case of insufficient dilution. For more details regarding safety instructions related to flammable and pyrophoric gas- es, contact Pfeiffer Vacuum Service. Protective equipment In some situations, personal protective equipment must be worn when handling the vac- uum pump and its components. -
Page 11: Proper Use
Safety Proper use NOTICE EC conformity The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components. Following installation into a plant and before commissioning, the operator must check the entire system for compliance with the valid EU directives and reassess it accord- ingly. -
Page 12: Transport And Storage
Transport and storage Transport and storage Upon delivery, check that the product has not been damaged during transport. If the product is damaged, contact the carrier and notify the manufacturer. In all situations we recommend: Keeping the product in its original packaging so it stays as clean as it was when dis- patched by us. -
Page 13: Storage
Transport and storage Storage NOTICE Duty to inform In order to prevent moisture from entering the pump before installation, it has been pres- surized before shipment with nitrogen and sealed with blanking plates. Do not remove the blanking plates sealing the inlet and exhaust ports if the product is not connected to the pumping line. -
Page 14: Product Description
Product description Product description Product identification To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available. adixen Vacuum Products F - 74009 Annecy AP8001082 YYYYY N° Type THREE PHASES Full-Load Ampere... -
Page 15: Man/Machine Interfaces
Product description Man/machine interfaces Fig. 2: Front panel Inlet Emergency stop White indicator light: pump powered Power Running Green indicator light: pump started Warning Yellow indicator light: alert Red indicator light: alarm Fault Hand-held remote module connector... - Page 16 Product description Fig. 3: Rear panel Main switch Power supply Inlet Exhaust Nitrogen inlet Water inlet/outlet EMO Emergency stop connector Earth connector Pressure regulator REMOTE control connector Roots 2 connector RS-232 SERIAL LINK connector RS-232/485 SERIAL LINK connector USER connector RS-485 SERIAL LINK connector Coding wheel Configuration switch...
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Page 17: Hand-Held Remote Module (Hhr)
Product description Hand-held remote module (HHR) It interfaces with the pump. The keyboard is used to display and configure parameters. Fig. 4: Hand-held remote module 1 Display 3 Parameter selection and configuration keys 2 Indicator Green: the pump is running 4 Manual control keys lights Yellow: warning presence... -
Page 18: Display Description
Product description 4.3.2 Display description The monitoring displays the status of the pump and the operating parameters. Gain access to other operating parameters using + or – keys. 185H RUNNING LP FB T°: 107°C HP FB T°: 127°C 1 Time machine 3 Pump status/fault messages 2 Control mode 4 Operating parameters/fault messages... -
Page 19: Installation
Installation Installation Set-up The pump must be operated in the horizontal position in support on its feet, with the pumping axis vertical and the inlet opening upwards. Determine where the pump will be placed. Use the handling devices to position the pump in the desired location, lift the pump using hoisting rings (see 3.1). -
Page 20: Oil Filling Caution
Installation Roots Roots Fig. 5: Oil case filling 1 Roots motor side housing fill plug FB drain plug 2 Roots motor side housing drain plug Roots gear side housing fill plug 3 Roots motor side housing sight glass Roots gear side housing sight glass 4 Functional block fill plug Roots gear side housing drain plug 5 Functional block sight glass... -
Page 21: Connection To The Water Circuit
Installation Note*: Roots housing gear side of A 804H/A 804X is delivered filled with oil. Connection to the water circuit In order to limit corrosion and motor cooling circuit clogging, it is recommended to use water with the required characteristics (see 14.2.2). If the ”solid particle size“... -
Page 22: Connection To The Nitrogen Circuit
Installation Connection to the nitrogen circuit DANGER Risk of explosion If pyrophoric materials above the LEL (lower explosive limit) are sent to the pump, the nitrogen supply must make it possible to dilute this concentration. Ensure there is a sufficient flow of nitrogen to lower the concentration below the LEL. Provide in addition an interlock to ensure that gas flow towards the pump is stopped when nitrogen is lost. -
Page 23: Connection To The Pumping Line
Installation Connection to the pumping line When there are pyrophoric, inflammable or toxic materials in the pump, this may lead to additional risks which the operator must assess and manage for the entire pumping sys- tem. The user and/or product OEM is ultimately responsible for the equipment and must apply the specific safety guidelines, in accordance with local legislation. -
Page 24: Exhaust Ventilation Of The Cover
Installation 5.5.1 Connection at pump inlet NOTICE Limit of operation Make sure that the parts or chambers connected to the inlet of our products withstand a negative pressure of 1·10 hPa in relation to atmospheric pressure. To improve pumping speed, the pumping line must be as short as possible and its inter- nal diameter must not be less than the pump inlet flange. -
Page 25: Leak Test
Carry out regular checks to ensure that there are no traces of the gases pumped in the surrounding environment and that no air is entering the pumping line while the pump is running. For further information concerning leak tests, please contact the Pfeiffer Vacuum service center. -
Page 26: Electrical Connection
Installation Electrical connection WARNING Electric shock hazard Voltage and current can cause electric shock. Only skilled, authorized operator trained in the relevant health and safety aspects (EMC, electrical hazards, chemical pollution, etc.) may carry out maintenance work. Isolate and lock out power line to the product by positioning the main switch on O. Disconnect the power line cable from all power sources before doing any work on the product and/or removing the covers. -
Page 27: Connection To The Mains Power Supply
Installation Model Main circuit breaker rating (minimum values) 200-230V 50/60 Hz 380-480V 50/60 Hz A 1504H/A 1504X 35 A 25 A A 1804H/A 1804X 35 A 25 A For any change of power supply voltage in relation to the initial configuration, contact your service center. -
Page 28: Operating For The First Time
Installation Operating for the first time Check before each time the pump is started up that the oil levels in the housings are visible in the center of the sight glasses (see 5.2.2): carry out this check with the pump stopped. -
Page 29: Navigation In The Menus
Installation 5.9.6 Navigation in the menus Fast scroll by continuously holding down the + and – keys. For all the other keys, press several times. Example of resetting the clock: Press the SET key to enter the menu. 185H PUMPING STOPPED 06/05/13 10:10 Validate with the ENTER key. -
Page 30: Operation
Operation Operation The following steps describe use of the pump with the default settings. The pump is lo- cally controlled: the [CONTROL MODE] is [HHR]. For other control modes, please refer to Control Interfaces (see 8) for instructions on how to wire and set the parameters of the other interfaces. -
Page 31: Auto-Restart Configuration
Operation – FB pump starts up, – purge gas valve opens, – Roots pump starts up, – inlet valve opens (if any and if set). The operating parameters are displayed. Gain access to other operating parameters using + or – 185H keys. -
Page 32: Pump Shut-Down
Operation Pump shut-down 6.3.1 Pumping stop Press on STOP key and valid with ENTER. The following operations will perform automatically: – inlet valve closes (if any and if set), – pump(s) stop(s) (FB and Roots), – injection of purge gas continues during the shutdown phase if timing of [PURGE PRO- LONG] has been set (0 to 120 min) (see 8.2.1) and (see 7.1.3). -
Page 33: Use With Two Hhrs
Operation Use with two HHRs Two HHR can be connected to the pump (HHR on pump front panel, J8 at the rear panel (see 4.2)). Reading of data and parameters can be done on both HHR, even if they do not control the pump. - Page 34 Operation Valid with ENTER. The former configuration is automatically reset. All pump parameters are loaded remotely, except the following ones which have to be locally set according to the pump: – language – buzzer – serial link – date and time –...
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Page 35: Advanced Settings
Advanced settings Advanced settings This chapter describes the functions available and their respective operating modes to help the user to configure the parameters according to the operating specifications dur- ing processes. Nitrogen injection device The nitrogen injection device is used to facilitate the evacuation of pollutants produced by the process, to dilute harmful gases in the compression stages and to protect the me- chanical parts of the pump. -
Page 36: Indicating A Nitrogen Flow Defect
Advanced settings Purge valve Stand-by valve Pump PURGE START STOP PURGE Time WARNING Risk due to process gases Never stop the purge when the pump is running. 7.1.2 Indicating a nitrogen flow defect 2 monitoring thresholds (pre-warning and warning) and a delay linked to each threshold can be set [SETTING] [PURGE] [PURGE FLOW] [WARNING]/[PRE-WARNING](see 8.2.1). -
Page 37: Exhaust Pressure Monitoring
Advanced settings Exhaust pressure monitoring Exhaust pressure monitoring combined with functional block power monitoring is used to control the level of clogging in the functional block. The nitrogen injection system is fitted with a pressure sensor located in stage HP5 of the functional block, see fig.10. This sen- sor is used to measure the pump exhaust pressure. -
Page 38: Water Circuit
Advanced settings Water circuit The water circuit dissipates heat from the functional block to protect the mechanical and electrical components (motors and frequency converters). It is also used for thermal regulation of the high pressure (HP) and low pressure (LP) stages of the functional block (FB) (see 7.5). -
Page 39: Water Supply Management
Advanced settings Water supply management The total water flow is measured by a flowmeter. Threshold and delay are set with menu [SETTING] [WATER FLOW] [ANA SENSOR]. No flowmeter is managed. Protection is provided by the temperature sensors. DISABLED The flowmeter measures the water flow rate. The warning threshold and the associated ENABLED delay can be modified (see 8.2.1). -
Page 40: Roots Temperature
Advanced settings Roots temperature The Roots cooling cicuit is fitted with a manual valve V1 which allows the Roots body to be cooled or not, depending on the application. A temperature probe TR measures the Roots temperature (on A 804H/A 804X) (see fig. 12). 2 monitoring thresholds (warning and alarm) and associated delay can be set, [SET- TING] [TEMPERATURE] [ROOTS 1 T°... -
Page 41: Management Of An Inlet Isolation Valve
Advanced settings Temperature Warning message Warning threshold No message T°setpoint - 10°C Time The heating system is equipped with a thermal safety which cause a fault in case of over- load. A warning appears. A delay can be set for an alarm: [SETTING] [TEMPERATURE] [HEATER] [ALARM] [DELAY]. -
Page 42: Motor Power Monitoring
Advanced settings Control from serial link The serial link valve opening/closing command is only taken into account if the J1-S7 contact is closed. The isolation valve is controlled automatically by the pump when it stops or starts. AUTO INLET VALVE When the pump starts, the valve opens 3 seconds after. -
Page 43: Idle Mode
Advanced settings – from serial link (see Serial link operating instructions). In this mode, the rotation frequency parameters are set using the HHR or by RS. Prepro- FIXE grammed frequencies can be selected The analog management mode is only possible if [IDLE MODE] is [DESABLED]. The ANALOG rotation frequency is defined by an analog input J3 (user connection) (see 8.4.3). -
Page 44: Logic Input Management
Advanced settings Analog input Alarm message + warning alarm pump stopped Alarm threshold Warning message Warning threshold No message Time 7.13 Logic input management Three logic inputs are available on the LI1, LI2 and LI3 plugs (see 15.4). LI1 and LI2 are two opening logic inputs. LI3 is a closing logic input. Two monitoring delays can be set (warning and alarm) [SETTING] [LOGIC INPUT] [LOG1]/[LOG2]/[LOG3] [ENABLED](see 8.2.1). -
Page 45: Control Interfaces
Control interfaces Control interfaces This chapter describes the connections and protocols associated with each control mode. Different control mode 4 control mode are available: – HHR: locally controlled by the hand-held remote, – REMOTE: remote controlled by J1 connector, – SERIAL LINK: remote controlled by serial link J2, J7, J6, –... - Page 46 Control interfaces DEFINITION Selection Choice Description Default setting LANGUAGE ENGLISH Select the language. FRENCH FRENCH TEMPERATURE UNIT °C Select the temperature unit. °C °F PRESSURE UNIT mbar Select the pressure unit. mbar Torr PUMP MODEL A124 / A204 Select the pump model. According to the pump A604 / A804 A1204 / A1504...
- Page 47 Control interfaces SETTING Selection Choice Setting range Default setting CONTRAST 0 to 255 PURGE PURGE FLOW ALARM DISABLED DISABLED ENABLED DELAY 0 to 600 s 600 s WARNING DISABLED ENABLED ENABLED THRESHOLD 15 to 120 slm 30 slm DELAY 0 to 600 s 10 s PRE-WARNING DISABLED...
- Page 48 Control interfaces SETTING Selection Choice Setting range Default setting TEMPERATURE HP FB T° CONTROL THRESHOLD 75 to 75°C 75°C ALARM 85 to 160°C 85°C LP FB T° CONTROL THRESHOLD 50 to 75°C 75°C ALARM 85 to 140°C 85°C ROOTS 1 T° DISABLED MESURE MEASUREMENT ALARM...
- Page 49 Control interfaces SETTING Selection Choice Setting range Default setting ANALOGIC IN- ANA 1 DISABLED DISABLED ENABLED ALARM DISABLED ENABLED ENABLED THRESHOLD 2000 to 10000 mV 5000 mV DELAY 0 to 600 s WARNING DISABLED – ENABLED THRESHOLD 0 to 5000 mV 2000 mV DELAY 0 to 600 s...
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Page 50: Remote Control J1 Connector
Control interfaces LAST EVENTS Selection Display LAST EVENT 1 UUnnn: xxxxxxxxxxxxx UU: action type : C=command, PW= pre-warning, W=warning, D=alarm nnn: fault number LAST EVENT 2 DATE TIME xxx: fault name vvv: mode control LAST EVENT X Remote control J1 connector 8.3.1 Description NOTICE... -
Page 51: Wiring Of The Digital Outputs
Control interfaces +24V Fig. 15: J1 connector : control with dry contacts Dry contacts are normally opened (NO): these contacts close if voltage is present. Contact Function S1 (18-19) HHR or REMOTE Contact closed: local mode. mode Contact open: remote control mode. This function is valid when [DEFINITION] [CONTROL MODE] [REMOTE] is selected. -
Page 52: Remote Control J3 Connector
Control interfaces Contact Function Pump running, correct purge and inlet valve opened 12-13 Pump in stand-by mode 14-15 Pump running (FB + Roots running) 16-17 Status of inlet valve 35-36 Motor temperature warning 37-38 Purge warning 39-40 Exhaust pressure warning 43-44 FB running 45-46... -
Page 53: Command Of An Inlet Isolation Valve Via J4 Connector
Control interfaces Contact Function S4 (7-8) Pump Start/ Contact closed: pump starts. Stop Contact open: pump stops. This function is valid when [DEFINITION] [CONTROL MODE] [USER] is selected (see 8.2.1). IDLE option Contact status Stand-by valve Rotation speed HHR display Full closed minimum... -
Page 54: Remote Control J5 Connector
Control interfaces 8.5.2 Wiring of digital inputs Fig. 18: J4 connector: digital input wiring Dry contacts are normally opened (NO): these contacts close if voltage is present. Contact Function S1 (2-10) IN_IN_VALVE_OPEN Contact open in end of travel not reached: warning triggered. S2 (3-11) IN_IN_VALVE_CLOSE Contact open in end of travel not reached: warning triggered. -
Page 55: Wiring Of Digital Inputs
Control interfaces 8.6.2 Wiring of digital inputs Fig. 20: J5 connector: digital input wiring Dry contacts are normally opened (NO): these contacts close if voltage is present. Contact Function S1 (1-4) Roots 2 frequency Contact closed: Roots 2 starts. converter status Contact open: Roots 2 stops. -
Page 56: Emergency Stop Connector
Control interfaces Emergency stop connector 8.7.1 Description NOTICE Extra low voltage circuit The remote control circuits are equipped with dry contact outputs (30 V - 1 A max.). Any overvoltage or overcurrent can result in internal electrical damage. The installer must: Connect these outputs in accordance with the rules and protection of safety extra low voltage (SELV) circuits,... -
Page 57: Maintenance
NOTICE Exclusion of liability Pfeiffer Vacuum accepts no responsibility concerning equipment damage, disrupted service or physical injury resulting from maintenance carried out by technicians who have not been trained in safety rules (EMC, electrical hazards, chemical pollution). Lia- bility and warranty claims shall be inadmissible in this case. -
Page 58: How To Contact Us
Maintenance WARNING Other located hazardous energies Electrical circuit and other pressurized circuits as nitrogen and water are potential haz- ards. Always lock out these energy sources before working on the product. Ensure that the maintenance technician is trained in the safety rules concerning pumped gases. -
Page 59: Freeing Up The Fb
Maintenance Freeing up the FB DANGER Risk for the health in case of contact with toxic substances During pump removal, operator could be in contact with process residues on the ex- haust which could cause severe injury or death. Take the appropriate safety recommendations to prevent injury. Consult the respon- sible department for instructions and safety information. -
Page 60: Disconnecting The Pump From The Installation
Maintenance – Loading the pump configuration (see 6.6.2). When returning a product to our service center, please consult the Service procedure (see 12) and fill in the contamination declaration available on our website. 9.5.1 Disconnecting the pump from the installation DANGER Risk for the health in case of contact with toxic substances During pump removal, operator could be in contact with process residues on the ex-... -
Page 61: Conditioning The Pump For Shipping
Maintenance Note: as the water circuit is equipped with water valve normally closed, some water stays into a part of the circuit. It’s not a problem for shipping. Complete water draining will be done during pump overhaul. 9.5.3 Conditioning the pump for shipping Install the transport flange (except for A 124H, A 204H, A 204X models) (see 15.1). -
Page 62: Decommissioning
The only guaranteed solution by Pfeiffer Vacuum to restart a process pump after a prolonged stop is to perform a com- plete overhaul of the pump. - Page 63 Decommissioning Our products contain various materials which can be recycled: iron, steel, stainless steel, cast iron, brass, aluminum, nickel, copper, fluoroelastomers, PTFE, FEP. Take particular precautions for: fluoroelastomers which may breakdown if they are subjected to high temperatures, components in contact with the products resulting from the processes which may have been contaminated, lithium batteries.
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Page 64: Malfunctions
Malfunctions 11 Malfunctions Study the safety instructions related to maintenance (see 2). 11.1 What happens in case of a defect When a problem occurs, the user is informed by: – the relevant fault indicator light: yellow lit in case of warning, red lit in case of alarm, –... -
Page 65: Hhr Display Is Not Lighting Up
Malfunctions 11.2.2 HHR display is not lighting up Incident Cause Remedy HHR display is not lighting up, but Twisted cable incorrectly connected Check the connection. Power indicator light is lit Other problem Contact your service center. 11.3 The pump is running and HHR is showing a fault message Incident Cause Remedy... - Page 66 Malfunctions Incident Cause Remedy PW13/W13/D13 N2 FLOW No purge flow Check nitrogen supply. Check the valve connection on N2 VALVES plug (see 15.4). Insufficient purge flow Check the setting of nitrogen flow. Check that there is no leak. Incorrect threshold setting Check the warning and alarm thresholds.
- Page 67 Malfunctions Incident Cause Remedy D41 HAZ T° MOT FB FB motor temperature is > 150°C See warning W08 H2O FLOW. Sensor problem Check the sensor connection on FB MOTOR plug (see 15.4). FB mechanical problem Free the FB manually (see 9.4). Other problem Contact your service center.
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Page 68: The Pump Is Running But The Performances Are Not Correct
Malfunctions Incident Cause Remedy D74 FB U+ DRIVE Frequency converter problem Contact your service center. W75 R2 U+ R1 DRIVE Frequency converter problem Contact your service center. W76 R2 U+ R2 DRIVE Frequency converter problem Contact your service center. D77 FB P DRIVE Frequency converter problem Contact your service center. -
Page 69: Service
Fill out the "Service Request/Product Return" form and send it to your local Pfeiffer Vacuum Service contact. Include the confirmation on the service request from Pfeiffer Vacuum with your ship- ment. Fill out the declaration of contamination and include it in the shipment (mandatory!). -
Page 70: Accessories
Accessories 13 Accessories Accessory Type Dimension Isolation valve at pump inlet Manual valve Stainless steel DN 100 ISO-F 30503M DN 160 ISO-F 30606M Auto valve 24 VDC Stainless steel DN 100 ISO-F DN 160 ISO-F Cable for electropneumatic valve Length 3.5 m 106532 Seismic bracket Set of two seismic brackets... -
Page 71: Technical Data And Dimensions
Technical data and dimensions 14 Technical data and dimensions 14.1 Technical data Characteristics Unit A 204H A 804H/ A 1504H/ A 1804H/ /A 204X A 804X A 1504X A 1804X Peak pumping speed (50/60 Hz) 130/160 600/700 1100/1200 1650/1700 Maximum ultimate pressure 2 ·10 /5·10 8·10... -
Page 72: Facilities Characteristics
> 2·10 The oxidising action of the chlorine depends on the pH (aggressiveness of the water). The chlorine content must be within the coloured area on the graph opposite. Depend on pumping conditions. Contact Pfeiffer Vacuum. Connection Water inlet 3/8’’ NPT male connector... -
Page 73: Nitrogen Characteristics
Technical data and dimensions 14.2.3 Nitrogen characteristics O concentration < 10 ppb concentration < 5 ppb Dust < 1 μm < 0.1 ppm Relative pressure 2 ·10 to 6 ·10 Connection Nitrogen inlet 1/8’’ NPT male connector Stainless steel 14.2.4 Electrical characteristics Circuit breaker with a minimum interrupting short circuit current 10 kA Cable wire specifications... -
Page 74: Dimensions
Technical data and dimensions 14.3 Dimensions 260 (A) 274 (B) 284 (C) 294 (D) Fig. 24: A 124H, A 204H, A 204X - Dimensions (mm) 260 (A) 274 (B) 284 (C) 294 (D) Fig. 25: A 604H, A 804H, A 804X - Dimensions (mm) Minimum space for connection Space between front castors Space between feet... - Page 75 Technical data and dimensions 260 (A) 274 (B) 284 (C) 294 (D) Fig. 26: A 1204H, A 1504H, A 1504X, A 1804H, A 1804X - Dimensions (mm)
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Page 76: Weight Distribution And Seismic Brackets
Technical data and dimensions 14.4 Weight distribution and seismic brackets 27,5 Section Center of gravity Bracket: seismic accessory Seismic anchorage points – Screw number: 4 – Screw diameter: M12 Pump model Center of gravity (mm) Pump model Load by foot (DaN) A 124H A 124H 40.7... -
Page 77: Maintenance Area
Technical data and dimensions 14.5 Maintenance area Luminosity > 300 lux... -
Page 78: Appendix
Appendix 15 Appendix 15.1 Location of transport flange 15.2 Location of electrical components RT3 RT2 RT1 Fig. 27: Location of electrical components : pump without frequency converter 24V power supply (A 204H/A 204X only) A1/A2 Current sensor Auxiliary contact FB circuit breaker FB command Roots circuit breaker Roots command... -
Page 79: Circuit Breaker Setting
Appendix VAR1 RT2 RT1 Fig. 28: Location of electrical components: pump with one frequency converter VAR1 Frequency converter Current sensor Power filter FB circuit breaker Auxiliary contact Roots circuit breaker FB command Heating circuit breaker (option) VAR1 VAR2 RT3 RT2 RT1 Fig. -
Page 80: Sensor Connectors Lay-Out
Appendix 15.4 Sensor connectors lay-out N2 VALVES RSV1 VALVES FB VALVES RSV1 MOTOR FB MOTOR H2O FLOW HEAT3 TEMP HEAT2 TEMP HEAT1 TEMP RSV1 TEMP FB HP TEMP FB PRESS FB SAFETY FB LP TEMP FLOW CONT ANA1... -
Page 81: Additional Safety Sensors
Appendix 15.5 Additional safety sensors These safety sensors allow to be in compliance with SEMI S2-0712 and SEMI S6-0707 standards. Sensor Function Threshold Pump status Message 1 Nitrogen pressure Detect a defect of purge P < 1200 hPa When the pressure is lower than the threshold, the alarm stops the pump. -
Page 82: Etl Mark
ETL Mark... -
Page 83: Certificate Of Conformance To Semi
Certificate of conformance to SEMI... -
Page 84: Declaration Of Conformity
Declaration of conformity We hereby declare that the product cited below satisfies all relevant provisions accord- ing to the following EC directives: Machinery 2006/42/EC (Annex II, no. 1 A) Electromagnetic Compatibility 2004/108/EC Restriction of the use of certain Hazardous Substances 2011/65/EU The technical file is drawn up by Mr Gilles Baret, adixen Vacuum Products, Société... - Page 85 Vacuum solutions Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, from a single source competent advice and reliable service. Complete range From a single component to complex systems: of products We are the only supplier of vacuum technology that provides a complete product portfolio.
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